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SEMI F56-0600 © SEMI 2000 8 Table 1 Data S heet Data Shee t 1 Data fr om Ste ady State Power Supply Effects Colum n A Column B Column C Column D Column E Column F Colum n G Column H Colum n L Column M Data Pnts MFC Setpo…

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SEMI F56-0600 © SEMI 20007
Span (Actual Flow)
Span of MFC
ZERO
Ideal Response
0
Positive Voltage Variation
-3
-2
-1
0
1
2
3
Flow Changes (%FS)
A
similar plot would be obtained:
Zero and span effects as a result of varying the negative power
l
zero and span effects as a results of varying both power supplies
tth
Figure 4
Data Plots
SEMI F56-0600 © SEMI 2000 8
Table 1 Data Sheet
Data Sheet 1 Data from Steady State Power Supply Effects
Column A Column B Column C Column D Column E Column F Column G Column H Column L Column M
Data
Pnts
MFC
Setpoint
MFC
Indicated
Flow (V)
Flow
Standard
Output
(V)
Positive
Power
Supply
Level (V)
Negative
Power
Supply
Level (V)
Power
Supply
Current
Level (mA)
MFC
Indicated
Flow %FS
Flow
Standard
%FS
Positive
Power
Supply
Var. (%)
Negative
Power
Supply
Var. (%)
10 0 0 15-15 30 0 0 0 0
20 0 0 15-15 30 0 0
30 0 0 15-15 30 0 0
.
.
.
4 0 0.015 0 15.15 -15 30 0.3 0 1.0 0
5 0 0.010 0 15.15 -15 30 0.3 0
6 0 0.010 0 15.15 -15 30 0.3 0
.
.
.
7 0 0.015 0 14.85 -15 30 0.3 0 -1.0 0
8 0 0.010 0 14.85 -15 30 0.2 0
9 0 0.015 0 14.85 -15 30 0.3 0
.
10 0 0.010 0 15 -15.15 30 0.3 0 0 1.0
11 0 0.010 0 15 -15.15 30 0.3 0
12 0 0.010 0 15 -15.15 30 0.3 0
.
13 0 0.005 0 15 -14.85 30 0.1 0 0 -1.0
SEMI F56-0600 © SEMI 20009
Table 2 Zero and Span Effects as a Function of Steady-State Power Supply
Power Supply Voltage Change
(% of reference)
Change in Zero
of MFC (%FS)
Span of MFC
(%FS)
Span - Actual Flow
(%FS)
Positive Negative
00000
-1 0 0.25 99.8 100.0
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00000
-1 0
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00
0+1
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00
1-1
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00
11
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