semi合集-English.pdf - 第396页

SEMI E52-0703 © SEMI 1995, 2003 32 MIXED GAS NAME SYMBOL CODE 2% ARSINE/SILANE 2% AsH3/SiH4 0663 8% GERMANE/HYDROGEN 8% GeH4/H2 0664 3% ARSINE/HYDROGEN 3% AsH3/H2 0665 10% DIBORANE/NITROGEN 10% B2H6/N2 0666 8% PHOSPHINE/…

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SEMI E52-0703 © SEMI 1995, 2003 31
MIXED GAS NAME SYMBOL CODE
5%CARBON DIOXIDE/NITROGEN 5%CO2/N2 0618
5%HYDROGEN/ARGON 5%H2/Ar 0619
8%PHOSPHINE/NITROGEN 8%PH3/N2 0620
5%NITROGEN/HYDROGEN 5%N2/H2 0621
5%NITROGEN/PHOSPHINE 5%N2/PH3 0622
5%OXYGEN/ARGON 5%O2/Ar 0623
5%OZONE/OXYGEN 5%O3/O2 0624
5%PHOSPHINE/5%SILANE/NITROGEN 5%PH3/5%SiH4/N2 0625
5%PHOSPHINE/ARGON 5%PH3/Ar 0626
5%PHOSPHINE/SILANE 5%PH3/SiH4 0627
5%DICHLOROSILANE/ARGON 5%SiH2CI2/Ar 0628
5%SILANE/ARGON 5%SiH4/Ar 0629
50%HELIUM/OXYGEN 50%He/O2 0630
50%NITROGEN/OXYGEN 50%N2/O2 0631
50%PHOSPHINE/SILANE 50%PH3/SiH4 0632
50%SILANE/HYDROGEN 50%SiH4/H2 0633
6.5%DIBORANE/15%SILANE/NITROGEN 6.5%B2H6/15%SiH4/N2 0634
6.5%DIBORANE/HYDROGEN 6.5%B2H6/H2 0635
8%PHOSPHINE/SILANE 8%PH3/SiH4 0636
30%OXYGEN/HYDROGEN 30%O2/H2 0637
25%AMMONIA/HYDROGEN 25%NH3/H2 0638
8%OZONE/OXYGEN 8%O3/O2 0639
2%PHOSPHINE/NITROGEN 2%PH3/N2 0640
15%OZONE/OXYGEN 15%O3/O2 0641
40%OXYGEN/SULFUR HEXAFLUORIDE 40%O2/SF6 0642
13%HYDROGEN/NITROGEN 13%H2/N2 0643
1%HYDROGEN SULFIDE/HYDROGEN 1%H2S/H2 0644
1%HYDROGEN SELENIDE/HYDROGEN 1%H2Se/H2 0645
10%SILANE/NITROGEN 10%SiH4/N2 0646
10%DISILANE/HELIUM 10%Si2H6/He 0647
20%DISILANE/HELIUM 20%Si2H6/He 0648
10%OXYGEN/HELIUM 10%O2/He 0649
50%HYDROGEN BROMIDE/HYDROGEN CHLORIDE 50%HBr/HCI 0650
12%OZONE/OXYGEN 12%O3/O2 0651
15%NITRIC OXIDE/NITROGEN 15%NO/N2 0652
2%SILANE/NITROGEN 2%SiH4/N2 0653
5%DIBORANE/NITROGEN 5%B2H6/N2 0654
.5%BORON TRICHLORIDE/HYDROGEN .5%BCI3/H2 0655
.5%PHOSPHINE/HYDROGEN .5%PH3/H2 0656
3%DIBORANE/HYDROGEN 3%B2H6/H2 0657
1%GERMANE/NITROGEN 1%GeH4/N2 0658
3%DIBORANE/5%SILANE/NITROGEN 3%B2H6/5%SiH4/N2 0659
.3%PHOSPHINE/SILANE .3%PH3/SiH4 0660
30%NITROGEN TRIFLUORIDE/NITROGEN 30%NF3/N2 0661
.8%DIBORANE/NITROGEN .8%B2H6/N2 0662
SEMI E52-0703 © SEMI 1995, 2003 32
MIXED GAS NAME SYMBOL CODE
2%ARSINE/SILANE 2%AsH3/SiH4 0663
8%GERMANE/HYDROGEN 8%GeH4/H2 0664
3%ARSINE/HYDROGEN 3%AsH3/H2 0665
10%DIBORANE/NITROGEN 10%B2H6/N2 0666
8%PHOSPHINE/HELIUM 8%PH3/He 0667
10%AMMONIA/NITROGEN 10%NH3/N2 0668
5%FLUORINE/NITROGEN TRIFLUORIDE 5%F2/NF3 0669
10%DISILANE/ARGON 10%Si2H6/Ar 0670
3%PHOSPHINE/5%SILANE/NITROGEN 3%PH3/5%SiH4/N2 0671
3%NITROGEN/HYDROGEN 3%N2/H2 0672
.7%ARSINE/HYDROGEN .7%AsH3/H2 0673
10%PHOSPHINE/HELIUM 10%PH3/He 0674
.8%PHOSPHINE/HELIUM .8%PH3/He 0675
7.5%PHOSPHINE/SILANE 7.5%PH3/SiH4 0676
20%FLUORINE/HELIUM 20%F2/He 0677
22%PHOSPHINE/SILANE 22%PH3/SiH4 0678
5%TRICHLOROSILANE/HYDROGEN 5%SiHCI3/H2 0679
25%TRICHLOROSILANE/HYDROGEN 25%SiHCI3/H2 0680
