semi合集-English.pdf - 第5512页

SEMI P10-0705 © SEMI 1990, 2005 7 [LAYER_PRIORITY [ELAPSED_TIME] ] [MILESTONES < ship_to >] [PERIODIC_UPDATES < ship_to >] [ESTIMATED_ARRIVALS < ship_to >] [BUSINESS_CONTACT] {BUSINE SS_A DDRESS} {BUSIN…

SEMI P10-0705 © SEMI 1990, 2005 6

[FRACTURE_FILE]

{ [<

data_manipulation>] [<data_function>] }

END_DATA_PATTERN_NAME

<data_manipulation> = START_DATA_MANIPULATION

[

BOOLEAN

[

PATTERN_GENERATION_AREA]

data_file_parameters> { <data_file_parameters> } ]

data_fracture>}

END_DATA_MANIPULATION

<data_file_parameters> =

DATA_SOURCE_FILE [PATTERN_FORMAT]

[

DATA_TOP_CELL] [DATA_LAYER_ID]

[

DATA_PATTERN_WINDOW]

data_fracture>}

END_DATA_SOURCE_FILE

<data_function> = START_DATA_FUNCTION

DATA_FUNCTION_PURPOSE

{ SOFTWARE_NAME {SOFTWARE_REVISION}

{ RUNSET_NAME [RUNSET_REVISION] [DATA_LOCATION]

{ PARAMETER_FILE_NAME [PARAMETER_FILE_REVISION] }

{ INPUT_FILE_NAME INPUT_FILE_FORMAT

[TOP_CELL] [DATA_LOCATION] }

{RESULT_FILE_NAME} {SUMMARY_FILE_NAME} {LOG_FILE_NAME} }

}

END_DATA_FUNCTION

<data_fracture> =

START_DATA_FRACTURE

[

SIZING [SIZING_RULE] [SIZING_BORDER_RULE] ]

[

FRACTURING_SCALE] [DATA_SCALE_FACTOR]

[

PATTERN_ADDRESS_SIZE]

[

DARK_INTERNAL_WINDOW] [CLEAR_INTERNAL_WINDOW]

[

EXTERNAL_WINDOW] [ROTATION] [MIRROR]

END_DATA_FRACTURE

<job_data> = DATA_JOB_NAME JOB_FORMAT

<standard_pattern> = STD_PATTERN_NAME PATTERN_FORMAT

<mask_group> = MASK_GROUP_ID [<

mask_options>] END_MASK_GROUP_OPTIONS

PLACEMENT_TOP_CELL {<

mask_definition>}

cell_definition>} {<pattern_group>} END_MASK_GROUP

<mask_options> = [BLANKET_PO_NUMBER] [PO_NUMBER] [SO_NUMBER] [ORDER_ID]

[RELEASE_NUMBER] [LINE_ITEM_NUMBER] [QUOTE_NUMBER]

[STATUS]

[DUE_DATE_TIME_REQUESTED] [

DELIVERY_PRIORITY]

SEMI P10-0705 © SEMI 1990, 2005 7

[LAYER_PRIORITY [ELAPSED_TIME] ]

[MILESTONES <

ship_to>] [PERIODIC_UPDATES <ship_to>]

[ESTIMATED_ARRIVALS <

ship_to>]

[BUSINESS_CONTACT] {BUSINESS_ADDRESS} {BUSINESS_PHONE}

{BUSINESS_FAX} [BUSINESS_EMAIL]

[BILLING_CONTACT] {BILLING_ADDRESS}

{BILLING_PHONE} {BILLING_FAX} [BILLING_EMAIL]

[PRICE]

{PTC_HOURS [PTC_RATE] [PTC_FIXED] }

[EWT_THRESHOLD EWT_RATE [EWT_CEILING] ]

[SECURITY_CLASS] [QS9000]

[SHIPPING_CONTACT] {SHIPPING_ADDRESS} {SHIPPING_PHONE}

{SHIPPING FAX} [SHIPPING_EMAIL]

{SHIPPING_METHOD}

[REPAIRS_AUTHORIZED]

shippable_data>]

