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SEMI E52-0703 © SEMI 1995, 2003 34 MIXED GAS NAME SYMBOL CODE 5% HELIUM/NITROGEN 5% He/N2 0752 5% OXYGEN/CARBON TETRAFLUORIDE 5% O2/CF4 0753 10% FLUORINE/ARGON 10% F2/Ar 0754 25% FLUORINE/ARGON 25% F2/Ar 0755 50% FLUORIN…

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SEMI E52-0703 © SEMI 1995, 2003 33
MIXED GAS NAME SYMBOL CODE
.06%ARSINE/HYDROGEN .06%AsH3/H2 0708
5%PHOSPHINE/HYDROGEN 5%PH3/H2 0709
10%METHANE/ARGON 10%CH4/Ar 0710
5%ACETONE/NITROGEN 5%C3H6O-m)/N2 0711
5%BENZENE/NITROGEN 5%C6H6/N2 0712
20%DISILANE/HYDROGEN 20%Si2H6/H2 0713
8%PROPANE/10%AMMONIA/AIR 8%C3H8/10%NH3/Air 0714
8.2%PROPANE/9.8%AMMONIA/AIR 8.2%C3H8/9.8%NH3/Air 0715
10%CYCLOPROPANE/HELIUM 10%C3H6-a)/He 0716
2%METHYSILANE/HYDROGEN 2%CH6Si/H2 0717
10%ETHYLENE/HELIUM 10%C2H4/He 0718
5%CHLORINE/HELIUM 5%CI2/He 0719
5%FLUORINE/HELIUM 5%F2/He 0720
.7%ARSINE/HELIUM .7%AsH3/He 0721
5%DIBORANE/HYDROGEN 5%B2H6/H2 0722
20%OZONE/NITROGEN 20%O3/N2 0723
1%ARSINE/HYDROGEN 1%AsH3/H2 0724
40%HYDROGEN/HELIUM 40%H2/He 0725
5%HYDROGEN CHLORIDE/NITROGEN 5%HCI/N2 0726
8%HYDROGEN/NITROGEN 8%H2/N2 0727
20%CARBON TETRAFLUORIDE/NITROGEN 20%CF4/N2 0728
10%CARBON MONOXIDE/CARBON DIOXIDE 10%CO/CO2 0729
10%CARBON MONOXIDE/AIR 10%CO/Air 0730
10%DISILANE/HYDROGEN 10%Si2H6/H2 0731
5%FLUORINE/NITROGEN 5%F2/N2 0732
1%FLUORINE/NEON 1%F2/Ne 0733
5%CARBON DIOXIDE/15%OXYGEN/NITROGEN 5%CO2/15%O2/N2 0734
10%CARBON DIOXIDE/10%OXYGEN/NITROGEN 10%CO2/10%O2/N2 0735
20%OXYGEN/NITROGEN 20%O2/N2 0736
25%HELIUM/ARGON 25%He/Ar 0737
4%HELIUM/NITROGEN 4%He/N2 0738
10%TRIMETHYSILANE/HYDROGEN 10%(CH3)3SiH/H2 0739
2%GERMANE/ARGON 2%GeH4/Ar 0740
.8%ARSINE/HYDROGEN .8%AsH3/H2 0741
.8%GERMANIUM TETRAFLUORIDE/HYDROGEN .8%GeF4/H2 0742
.8%DIBORANE/HYDROGEN .8%B2H6/H2 0743
10%METHANE/HELIUM 10%CH4/He 0744
1%SILANE/HELIUM 1%SiH4/He 0745
25%FLUORINE/NITROGEN 25%F2/N2 0746
50%GERMANE/ARGON 50%GeH4/Ar 0747
7%CARBON DIOXIDE/10%HYDROGEN/20%CARBON
MONOXIDE/NITROGEN 7%CO2/10%H2/20%CO/N2 0748
10%HELIUM/HYDROGEN 10%He/H2 0749
1%BUTADIENE/BUTENE 1%C4H6-e)/C4H8-i) 0750
40%GERMANE/ARGON 40%GeH4/Ar 0751
SEMI E52-0703 © SEMI 1995, 2003 34
MIXED GAS NAME SYMBOL CODE
5%HELIUM/NITROGEN 5%He/N2 0752
5%OXYGEN/CARBON TETRAFLUORIDE 5%O2/CF4 0753
10%FLUORINE/ARGON 10%F2/Ar 0754
25%FLUORINE/ARGON 25%F2/Ar 0755
50%FLUORINE/ARGON 50%F2/Ar 0756
50%FLUORINE/HELIUM 50%F2/He 0757
25%FLUORINE/HELIUM 25%F2/He 0758
10%FLUORINE/NITROGEN 10%F2/N2 0759
50%FLUORINE/NITROGEN 50%F2/N2 0760
5%FLUORINE/ARGON 5%F2/Ar 0761
5%HYDROGEN/HELIUM 5%H2/He 0762
5%SULFUR DIOXIDE/HELIUM 5%SO2/He 0763
2%DISILANE/HELIUM 2%Si2H6/He 0764
5%GERMANE/HELIUM 5%GeH4/He 0765
5%DIBORANE/HELIUM 5%B2H6/He 0766
20%PHOSPHINE/NITROGEN 20%PH3/N2 0767
3.5%HYDROGEN/NITROGEN 3.5%H2/N2 0768
50%HEXAFLUOROETHANE/OXYGEN 50%C2F6/O2 0769
25%HEXAFLUOROETHANE/OXYGEN 25%C2F6/O2 0770
.7%GERMANIUM/HYDROGEN .7%GeH4/H2 0771
