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SEMI E92-0302 E © SEMI 1999, 2003 1 SEMI E92-0302 E SPECIFICATION FOR 300 mm LIGH T WEIGHT AND COMPACT BOX OPENER/LOADER TO TOOL-INT EROPERABILITY STANDARD (BOLTS/LIGHT) This provisional specification was technically app…

SEMI E89-1104

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differences are associated with measurement variability,

it should be included in reproducibility.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

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refer to manufacturer's instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any items

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of

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consent of SEMI.

SEMI E92-0302

SPECIFICATION FOR 300 mm LIGHT WEIGHT AND COMPACT BOX

OPENER/LOADER TO TOOL-INTEROPERABILITY STANDARD

(BOLTS/LIGHT)

This provisional specification was technically approved by the Global Physical Interfaces & Carriers

Committee and is the direct responsibility of the Japanese Physical Interfaces & Carriers Committee. Current

edition approved by the Japanese Regional Standards Committee on December 3, 2001. Initially available at

www.semi.org January 2002; to be published March 2002. Originally published September 1999.

This document was editorially modified in January 2003 to reflect the withdrawal of SEMI E44. Changes

were made to Sections 4.1, 5.2.5, 5.2.9, 5.2.18, and 5.2.19.

1 Purpose

1.1 Provide Standard for Box Opener/Loader

Interoperability — This standard is intended to provide

standard specifications such as interfaces between the

component that opens the boxes and presents the boxes

to the equipment wafer handler for unloading and

loading 300 mm wafers (BOLTS/Light unit) and higher

level part of equipment and its functions to provide:

(see Figure 1)

• High level of interchangeability/ interoperability,

• Quick attachment/detachment capability with high

mechanical repeatability,

• Light weight, and

• Compactness.

1.1.1 In order to provide a high level of

interchangeability and interoperability, this standard

specifies not only interfaces but also some of the box

opener/loader’s functions that affect interoperability.

1.2 Usage of This Standard — Interoperability

specifications defined by this standard are intended to

be used as interfaces and functionality between

BOLTS/Light compliant box opener/loader and:

• A BOLTS/M compliant loadport unit (that would

conform to SEMI E63).

• An integrated loadport such as four box

opener/loader in one chassis.

• High-densely packaged equipment that uses the

space under the box opener/loader.

1.3 SEMI Standards Compatibility — This standard is

compatible with 300 mm SEMI standards including

SEMI E15.1, E47.1, E1.9, E62, E63 and E64.

1.4 Open Cassette Application — The BOLTS/Light

unit might be configured to handle boxes that would

conform to SEMI E47.1 and SEMI E62.

1.5 A similar unit may be compatibly designed which

does not have box opener capability, but facilitates

placement of an open cassette (that would conform to

SEMI E1.9).

1.6 Carrier Capacities — This standard defines one

interface for 13 or 25 carrier capacity box opener/

loaders.

1.7 The interface specified in this standard is designed

for equipment with a sealed mini-environment, but it is

not limited to such.

2 Scope

2.1 Items Specified — This standard is intended to set

an appropriate level of specification that places minimal

limits on innovation while ensuring modularity,

interchange-ability, and interoperability including:

• Box opener/loader functions that affect

interoperability.

• Mechanical interface features between the box

opener/loader and equipment.

2.2 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Limitations

3.1 This specification does not apply to the following

application:

• Direct insertion of open cassettes into load-lock

chambers.

4 Referenced Standards

4.1 SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes

Used to Transport and Store 300 mm Wafers

SEMI E15 — Specification for Tool Load Port

SEMI E92-0302

SEMI E15.1 — Specification for 300 mm Tool Load

Port

SEMI E47.1 — Provisional Mechanical Specification

for Boxes and Pods Used to Transport and Store 300

mm Wafers

SEMI E57 — Mechanical Specification for Kinematic

Couplings Used to Align and Support 300 mm Wafer

Carriers

SEMI E62 — Provisional Specification for 300 mm

Front-Opening Interface Mechanical Standard (FIMS)

SEMI E63 — Mechanical Specification for 300 mm

Box Opener/Loader to Tool Standard (BOLTS-M)

Interface

SEMI E64  Specification for 300 mm Cart to SEMI

E15.1 Docking Interface Port

4.2 Other Standard

I300I/J300 GJG  I300I/J300 Global Joint Guidance

for 300 mm Semiconductor Factories

NOTE 1: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 AMHS — Automated Material Handling System

5.2 Definitions

5.2.1 bilateral datum plane — a vertical plane that

bisects the wafers and that is perpendicular to both the

horizontal and facial datum planes (as defined in SEMI

E57).

5.2.2 BOLTS/Light exclusion volume — a volume

reserved by equipment or loadport unit to put

BOLTS/Light compliant box opener/loader.

5.2.3 BOLTS/Light plane — a vertical plane that

interfaces BOLTS/Light compliant box opener/loader

and equipment.

5.2.4 bottom interface plane— an interface means

between the equipment and box opener/loader.

5.2.5 box — a protective portable container for a

cassette and/or substrate(s).

5.2.6 box opener/loader — the equipment component

that opens wafer carriers (if needed) and presents the

carriers to the equipment’s wafer handler for unloading

and loading wafers.

5.2.7 carrier — any cassette, box, pod, or boat that

contains wafers (as defined in SEMI E1.9). Also known

as wafer carrier.

5.2.8 carrier capacity — the number of substrates that

a carrier holds (as defined in SEMI E1.9).

5.2.9 cassette — an open structure that holds one or

more substrates.

5.2.10 control connection area — an area to be used

for placement of connectors for electrical signals,

power supplies, and other inlets/outlets.

5.2.11 docked facial datum plane — a vertical plane

that bisects the wafers at the carrier docked position. It

is also parallel to the load face plane specified in SEMI

E15.

5.2.12 docking stroke — the travel distance of the

carrier center between its load position (facial datum

plane) and the position where the door opening/closing

is done.

5.2.13 facial datum plane — a vertical plane that

bisects the wafers and that is parallel to the front side of

the carrier (where wafers are removed or inserted). On

equipment load ports, it is also parallel to the load face

plane specified in SEMI E15 on the side of the

equipment where the carrier is loaded and unloaded (as

defined in SEMI E57).

5.2.14 front-opening unified pod (FOUP) — a box

(that complies with SEMI E47.1) with a nonremovable

cassette (so that its interior complies with SEMI E1.9)

and with a front-opening interface (that mates with a

FIMS port that complies with SEMI E62) (as defined in

SEMI E47.1).

5.2.15 horizontal datum plane — a horizontal plane

from which projects the kinematic-coupling pins on

which the carrier sits. On equipment load ports, it is at

the load height specified in SEMI E15 and might not be

physically realized as a surface (as defined in SEMI

E57).

5.2.16 load face plane — the furthest physical vertical

boundary plane from the cassette centroid or carrier

centroid on the side (or sides) of the equipment where

loading of the equipment is intended (as defined in

SEMI E15).

5.2.17 loading slider area — two flat surfaces on

equipment which may be used by a maintenance

supporting mechanism (not defined in this standard) to

support the box opener/loader during attachment and

detachment.

5.2.18 minienvironment — a localized environment

created by an enclosure to isolate the product from

contamination and people.

5.2.19 pod — a box having a Standard Mechanical

Interface (SMIF) per SEMI E19.