{ MFG_SITE_REQD }

{ [LITHO_EQUIP_REQD] {EQUIP_SITE_REQD}

{ [LITHO_MODEL_REQD] {LITHO_MODE_REQD} } }

PRODUCT_TYPE [PRODUCT_MAGNIFICATION] [PRODUCT_IMAGING_TYPE]

[QUANTITY] [PRODUCT_AS_CHECKPLATE]

[MULTIWRITE]

{WAFER_EXPOSURE_TOOL}

[<wafer_exposure_data> <aerial_image_data>]

[FAB_TECHNOLOGY] [WAFER_FAB]

[JOB_NAME] [JOB_LEVEL]

[RETROFIT_JOB_NAME] [RETROFIT_JOB_LEVEL]

[RETROFIT_MASK_SET_ID] [RETROFIT_MASK_ID]

[RETROFIT_MASK_SET_NAME [RETROFIT_MASK_SET_VERSION]

[RETROFIT_MASK_NAME] ]

title_data>}

barcode_data>}

[JOB_ONLY_APPROVAL_REQD] [JOB_WITH_PATTERNS_APPROVAL_REQD]

{PATTERN_APPROVAL_REQD} [ALL_PATTERNS_APPROVAL_REQD]

{APPROVAL_REQD}{REVIEW_REQD}

[SERIAL_NUMBER]

[MIRROR_MASK] [MASK_ROTATION]

substrate>

phase_shift>]

[UT1X_UNCUT] [PROCESS] [PROCESS_ETCHING_TYPE]

SEMI P10-0705 © SEMI 1990, 2005 8

[CUSTOMER_SPEC CUSTOMER_SPEC_REVISION]

{TOP_PELLICLE_TYPE [

TOP_PELLICLE_CENTRALITY_ERROR] [PRICE] }

{BOTTOM_PELLICLE_TYPE [

BOTTOM_PELLICLE_CENTRALITY_ERROR] [PRICE]}

[GUIDES_REQD [PRICE] ]

[CENTRALITY]

registration>}

[REGISTR_CLOSURE [REGISTR_CLOSURE_REFERENCE_ONLY]

{REGISTR_CLOSURE_EQUIP_REQD} {EQUIP_SITE_REQD}

[REGISTR_CLOSURE_BEGIN REGISTR_CLOSURE_END] ]

[BUTTING_ERROR [BUTTING_ERROR_METHOD] ]

cd_group>}

cd_set>}

cd_xy_definition>}

cd_iso_dense_definition>}

[MIN_MASK_FEATURE_SIZE] [

MIN_CORNER_TO_CORNER_GAP]

[PERCENT_CLEAR]

opc_definition>}

defect_definition>}

[INSPECTION_REF_LOCATION]

{<surface_definition>}

[INSPECT_THROUGH_PELLICLE <

defect_definition>]

{<sem_photo>}

[QUALITY_GROUP_ID]

[COMPACT_LABEL]

{PACKAGE [MAX_MASKS_IN_PACKAGE] }

{ADDITIONAL_MASK_INFO}

<wafer_exposure_data> = START_WAFER_EXPOSURE_DATA

WAFER_EXPOSURE_NUMERICAL_APERATURE

[WAFER_EXPOSURE_SIGMA]

[WAFER_EXPOSURE_SIGMA_INNER WAFER_EXPOSURE_SIGMA_OUTER]

WAFER_EXPOSURE_ILLUMINATION

END_WAFER_EXPOSURE_DATA

<aerial_image_data> = START_AERIAL_IMAGE_DATA

AIM_WAVELENGTH

[AIM_INTENSITY_VARIATION_DELTA]

[AIM_FLUX_INTENSITY_DELTA]

[AIM_CD_DELTA]

END_AERIAL_IMAGE_DATA

<title_data> = START_TITLE [TITLE_TEXT] [TITLE_TYPE] [

TITLE_FONT] [TITLE_HEIGHT]

[

TITLE_MAG] [TITLE_JUSTIFICATION] [TITLE_LOCATION] [MIRROR_TITLE]