1%ACETYLENE/ETHYLENE 1%C2H2/C2H4 0772
5%SILANE/NITROGEN 5%SiH4/N2 0773
.8%CO/.8%O2/20%CO2/32%N2/H2 SELOX GAS MIX 0774
1.5%GERMANE/HYDROGEN 1.5%GeH4/H2 0775
5%BORON TRIFLUORIDE/HELIUM 5%BF3/He 0776
5%PHOSPHORUS PENTAFLUORIDE/HELIUM 5%PF5/He 0777
15%CARBON DIOXIDE/NITROGEN 15%CO2/N2 0778
5%OXYGEN/HELIUM 5%O2/He 0779
5%SILANE/HELIUM 5%SiH4/He 0780
1%NITROGEN DIOXIDE/NITROGEN 1%NO2/N2 0781
1%SULFUR DIOXIDE/NITROGEN 1%SO2/N2 0782
10%CARBON DIOXIDE/NITROGEN 10%CO2/N2 0783
.02%CARBON MONOXIDE/NITROGEN .02%CO/N2 0784
5%HEXAFLUOROETHANE/OXYGEN 5%C2F6/O2 0785
.1%CARBON MONOXIDE/NITROGEN .1%CO/N2 0786
15%GERMANIUM TETRACHLORIDE/OXYGEN 15%GeCl4/O2 0787
2%NITROGEN/3%CARBON MONOXIDE/17%CARBON
DIOXIDE/HYDROGEN 2%N2/3%CO/17%CO2/H2 0788
.1%PHOSPHINE/NITROGEN .1%PH3/N2 0789
.1%HYDROGEN CHLORIDE/NITROGEN .1%HCl/N2 0790
.1%NITROGEN DIOXIDE/AIR .1%NO2/Air 0791
.1%NITROGEN DIOXIDE/NITROGEN .1%NO2/N2 0792
.1%PHOSPHINE/HYDROGEN .1%PH3/H2 0793
.2%SULFUR DIOXIDE/AIR .2%SO2/Air 0794
.25%CARBON MONOXIDE/.1%HYDROGEN/1%OXYGEN/NITROGEN .25%CO/.1%H2/1%O2/N2 0795
SEMI E52-0703 © SEMI 1995, 2003 35
MIXED GAS NAME SYMBOL CODE
.25%DIBORANE/HYDROGEN .25%B2H6/H2 0796
.25%OXYGEN/.5%HYDROGEN/1.5%CA RBON MONOXIDE/NITROGEN .25%O2/.5%H2/1.5%CO/N2 0797
.4%HYDROGEN CHLORIDE/AIR .4%HCl/Air 0798
.5%ARSINE/SILANE .5%AsH3/SiH4 0799
1%CARBON DIOXIDE/NITROGEN 1%CO2/N2 0800
1%CARBON MONOXIDE/19% NITROGEN/30%OXYGEN/CARBON
DIOXIDE 1%CO/19%N2/30%O2/CO2 0801
1%CARBON MONOXIDE/AIR 1%CO/Air 0802
1%CARBON MONOXIDE/CARBON DIOXIDE 1%CO/CO2 0803
1%CHLORINE/NITROGEN 1%Cl2/N2 0804
1%DIBORANE/ARGON 1%B2H6/Ar 0805
1%HYDROGEN SULFIDE/NITROGEN 1%H2S/N2 0806
1%METHANE/49.5%CARBON DIOXIDE/ARGON 1%CH4/49.5%CO2/Ar 0807
1%NITROGEN DIOXIDE/AIR 1%NO2/Air 0808
1%SULFUR DIOXIDE/ARGON 1%SO2/Ar 0809
1.5%SILANE/ARGON 1.5%SiH4/Ar 0810
1.8%SILANE/NITROGEN 1.8%SiH4/N2 0811
1.9%SILANE/NITROGEN 1.9%SiH4/N2 0812
10%CARBON DIOXIDE/ARGON 10%CO2/Ar 0813
10%FLUORINE/OXYGEN 10%F2/O2 0814
10%METHANE/HYDROGEN 10%CH4/H2 0815
10%OXYGEN/30%CARBON DIOXIDE/ARGON 10%O2/30%CO2/Ar 0816
10%OZONE/NITROGEN 10%O3/N2 0817
10%SULFUR DIOXIDE/NITROGEN 10%SO2/N2 0818
12%HYDROGEN/NITROGEN 12%H2/N2 0819
15%DIBORANE/HYDROGEN 15%B2H6/H2 0820
15%SILANE/ARGON 15%SiH4/Ar 0821
2%NITRIC OXIDE/NITROGEN 2%NO/N2 0822
2%SILANE/ARGON 2%SiH4/Ar 0823
2%SULFUR DIOXIDE/NITROGEN 2%SO2/N2 0824
2.5%DIBORANE/HYDROGEN 2.5%B2H6/H2 0825
2.5%METHANE/AIR 2.5%CH4/Air 0826
20%FLUOROFORM/OXYGEN 20%CF4/O2 0827
22%OXYGEN/HELIUM 22%O2/He 0828
25%CARBON MONOXIDE/HYDROGEN 25%CO/H2 0829
25%PROPANE/PROPYLENE 25%C3H8/C3H6 0830
3%AMMONIA/NITROGEN 3%NH3/N2 0831
3%BORON TRICHLORIDE/HYDROGEN 3%BCl3/H2 0832
3%HYDROGEN/ARGON 3%H2/Ar 0833
3%PHOSPHINE/HELIUM 3%PH3/He 0834
3.5%CARBON DIOXIDE/HELIUM 3.5%CO2/He 0835
30% ISOBUTANE/HELIUM 30%CH(CH3)3/He 0836
30%GERMANE/ARGON 30%GeH4/Ar 0837
30%SILANE/ARGON 30%SiH4/Ar 0838
30%SILANE/NITROGEN 30%SiH4/N2 0839