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SEMI F13-1101 © SEMI 199 3, 2001 6 A P PENDIX 1 NOTE: The m aterial in this appen d ix is an off icial part of SEMI F13 an d w a s approved by full letter ballot procedures on August 27, 2001. A1-1 Scope A1-1.1 Under spe…
SEMI F13-1101 © SEMI 1993, 20015
10 Labeling
10.1 The GSCE panel should be labeled for the
product. Further labeling as defined in SEMI F14
should be affixed to the outside of the door of the
enclosure.
11 Instructions
11.1 The purchaser’s requirements will dictate the
information provided with the equipment. Minimum
acceptable instructions will vary with the complexity of
the equipment (e.g., manual, automatic, microprocessor
or pneumatically controlled, analog or digital, etc.) In
all cases, the following information should be included:
11.1.1 “WARNING: Read Instructions Before
Proceeding. (Instructions No. xxx for System No. xxx)
Do not proceed without understanding the status of the
equipment as received, or damage may result.”
11.1.2 Installation
11.1.2.1 Certified status of equipment as shipped
should include:
11.1.2.2 Leak integrity,
11.1.2.3 Particle level,
11.1.2.4 Contaminants,
11.1.2.5 Storage requirements,
11.1.2.6 Status indicators,
11.1.2.7 Removal of shipping safeguards,
11.1.2.8 Physical mounting and connection details, and
11.1.2.9 Purging during preparation and start-up.
11.1.3 Start-Up Method
11.1.3.1 Perform purge for initial start,
11.1.3.2 Pre-process (with substitute inert gas),
11.1.3.2.1 Confirm all component functions,
11.1.3.2.2 Confirm all operating levels and setpoints,
and
11.1.3.2.3 Confirm leak integrity.
11.1.4 Process Service — Operational purge
procedures that include the number of purge cycles and
purge pressure and vent dwell times, that take into
account the configuration of the system and the
intended process gas, should be determined before
process gas is installed.
11.1.5 Maintenance — Maintenance purge procedures
and panel repair and replacement procedures should be
defined before process gas is installed.
NOTE 3: Special warnings about the potential for dead space
in components or fittings, etc. (in normal or failed mode)
should be identified to avoid producing a hazardous condition
for any subsequent operation or handling at any location.
SEMI F13-1101 © SEMI 1993, 2001 6
APPENDIX 1
NOTE: The material in this appendix is an official part of SEMI F13 and was approved by full letter ballot
procedures on August 27, 2001.
A1-1 Scope
A1-1.1 Under special circumstances, it may be
necessary to cease using a product and remove it from
the cabinet to a safer and/or less populated
environment. This can be done in a number of ways.
A1-1.2 If the cylinder valve cannot be opened or
closed, the gas supplier must be notified. Prior
arrangements between the supplier and user of
procedures should be in place, so that the required
actions can be readily accomplished.
A1-2 Transfer Out of Cylinder
A1-2.1 Close the low pressure isolation valve,
disconnect at the downstream side of either of the vent
valves and connect to a suitable receiver with means of
pumping if required. This depends upon knowledgeable
operators, and the procedure to be followed must reflect
the features of the particular GSCE and the product to
be transferred. Extreme caution must be observed.
A1-3 Removal of the Cylinder
A1-3.1 A cylinder with a faulty or questionable
cylinder valve may have to be removed. When a
redundant valve and disconnect is installed in the
pigtail, it may be closed, disconnected, and removed
with the cylinder with relative ease and security. When
a redundant valve is not present and a particular design
allows it, the purge inlet valve, vent valve, and the HP
isolation valve may be closed and removed with the
pigtail still connected to the questionable cylinder.
Adequate purging should precede this procedure.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI F14-93 © SEMI 1993, 19991
SEMI F14-93 (Reapproved 0699)
GUIDE FOR THE DESIGN OF GAS SOURCE EQUIPMENT
ENCLOSURES
This standard was technically reapproved by the Global Facilities Committee and is the direct responsibility
of the North American Facilities Committee. Current edition approved by the North American Regional
Standards Committee on December 18, 1998. Initially available on www.semi.org February 1999; to be
published June 1999. Originally published in 1993.
Editorial changes were made to sections 3.1.1, 6.2.1, and 6.2.2.
1 Purpose
1.1 This document summarizes gas source equipment
enclosure design considerations. It is intended for use
by manufacturers and purchasers.
2 Scope
2.1 Design considerations pertaining to gas source
equipment enclosures are described herein.
Modifications required to accommodate specific gases,
cylinders, or unusual applications (e.g., process
equipment) are not addressed.
3 Referenced Documents
3.1 Various codes and ordinances apply in different
municipalities. These documents must be followed for
the installation and operation of these systems. These
codes may include:
3.1.1 NFPA Standards
1
NFPA 13 Installation of Sprinkler Systems
NFPA 69 Explosion Prevention Systems
NFPA 70 National Electrical Code
NFPA 91 Exhaust Systems for Air Conveying
Materials
3.1.2 ICBO Model Code
2
Uniform Fire Code, 1991 Edition
3.1.3 SEMI Safety Guideline
SEMI S4 Safety Guideline for the Segregation/
Separation of Gas Cylinders Contained in Cabinets
3.1.4 Other Publications
Industrial Ventilation, A Manual of Recommended
Practice
3
1
National Fire Protection Association, Batterymarch Park, Quincy,
MA 02269
2
International Conference of Building Officials, 5360 South
Workman Mill Road, Whittier, CA 90601
BOCA National Building Code
4
BOCA National Fire Prevention Code
4
Standard Building Code
5
3.1.5 Local Ordinances
As applicable.
4 Terminology
4.1 gas cylinder Usually means a high pressure
compressed gas cylinder governed by Department of
Transportation (DOT) regulations. It also refers to non-
DOT low pressure containers used for liquid product
having low vapor pressure.
4.2 gas source equipment enclosure (enclosure)
An enclosure for the storage of gas containers and
associated equipment.
5 Functions
5.1 Five important functions are provided by an
enclosure and its associated safety devices.
5.1.1 Leaking Gas Containment Personnel, equip-
ment, and the immediate working environment are
protected from the hazards of leaking gases.
5.1.2 Fire Protection Personnel and equipment are
protected from the consequences of internal and
external fires.
5.1.3 Mechanical Protection The cylinder and
associated equipment are protected from impact and
seismic forces. (For further information, see UFC 51,
Workstations and Fabrication Areas.)
5.1.4 Access Control Unauthorized persons are
inhibited from using gases and operating associated
3
American Conference of Governmental Industrial Hygienists, 6500
Glenway Avenue, Building D-7, Cincinnati, OH 45211
4
Building Officials & Code Administrators International, Inc., 4051
West Flossmoor Road, Country Club Hills, IL 60477
5
Southern Building Code Congress International, 900 Montclair
Road, Birmingham, AL 35213