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SEMI 30.1-0200 © SEMI 1998, 2000 34 14 Scenario s 14.1 Run Level Rep orting Scenario — T his scenario only has expected ev ents (i.e., no alarms or errors). COMMENT HOST EQUIPMENT COMMENT The equipment is in the IDLE pro…

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SEMI 30.1-0200 © SEMI 1998, 200033
Parameter Value
CPName
Description Range Format
1. CPNAME*
2. CEPVAL*
m. L,2
1. CPNAME*
2. CEPVAL*
NOTES: “PPBUILDID” and “PPNAME” are required.
“SLOTLIST”, “SUBSTRATELIST”, “AREALIST”, and
“ALIGNLIST” are optional.
* Supplier shall define as many of these CPNAME, CEPVAL
pairs as are supported by the equipment.
** “ELEMENTLIST” is required when using the SEMI M21
coordinate system in the definition of an AlignName or
AreaName.
NOTE 1: Required ISEM parameters: “CARRIERID”, “LOCATIONID”, “PROCESS-BLD-GROUP”
13.2.3 Remote Commands vs. Processing States — The following table indicates states where the remote
commands are allowed. This is indicated with a “X” mark.
Table 10 Remote Commands vs. Processing States
COMMAND
PROCESSING STATE
STOP
START
RESUME
PP-UPDATE
PP-SELECT
PAUSE
NEXT-
M
ATERIAL
MAP-
CARRIER
PP-ASSIGN
CLEANUP
ABORT
P
P-UNASSIG
N
IDLE XXXX
ABORTED XX X
PROCESSING ACTIVE
STOPPING XX
ABORTING
PAUSE
ALARM PAUSED X X X
PROCESS PAUSE
PAUSING X X X
PAUSED X X X X X
CHECKING X X X
PROCESS
SETTING UP X X XX XX
READY X X X X X X
EXECUTING
LOAD X X X X
UNLOAD X X X X
WORKING
INSPECT X X X X X
ALIGN X XXXX
REVIEW X XXXX
SEMI 30.1-0200 © SEMI 1998, 2000 34
14 Scenarios
14.1 Run Level Reporting Scenario — This scenario only has expected events (i.e., no alarms or errors).
COMMENT HOST EQUIPMENT COMMENT
The equipment is in the
IDLE processing state and in
The ONLINE REMOTE control
state. The host has defined,
linked, and enabled RUN level
report for CEIDs 2, 3, and 5.
Host sends a PP-SELECT S2,F49-->
command specifying a
”CARRIERBLD”
<--S2,F50 Command Acknowledge
The equipment transitions
from IDLE to SETTING UP, and
material arrives at input
port.
<--S6,F11 SETTING UP -> READY (CEID 3)
Event Report Acknowledge S6,F12-->
START S2,F41-->
<--S2,F42 Host Command Acknowledge
READY -> LOAD.
[WHILE] Note End of Run
LOAD -> WORKING
WORKING -> UNLOAD
UNLOAD -> LOAD
[END WHILE]
<--S6,F11 LOAD -> STOPPING (CEID 5)
Event Report Acknowledge S6,F12-->
<--S6,F11 Run Processed Data Valid
event.
Event Report Acknowledge S6,F12-->
The equipment transitions
from STOPPING to IDLE.
SEMI 30.1-0200 © SEMI 1998, 200035
14.2 PP-UPDATE Remote Command Scenario — Host issues the PP-UPDATE remote command.
COMMENT HOST EQUIPMENT COMMENT
START S2,F41-->
<--S2,F42 Positive Acknowledge.
<--S6,F11 READY -> LOAD
Positive Acknowledge. S6,F12-->
[WHILE] Not End of Run
1) LOAD -> WORKING
2) WORKING -> UNLOAD
3) UNLOAD -> LOAD
[END WHILE]
Sometime during the [WHILE]:
PAUSE S2,F41-->
<--S2,F42 Positive Acknowledge.
<--S6,F11 Transition to PAUSING
Positive Acknowledge. S6,F12-->
<--S6,F11 PAUSING -> PAUSED
Positive Acknowledge. S6,F12-->
PP-UPDATE S2,F49-->
<--S2,F50 Positive Acknowledge.
<--S6,F11 PAUSED -> CHECKING
Positive Acknowledge. S6,F12-->
<--S6,F11 CEID is posted.
[IF] the updates are valid:
Return to the previous
process state through
history.
[ELSE]
Return to the PAUSED state.
The Process program remains
unchanged.
[ENDIF]
Positive Acknowledge. S6,F12-->