semi合集-English.pdf - 第1196页

SEMI E5-1104 © SEMI 1982, 2004 138 Stream,Function Name (Mnemonic) Direction S7,F20 Current EPPD Data (RED) M,H<-E Description This message is used to transmit the current EPPD. Structure L,n (number of process progra…

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SEMI E5-1104 © SEMI 1982, 2004 137
Stream,Function Name (Mnemonic) Direction
S7,F16 Matrix Mode Select Acknowledge (MMA) S,H<-E
Description
Acknowledge or error
Structure
<ACKC7>
Exception
None
NOTE 9: The matrix structure allows the program linkages to be established for each MID or the multi-MID production plans
for an extended period of time. The host system makes the choice of operating mode. By continuous updates to the equipment
matrix, automatic system backup is achieved.
Stream,Function Name (Mnemonic) Direction
S7,F17 Delete Process Program Send (DPS) S,H->E,reply
Description
This message is used by the host to request the equipment to delete process programs from equipment storage.
Structure
L,n (Number of process programs to be deleted)
1. <PPID
1
>
.
.
n. <PPID
n
>
Exception
If n = 0, then delete all.
Stream,Function Name (Mnemonic) Direction
S7,F18 Delete Process Program Acknowledge (DPA) S,H<-E
Description
Acknowledge or error
Structure
<ACKC7>
Exception
None
Stream,Function Name (Mnemonic) Direction
S7,F19 Current EPPD Request (RER) S,H->E,reply
Description
This message is used to request the transmission of the current equipment process program directory (EPPD). This is a list of all
the PPIDs of the process programs stored in the equipment.
Structure
Header only
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 138
Stream,Function Name (Mnemonic) Direction
S7,F20 Current EPPD Data (RED) M,H<-E
Description
This message is used to transmit the current EPPD.
Structure
L,n (number of process programs in the directory)
1. <PPID
1
>
.
.
n. <PPID
n
>
Exception
None
Stream,Function Name (Mnemonic) Direction
S7,F21 Equipment Process Capabilities Request (PCR) S,H->E,reply
Description
This message is used to request the Equipment Process Capabilities Data (PCD).
Structure
Header only
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 139
Stream,Function Name (Mnemonic) Direction
S7,F22 Equipment Process Capabilities Data (PCD) M,H<-E
Description
This equipment message provides the information necessary for the host to create and partially verify the contents of a new
process program or display the object of a process program previously generated by a host or equipment. The PCD defines the
process program content acceptable to the originating equipment.
Structure
L,5
1. <MDLN>
2. <SOFTREV>
3. <CMDMAX>
4. <BYTMAX>
5. L,c (c = Number of Possible Commands)
1. L,11
1. <CCODE>
2. <CNAME>
3. <RQCMD>
4. <BLKDEF>
5. <BCDS>
6. <IBCDS>
7. <NBCDS>
8. <ACDS>
9. <IACDS>
10. <NACDS>
11. L,p (p = Number of Parameters)
1. (parameter specification) (see below)
.
.
p. (parameter specification)
2. L,11
.
.
c. L,11
Parameter specifications depend on the data type of each parameter. The structure of each of the possible three groups is as
follows:
Numeric Data String Data Boolean Data
L,9 L,5 L,4
1. <PNAME> 1. <PNAME> 1. <PNAME>
2. <RQPAR> 2. <RQPAR> 2. <RQPAR>
3. <PDFLT> 3. <PDFLT> 3. <PDFLT>
4. <PMAX> 4. <PMAX> 4. <PMAX>
5. <LLIM> 5. L,s
6. <ULIM> 1. <STEMP
1
>
7. <UNITS> .
8. <RESC> .
9. <RESV> s. <STEMP
s
>
Exception
None