.8%PHOSPHINE/DISILANE .8%PH3/Si2H6 0681
13%TRICHLOROSILANE/HYDROGEN 13%SiHCI3/H2 0682
5%DIBORANE/SILANE 5%B2H6/SiH4 0683
1%SILANE/DIBORANE 1%SiH4/B2H6 0684
7%METHYLENE CHLORIDE/3%OZONE/AIR 7%CH2CI2/3%O3/Air 0685
50%FLUOROFORM/ARGON 50%CHF3/Ar 0686
20%HELIUM/OXYGEN 20%He/O2 0687
3%ARSINE/ARGON 3%AsH3/Ar 0688
10%METHYLSILANE/HYDROGEN 10%CH6Si/H2 0689
.05%DIBORANE/HYDROGEN .05%B2H6/H2 0690
4%PHOSPHINE/ARGON 4%PH3/Ar 0691
8%HYDROGEN/ARGON 8%H2/Ar 0692
5%PHOSPHINE/HELIUM 5%PH3/He 0693
15%HYDROGEN/ARGON 15%H2/Ar 0694
2%DIBORANE/NITROGEN 2%B2H6/N2 0695
2%PHOSPHINE/SILANE 2%PH3/SiH4 0696
15%DIBORANE/ARGON 15%B2H6/Ar 0697
10%GERMANE/ARGON 10%GeH4/Ar 0698
5%METHANE/HELIUM 5%CH4/He 0699
4%HYDROGEN/ARGON 4%H2/Ar 0700
10%DIBORANE/HYDROGEN 10%B2H6/H2 0701
40%SILANE/HELIUM 40%SiH4/He 0702
2%ARSINE/HYDROGEN 2%AsH3/H2 0703
10%GERMANE/HELIUM 10%GeH4/He 0704
9.4%ARGON/NITROGEN TRIFLUORIDE 9.4%Ar/NF3 0705
8.6%ARGON/NITROGEN TRIFLUORIDE 8.6%Ar/NF3 0706
.8%PHOSPHINE/HYDROGEN .8%PH3/H2 0707
SEMI E52-0703 © SEMI 1995, 2003 33
MIXED GAS NAME SYMBOL CODE
.06%ARSINE/HYDROGEN .06%AsH3/H2 0708
5%PHOSPHINE/HYDROGEN 5%PH3/H2 0709
10%METHANE/ARGON 10%CH4/Ar 0710
5%ACETONE/NITROGEN 5%C3H6O-m)/N2 0711
5%BENZENE/NITROGEN 5%C6H6/N2 0712
20%DISILANE/HYDROGEN 20%Si2H6/H2 0713
8%PROPANE/10%AMMONIA/AIR 8%C3H8/10%NH3/Air 0714
8.2%PROPANE/9.8%AMMONIA/AIR 8.2%C3H8/9.8%NH3/Air 0715
10%CYCLOPROPANE/HELIUM 10%C3H6-a)/He 0716
2%METHYSILANE/HYDROGEN 2%CH6Si/H2 0717
10%ETHYLENE/HELIUM 10%C2H4/He 0718
5%CHLORINE/HELIUM 5%CI2/He 0719
5%FLUORINE/HELIUM 5%F2/He 0720
.7%ARSINE/HELIUM .7%AsH3/He 0721
5%DIBORANE/HYDROGEN 5%B2H6/H2 0722
20%OZONE/NITROGEN 20%O3/N2 0723
1%ARSINE/HYDROGEN 1%AsH3/H2 0724
40%HYDROGEN/HELIUM 40%H2/He 0725
5%HYDROGEN CHLORIDE/NITROGEN 5%HCI/N2 0726
8%HYDROGEN/NITROGEN 8%H2/N2 0727
20%CARBON TETRAFLUORIDE/NITROGEN 20%CF4/N2 0728
10%CARBON MONOXIDE/CARBON DIOXIDE 10%CO/CO2 0729
10%CARBON MONOXIDE/AIR 10%CO/Air 0730
10%DISILANE/HYDROGEN 10%Si2H6/H2 0731
5%FLUORINE/NITROGEN 5%F2/N2 0732
1%FLUORINE/NEON 1%F2/Ne 0733
5%CARBON DIOXIDE/15%OXYGEN/NITROGEN 5%CO2/15%O2/N2 0734
10%CARBON DIOXIDE/10%OXYGEN/NITROGEN 10%CO2/10%O2/N2 0735
20%OXYGEN/NITROGEN 20%O2/N2 0736
25%HELIUM/ARGON 25%He/Ar 0737
4%HELIUM/NITROGEN 4%He/N2 0738
10%TRIMETHYSILANE/HYDROGEN 10%(CH3)3SiH/H2 0739
2%GERMANE/ARGON 2%GeH4/Ar 0740
.8%ARSINE/HYDROGEN .8%AsH3/H2 0741
.8%GERMANIUM TETRAFLUORIDE/HYDROGEN .8%GeF4/H2 0742
.8%DIBORANE/HYDROGEN .8%B2H6/H2 0743
10%METHANE/HELIUM 10%CH4/He 0744
1%SILANE/HELIUM 1%SiH4/He 0745
25%FLUORINE/NITROGEN 25%F2/N2 0746
50%GERMANE/ARGON 50%GeH4/Ar 0747
7%CARBON DIOXIDE/10%HYDROGEN/20%CARBON
MONOXIDE/NITROGEN 7%CO2/10%H2/20%CO/N2 0748
10%HELIUM/HYDROGEN 10%He/H2 0749
1%BUTADIENE/BUTENE 1%C4H6-e)/C4H8-i) 0750
40%GERMANE/ARGON 40%GeH4/Ar 0751