semi合集-English.pdf - 第3075页

SEMI E123-0703 © SEMI 2003 16 10.3.15 PURGE — Purge flush or clean the eq uipment of process material. Parameter Req/Ind Rsp/Cnf Comment RemoteCommand M - “RESET-TOOL-COUNTS” Ack - M Response ackno wledge. Status - C Err…

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10.3.10 RECONTACT — This command instructs the handler to re-contact the unit(s) at the specified sites and is
only available in the WORKING state. Handler transitions to CONTACTOR OPEN state while action is performed.
Once unit(s) is contacted again, UnitsReady event is sent to Host and handler transitions back to AWAITING
COMMAND or LOADING state if there are more process site(s) available for loading.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “RECONTACT”
Sites M - List of sites to re-contact. Empty list implies all sites.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.3.11 RESUME — This command resumes processing from the point where the process was PAUSED. This
command is only recognized if the handler is in the PAUSED state.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “RESUME”
ProcessSiteID C - ID of handler process site.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.3.12 START — This command is only available to the host or operator when a process program has been
selected and the handler is in the READY processing state. The START command instructs the handler to initiate
processing.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “START”
ProcessSiteID C - ID of handler process site.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.3.13 STOP — This command completes the current unit, stops in a safe condition, and returns to the IDLE
processing state. STOP has the intent of bringing about a normal termination after completion of the current unit.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “STOP”
ProcessSiteID C - ID of handler process site.
CloseLot C - Automatically close the lot.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.3.14 RESET-TOOL-COUNTS — This command will initialize equipment tool counts. The minimum set are
those contained in the Variable Items section.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “RESET-TOOL-COUNTS”
ProcessSiteID C - ID of handler process site.
StatusVariableList M - List of Status variables to reset.
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
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10.3.15 PURGE — Purge flush or clean the equipment of process material.
Parameter Req/Ind Rsp/Cnf Comment
RemoteCommand M - “RESET-TOOL-COUNTS”
Ack - M Response acknowledge.
Status - C Error code and Error text if any.
10.4 Remote Commands and HSEM Process Model Mapping — Tables 10 and 11 illustrates the relationship
between remote commands and states of the HSEM processing state model. An “X” indicates that a command is
valid for use in this state. If a remote command is attempted during a non-valid state, the equipment would reject
the remote command.
Table 10 Remote Commands vs. Process States
COMMAND
ABORT
BIN-UNITS
PAUSE
PP-SELECT
RESUME
START
STOP
PROCESSING STATE
IDLE X
PROCESSING ACTIVE
PROCESS
SETTING UP X X
READY X X X X
PRELOADING X X X
EXECUTING
LOADING X X
WORKING
AWAITING COMMAND X X X X
CONTACTOR OPEN X X X
PROCESS PAUSE
PAUSING X
PAUSED X X X
CHECKING X X
ALARM PAUSED X X
ABORTED
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Table 11 Remote Commands vs. Process States (cont.)
COMMAND
RESET-TOOL-COUNTS
BREAK-CONTACT
MAKE-CONTACT
PURGE
RECONTACT
ENABLE-SITE / DISABLE-SITE
PRELOAD-UNITS
PROCESSING STATE
IDLE X X
PROCESSING ACTIVE
PROCESS
SETTING UP
READY X X X X
PRELOADING
EXECUTING
LOADING
WORKING
AWAITING COMMAND X X
CONTACTOR OPEN X
PROCESS PAUSE
PAUSING
PAUSED X X X
CHECKING
ALARM PAUSED X
ABORTED X
11 Additional SEMI E30 Requirements
11.1 The purpose of this section is to specify any GEM
additional capabilities that are required to be supported
by this class of equipment.
11.2 Requirements — The following GEM additional
capabilities required by HSEM are:
• Establish Communications,
• Dynamic Event Report Configuration,
• Variable Data Collection,
• Status Data Collection,
• Alarm Management,
• Remote Control,
• Equipment Constants,
• Process Program Management,
• Equipment Terminal Services,
• Clock,
• Spooling, and
• Control (Host-Initiated).
12 Alarm Definition
12.1 SEMI E30 has a very restrictive definition of
alarms. This standard requires a broader definition.
12.2 Exceptions are classified into two categories:
errors and alarms. Alarms may be divided into
categories as follows:
1. Personal Safety — Condition may be dangerous to
people.
2. Equipment Safety — Condition may harm
equipment.
3. Parameter Control Warning — Parameter
variation outside of preset limits — may harm
product.