semi合集-English.pdf - 第4210页

SEMI F73-1102 © SEMI 2002 12 1 5 6 7 10 11 12 13 9 8 2 B D C E F H G J I K L M N O P Q S R T U 3 4 14 A 15 16 Figure A2-4 Large Inclusion is Counted in Grids J7, K7, I8, J8 a nd K8. Pits in A8, C7 and C8 (Sam e Pit on Gr…

100%1 / 7923
SEMI F73-1102 © SEMI 2002 11
1
5
6
7
10
11
12
13
9
8
2
B DC E
F
HG
JI KL
M
NOPQ SR TU
3
4
14
A
15
16
Figure A2-3
Heavily Etched Grain and Twin Boundaries; Worst Cases Should be Counted – E5 Through H15; I and J 9,
10 and 11; K9 Through P10. Also Pits at P3, L5, I6, M8, P10, S11, J10 and K10, C10, C11, D10, D11, E12,
J13, L12, C14.
SEMI F73-1102 © SEMI 2002 12
1
5
6
7
10
11
12
13
9
8
2
B DC E
F
HG
JI KL
M
NOPQ SR TU
3
4
14
A
15
16
Figure A2-4
Large Inclusion is Counted in Grids J7, K7, I8, J8 and K8. Pits in A8, C7 and C8 (Same Pit on Grid
Boundary), E9, F8, J9, I12, I15.
SEMI F73-1102 © SEMI 2002 13
1
5
6
7
10
11
12
13
9
8
2
B DC E
F
HG
JI KL
M
NOPQ SR TU
3
4
14
A
15
16
Figure A2-5
Pits Left by Inclusion Stringers in Which the Inclusions Have Been Electropolished Out; Also Numerous
Discrete Pits. All Pits with Edges Distinct Enough to Image with a “White Halo” Effect are Countable. This
Includes All of the Pits Associated with the Upper Stringer, and Those in the Lower Stringer in Grids M7N7,
O6 and O7, P6, Q6, R5 and R6. Also G1, Q1, A4, G5, L5, G7, N9, R9, G10, H12, Q12, E13, J13, N14, O14.