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SEMI E100-1104 © SEMI 2000, 2003 4 Table 1 Info Pad Assignmen ts Info Pad RSP Configuration A B C D 230 mm reticle not defined not defined up down 6 inch reticle not defined not defined down down to be assigned not defin…

SEMI E100-1104 © SEMI 2000, 2004 3

bisecting plane through the reticle, parallel to the facial

reference plane must be within y133 of the facial

reference plane of the load port when the reticle is

seated in the carrier. When the carrier is open, it must

provide a horizontal reticle capture range of x135 and

y135. This capture range must be provided at z162

above the horizontal reference plane.

6.4 Exclusion Volumes — The interior of the RSP must

never intrude into the pellicle exclusion volumes, and

must not intrude into the end-effector exclusion

volumes or safety rail exclusion volumes when the

carrier is open. Where the exclusion volumes overlap,

the end-effector exclusion volume is reduced by the

pellicle exclusion volume when handling pelliclized or

chrome-down reticles.

6.4.1 End-Effector Exclusion Volumes — Volumes in

an opened pod which must be free for the end-effector

to enter and handle the reticle as defined by x116, x132,

y136, x144, x146, y144, z159, and z160 for a 230 mm

RSP, and by x118, x143, x145, y143, z159, and z160 for

a 6 inch RSP. No obstructions should exist in the end-

effector exclusion volume which extends in the

direction normal to the facial reference plane.

6.4.2 Pellicle Exclusion Volumes — Volumes in the

pod below the reticle which must remain free from

intrusion to accommodate the pellicle mounted on the

reticle. No obstructions should exist in the pellicle

exclusion volume which extends in the direction normal

to the facial reference plane as defined by x115, z159

and z161 for a 230 mm RSP, and by x119, z159 and

z161 for a 6 inch RSP. No obstructions should exist in

the transverse pellicle exclusion volume which extends

in the direction normal to the bilateral reference plane

as defined by y129, z159 and z163 for a 230 mm RSP,

and by y130, z

159 and z163 for a 6 inch RSP.

NOTE 1: The transverse pellicle exclusion volume is only

intended to specify where the reticle supports in the pod

cannot exist. Reticles with the pellicles transverse are

typically handled with end-effectors which grip from above

the reticle.

6.4.3 Safety Rail Exclusion Volumes — Volumes in an

opened pod which must remain free from intrusion to

accommodate safety rails which may be used on end-

effectors to protect the edge of the reticle during

handling. No obstructions should exist in the safety

rail exclusion volumes which extend in the direction

normal to the facial reference plane as defined by x137

and z167 for a 230 mm, and by x138 and z167 for a 6

inch RSP.

6.5 External Dimensions — Figures 1, 2 and 3 show,

respectively, the external top view, a detail and the

front view of the RSP. Table 2 defines all of the

external dimensions of the RSP (equivalent for both the

6 inch and the 230 mm versions).

6.6 Internal Dimensions — Figures 4 through 8 show

internal dimensions for the 6 inch and 230 mm versions

of the RSP. Table 2 defines all internal dimensions

which are common to the 6 inch and 230 mm RSP.

Table 3 defines the internal dimensions which apply

only to the 230 mm RSP. Table 4 defines the internal

dimensions which apply only to the 6 inch RSP. The

maximum height of the features which support the

reticle are given by z164 for a 230 mm RSP and z165

for a 6 inch RSP.

NOTE 2: The maximum height of the reticle supports, plus

the clearance between the reticle supports and reticle (chosen

by the tool supplier) determine the height the reticle must be

lifted before being extracted from, or inserted into the RSP.

6.7 Robotic Handling Flange — On the top of the pod

is an optional handling flange for automated

manipulation of the RSP. Figures 1, 3, and 5 show

dimensions for the robotic handling flange. Table 2

defines the dimensions for the robotic handling flange.

6.8 Side Handling Flanges — On the sides of the pod

parallel to the bilateral reference plane are optional

handling flanges for automated manipulation of the

RSP. Figures 1, 2, and 3 show dimensions for the side

handling flanges. Table 2 defines the dimensions for the

side handling flanges. No obstructions may exist in the

side handling exclusion volumes which extend in the

direction normal to the facial reference plane as defined

by x136 and z166 when the side handling flanges are

present.

6.9 Kinematic Coupling — The RSP door must have

the capability of registering on the kinematic pins

defined in SEMI E57. The features that mate with the

pins must provide a lead-in capability that corrects an

RSP misalignment no greater than r19 in any horizontal

direction. However, it is recommended that robots

placing RSPs on kinematic couplings use as little of this

lead-in capability as possible to avoid wear.

6.10 Carrier Sensing Pads — The RSP door must have

carrier sensing pads as defined in SEMI E1.9.

6.11 Info Pads — When the RSP is placed on a port,

the info pads A, B, C, and D communicate information

about the RSP configuration. Figures 6 and 8 show the

dimensions of the info pads. Table 2 defines the info

pad dimensions. A pad in the up position must be z26

above the horizontal reference plane. A pad in the

down position must be z2 above the horizontal

reference plane. Info pad assignments are shown in

Table 1. Info pads that are “not defined” can be at

either the up or down position unless specified by the

end user. RSP configurations “to be assigned” may be

assigned by the end user.

SEMI E100-1104 © SEMI 2000, 2003 4

Table 1 Info Pad Assignments

Info Pad

RSP

Configuration

A B C D

230 mm reticle not

defined

not

defined

up down

6 inch reticle not

defined

not

defined

down down

to be assigned not

defined

not

defined

up up

to be assigned not

defined

not

defined

down up

6.12 Inner and Outer Radii — All required concave

features may have a radius of up to r65 to allow

cleaning and to prevent contaminant build-up. All

required convex features may also have a radius of up

to r66 to prevent small contact patches with large

stresses that might cause wear and particles. Note that

these limits on the radius of all required features are

specified as a maximum (not a minimum) to ensure that

the required features are not rounded off too much. The

lower bound on the radius is up to the carrier supplier.

Note also that this radius applies to every required

feature unless another radius is called out specifically.

Here a required feature is an area on the surface of the

carrier specified by a dimension (or intersections of

dimensions) that has a tolerance and not just a

maximum or minimum (such as the edges of the robotic

handling flange).

6.13 Carrier ID Exclusion Volume — Volume external

to the pod which must remain free from intrusion to

accommodate a carrier ID label or tag mounted on the

pod. No obstructions should exist in the carrier ID

exclusion volume as defined by x147, y137, y138, z180,

and z181. Figures 1 and 3 show dimensions for the

carrier ID exclusion volume. Table 2 defines the

dimensions for the carrier ID exclusion volume. If a

label is used, its surface must be at y139.

6.14 Conveyor Rails — Optional surfaces on the

bottom for transporting the RSP on roller conveyors.

The conveyor rail surfaces are bounded by x140, x141,

x142, y140, y141 and y142 as shown in Figure 9. The

height of the conveyor rail surface is defined by z171.

Table 2 defines the dimensions for the conveyor rails.

7 Related Documents

7.1 SEMI Standards

SEMI E15 — Specification for Tool Load Port

SEMI P1 — Specification for Hard Surface Photomask

Substrates

SEMI P33 — Provisional Specification for Develop-

mental 230 mm Square Hard Surface Photomask

Substrates

SEMI S8 — Safety Guidelines for Ergonomics

Engineering of Semiconductor Manufacturing

Equipment

d63

= 35 + 0.9 / -0.1

Figure 1

External Top View of 230 mm and 6 inch RSP



Figure 2

Detail A: External Top View of Side Handling Flange Alignment Hole