semi合集-English.pdf - 第2341页
SEMI E82-0705 © SEMI 1999, 2005 37 STEP COMMENTS HOST TSC COMMENTS 17. Event Report Acknowledge (ERA) S6,F12-> 18. <-S6,F11 Event Report Send (ERS) VehicleDeparted . VehicleID = “AGVXX” . TransferPortList – L,1 1. …

SEMI E82-0705 © SEMI 1999, 2005 36
STEP COMMENTS HOST TSC COMMENTS
2. Enhanced Remote Command
(ERC)
TRANSFER
. COMMANDID = “111111”
. PRIORITY = 5
. REPLACE = 1
. TRANSFERINFO
1
– L,3
1. CARRIERID = “123456”
2. SOURCEPORT =
“PORTX1”
3. DESTPORT = “PORTY1”
. TRANSFERINFO
2
– L,3
4. CARRIERID = “654321”
5. SOURCEPORT = “PORTY1”
6. DESTPORT = “PORTZ1”
S2,F49->
3. <-S2,F50 Enhanced Remote Command
Acknowledge (ERCA)
4. <-S6,F11 Event Report Send (ERS)
TransferInitiated
. CommandID = “111111”
5. Event Report Acknowledge
(ERA)
S6,F12->
6. <-S6,F11 Event Report Send (ERS)
VehicleAssigned
. VehicleID = “AGVXX”
. CommandID = “111111”
7. Event Report Acknowledge
(ERA)
S6,F12->
8. <-S6,F11 Event Report Send (ERS)
VehicleArrived
. VehicleID = “AGVXX”
. TransferPortList – L,1
1. TransferPort
1
=
“PORTX1”
9. Event Report Acknowledge
(ERA)
S6,F12->
10. <-S6,F11 Event Report Send (ERS)
Transferring
. CommandID = “111111”
11. Event Report Acknowledge
(ERA)
S6,F12->
12. <-S6,F11 Event Report Send (ERS)
VehicleAcquireStarted
. VehicleID = “AGVXX”
13. Event Report Acknowledge
(ERA)
S6,F12->
14. <-S6,F11 Event Report Send (ERS)
CarrierInstalled
. VehicleID = “AGVXX”
. CarrierID = “123456”
. CarrierLoc = “LOC1”
15. Event Report Acknowledge
(ERA)
S6,F12->
16. <-S6,F11 Event Report Send (ERS)
VehicleAcquireCompleted
. VehicleID = “AGVXX”

SEMI E82-0705 © SEMI 1999, 2005 37
STEP COMMENTS HOST TSC COMMENTS
17. Event Report Acknowledge
(ERA)
S6,F12->
18. <-S6,F11 Event Report Send (ERS)
VehicleDeparted
. VehicleID = “AGVXX”
. TransferPortList – L,1
1. TransferPort
1
=
“PORTX1”
19. Event Report Acknowledge
(ERA)
S6,F12->
20. <-S6,F11 Event Report Send (ERS)
VehicleArrived
. VehicleID = “AGVXX”
. TransferPortList –
L,1
1. TransferPort
1
=
“PORTY1”
21. Event Report Acknowledge
(ERA)
S6,F12->
22. <-S6,F11 Event Report Send (ERS)
VehicleAcquireStarted
. VehicleID = “AGVXX”
23. Event Report Acknowledge
(ERA)
S6,F12->
24. <-S6,F11 Event Report Send (ERS)
CarrierInstalled
. VehicleID = “AGVXX”
. CarrierID = “654321”
. CarrierLoc = “LOC2”
25. Event Report Acknowledge
(ERA)
S6,F12->
26. <-S6,F11 Event Report Send (ERS)
VehicleDepositStarted
. VehicleID = “AGVXX”
27. Event Report Acknowledge
(ERA)
S6,F12->
28. <-S6,F11 Event Report Send (ERS)
CarrierRemoved
. VehicleID = “AGVXX”
. CarrierID = “123456”
. CarrierLoc = “LOC1”
29. Event Report Acknowledge
(ERA)
S6,F12->
30. <-S6,F11 Event Report Send (ERS)
VehicleDepositCompleted
. VehicleID = “AGVXX”
31. Event Report Acknowledge
(ERA)
S6,F12->
32. <-S6,F11 Event Report Send (ERS)
VehicleDeparted
. VehicleID = “AGVXX”
. TransferPortList – L,1
1. TransferPort
1
=
“PORTY1”
33. Event Report Acknowledge
(ERA)
S6,F12->

SEMI E82-0705 © SEMI 1999, 2005 38
STEP COMMENTS HOST TSC COMMENTS
34. <-S6,F11 Event Report Send (ERS)
VehicleArrived
. VehicleID = “AGVXX”
. TransferPortList – L,1
1. TransferPort
1
=
“PORTZ1”
35. Event Report Acknowledge
(ERA)
S6,F12->
36. <-S6,F11 Event Report Send (ERS)
VehicleDepositStarted
. VehicleID = “AGVXX”
37. Event Report Acknowledge
(ERA)
S6,F12->
38. <-S6,F11 Event Report Send (ERS)
CarrierRemoved
. VehicleID = “AGVXX”
. CarrierID = “654321”
. CarrierLoc = “LOC2”
39. Event Report Acknowledge
(ERA)
S6,F12->
40. <-S6,F11 Event Report Send (ERS)
VehicleDepositCompleted
. VehicleID = “AGVXX”
41. Event Report Acknowledge
(ERA)
S6,F12->
42. <-S6,F11 Event Report Send (ERS)
VehicleUnassigned
. VehicleID = “AGVXX”
. CommandID = “111111”
43. Event Report Acknowledge
(ERA)
S6,F12->
44. <-S6,F11 Event Report Send (ERS)
TransferCompleted
(Complete parameters)
. CommandName =
“TRANSFER”
. CommandID = “111111”
. Priority = 5
. Replace = 1
. ResultCode = 0
. CarrierLoc
1
= “PORTY1”
. TransferInfo
1
– L,3
1. CarrierID = “123456”
2. SourcePort = “PORTX1”
3. DestPort = “PORTY1”
. CarrierLoc
2
= “PORTZ1”
. TransferInfo
2
– L,3
4. CarrierID = “654321”
5. SourcePort = “PORTY1”
6. DestPort = “PORTZ1”
45. Event Report Acknowledge
(ERA)
S6,F12->
12.3 Anomaly Transport
12.3.1 Host-Initiated CANCEL of a TRANSFER Command