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SEMI E54.5-0997 © SEMI 1997, 2004 9 APPENDIX 1 STATEMENT OF COMPLIANCE NOTE: This appendix was approved as an official part of SEMI E54.5 by full letter ballot procedure. This form is used to specify conformance options …

SEMI E54.5-0997 © SEMI 1997, 2004 8

The DM Object Model maps exactly to the

specification for the DM in SEMI E54. Refer to that

document for detailed descriptions for the attributes,

actions, and events defined in Table 4. The SEMI E54

tag column indicates the identifier used in SEMI E54.

The default object identifier that should be used for the

DM object in an SDS device is 2. The actual object

identifier used may be reassigned by the implementer.

7.5 Implementation of Sensor Object Type (S

) — Zero

or more instances of this object type are permitted on

each device.

Sensor object types are already defined within the SDS

object hierarchy (e.g., Object Type 1 - I/O Device).

Implementation of a device which is compliant with

this type results in compliance with this standard.

If the existing sensor object types defined in the SDS

specifications do not meet the requirements of the

application, new SEMI-specific types may be defined

deriving from type 10.3. If new types are required that

are generic (i.e., not specific to SEMI), they should be

derived from type 1 - I/O Device.

7.6 Implementation of Actuator Object Type (A

) —

Zero or more instances of this object type are permitted

on each device.

Actuator object types are already defined within the

SDS object hierarchy (e.g., Object Type 1 - I/O

Device). Implementation of a device which is compliant

with this type results in compliance with this standard.

If the existing actuator object types defined in the SDS

specifications do not meet the requirements of the

application, new SEMI-specific object types may be

defined deriving from type 10.3. If new types are

required that are generic (i.e., not specific to SEMI),

they should be derived from type 1 - I/O Device.

7.7 Implementation of Controller Object Type (C

) —

Zero or more instances of this object type are permitted

on each device.

Specific controller object types are defined within the

SDS object hierarchy (e.g., Object type 3 - Function

Block Object). Implementation of a device which is

compliant with these types results in compliance with

this standard.

If the controller types defined in the SDS specifications

do not meet the requirements of the application, new

SEMI-specific object types may be defined deriving

from type 10. If new types are required that are generic

(i.e., not specific to SEMI), they should be derived from

type 3 - Function Block Object.

8 Protocol Compliance

A method of testing protocol compliance is required to

verify conformance to this standard. The device must

satisfy the SDS protocol conformance requirements as

documented in the SDS specifications. The SDS

partners group provides a conformance verification test

procedure service to its members. When this SEMI

Sensor/Actuator Network standard is incorporated into

the SDS Partners specification set, this service may be

used to verify compliance with the SEMI guidelines.

8.1 Compliance Statement — Addendum A includes a

compliance statement form that should be completed by

device implementors for compliance verification.

9 Specific Device Model Mappings

9.1 Device Model for Mass Flow Controller — This

model will be specified after the MFC-specific device

model (SDM) standard is complete.

9.2 Device Model for Capacitance Manometer — This

model will be specified after the capacitance

manometer SDM standard is complete.

9.3 Device Model for Particle Counter — This model

will be specified after the particle counter SDM

standdard is complete.

9.4 Device Model for Residual Gas Analyzer — This

model will be specified after the residual gas analyzer

SDM is defined.

SEMI E54.5-0997 © SEMI 1997, 2004 9

APPENDIX 1

STATEMENT OF COMPLIANCE

NOTE: This appendix was approved as an official part of SEMI E54.5 by full letter ballot procedure.

This form is used to specify conformance options with respect to the SDS and common device model SEMI E54

specifications.

Fill in the blank or the appropriate box. ❑ ❑

Conforms to Smart Distributed

System Specification: Release ___________

Vendor Name ___________________

Vendor Partner ID# ___________________

Catalog Listing ___________________

Object Type ___________________

General

Device

Data

Software Version ___________________

Network Power Consumption ___________mA @

18 VDC

Smart

Distributed

System

Physical

Conformance

Data

Connector Style Open-Hardwired ❑ Sealed-Mini ❑

Open-Pluggable ❑ Sealed-Micro ❑

9 Pin ❑

Isolated Physical Layer Yes No ❑

Opto ❑

Transformer ❑

Default Device Address ___________

Communication Data Rates Supported 125K bits/s ❑ 500K bits/s ❑

250k bits/s ❑ 1M bits/s ❑

Device Type Master ❑

Slave ❑

Peer-to-Peer ❑

Smart

Distributed

System

Logical

Device &

Object

Data

Number of Logical Devices Default = 1

Object Class(es) on Logical Device #0 Minimum = 1

Object #0 ___________

Object #1 ___________

Object #2 ___________

Object #3 ___________

...

Object #31 __________

If there are additional logical devices, they should be documented as above.

NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish appropriate safety and health practices and determine the

applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability

of the standards set forth herein for any particular application. The determination of the suitability of the standard is

solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are

subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

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