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SEMI E127-0705 © SEMI 2003, 2005 9 7.3.2 Clock Management — The ability to provide accurate time/dat e information for reporting purposes is required. In addition, standard methods for clock synchronization are mandatory…
SEMI E127-0705 © SEMI 2003, 2005 8
Parameter Name Description Format: Possible Value
6.3.4 Service Message Definition — A service message definition table defines the parameters used in a service, as
shown in the following table:
Parameter Req/Ind Res/Cnf Comment
6.3.4.1 The columns labeled REQ/IND and RSP/CNF link the parameters to the direction of the message. The
message sent by the initiator is called the “Request”. The receiver terms this message the “Indication” or the
request. The receiver may then send a “Response” which the original sender terms the “Confirmation”.
6.3.4.2 The following codes appear in the REQ/IND and RSP/CNF columns and are used in the definition of the
parameters (e.g., how each parameter is used in each direction):
M Mandatory Parameter — Must be given a valid value.
C Conditional Parameter — May be defined in some circumstances and undefined in others. Whether a
value is given may be completely optional or may depend on the value of the other parameter.
U User-Defined Parameter.
- The parameter is not used.
= ( For response only ) Indicates that the value of this parameter in the response must match that in the
primary (if defined ).
7 General Requirements
7.1 Protocol Requirements
7.1.1 The communication protocol used must support use of all data types, including lists, structures, and arrays.
7.2 Required Standards
7.2.1 This section discusses specific SEMI standards that have been assumed for the proper operation of an
integrated measurement module (IMM) as specified in this document.
7.2.2 SEMI E40 — Fundamental compliance to SEMI E40 for Processing Management is required. A process job
queue is not required unless the IMM is capable of holding multiple substrates.
7.2.3 SEMI E90 — Fundamental compliance to SEMI E90 for Substrate Objects and Substrate Location Objects is
required.
7.2.4 SEMI E116 — Fundamental compliance to SEMI E116 (Equipment Performance Tracking) is required. The
IMM is to be considered an EPT Module. Guidance for implementing EPT for the IMM is provided in Related
Information 2.
7.3 Required Basic Capabilities
7.3.1 The requirements in this section are concerned with basic capabilities that may be satisfied in different ways.
Because of this flexibility, the method supported must be clearly documented by the IMM supplier. The IMM
Control Client should allow on-line configuration by a user to achieve seamless “plug and play” integration.
NOTE 2: New standards are evolving and may become the required method for satisfying these basic capabilities in the future.
7.3.1.1 These capabilities are specified between the IMM and its control client. If, as expected for integrated
measurement modules, the client is located within or near the process tool, it is up to the client to have the ability to
communicate the appropriate information (alarm reporting, recipe upload/download) to the host.
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7.3.2 Clock Management — The ability to provide accurate time/date information for reporting purposes is
required. In addition, standard methods for clock synchronization are mandatory. This requirement shall be
satisfied by compliance to the Clock object specification in SEMI E98.
7.3.3 Event Management — The ability for the IMM to report events and associated data of interest to its client is
required. Data provided with these events shall be configurable and shall be valid at the time of the event. Each
event report shall contain the date and time that the event occurred (and not the time that the report was sent). This
requirement may be satisfied through compliance to a standard event mechanism, such as the event reporting
capability defined in SEMI E30 or SEMI E53.
7.3.4 Alarm Management — The ability to report any change in its alarm conditions is required. An alarm
condition is either set or cleared. A set alarm represents danger to the factory, the module, the equipment, the
substrates, or the process. This capability may be satisfied through compliance to a standard alarm mechanism such
as is defined in SEMI E30 or SEMI E41.
7.3.5 Exception Management — An exception is an error. Exceptions may or may not be alarms, either because
they do not represent danger or because they represent occurrences that do not have a set or clear state. Exceptions
shall be reported and time-stamped at the time the exception occurs. This capability may be satisfied through
compliance a standard for exception management such to SEMI E41 or through reporting exceptions as events.
7.3.6 Recipe Management — Compliance to this standard requires the support of recipe upload and download and
directory functions as specified in one of the SEMI standards defining these methods, such as SEMI E30 for process
programs or SEMI E42 recipes.
NOTE 3: New standards for recipe management may be used for these purposes in the future, as they become available.
7.4 State Models
7.4.1 State Model Transitions — All numbered transitions in all state models defined in this standard represent
uniquely identifiable and reportable events unless otherwise noted.
7.4.2 State models in this specification represent behavior as it appears to the client and are used to provide events
to the communications partner. Actual state models implemented may differ. For example, a certain state model
transition in this document may combine multiple transitions as implemented. It is critical that event representation
of state model transitions as specified in the state models defined in this document be followed for reporting.
7.5 Objects
7.5.1 SEMI E39 — Fundamental compliance to SEMI E39 is required for all objects defined in, or required by, this
standard. In addition, the Integrated Measurement Module is considered an owner of all objects that it uses,
manages, or that are components. If the IMM supports all object types specified in this standard, then it is not
necessary to support the GetType service in SEMI E39. If all object types implemented have only those attributes
specified by name in this standard, then the service GetAttrName is not required. Filtering for GetAttr and SetAttr is
not required. Otherwise, to provide for a self-configuring interface, owner objects shall conform to the following
additional services defined in SEMI E39:
GetType
GetAttrName
GetServiceNames
GetServiceParameters
7.5.2 All objects defined in this standard shall satisfy the fundamental requirements of SEMI E39. It shall be
possible for the client to inquire about the attributes of one or more objects through the service GetAttr. It shall be
possible for the client to change the value of attributes designated as read/write (RW) using the service SetAttr.
7.5.3 For purposes of communicating using SEMI E39, all objects other than the IMM object itself shall be owned
directly by the IMM. The IMM itself is considered to be owned by its Client. For purposes of normal operations
during manufacturing, the factory host considers the Control Client as the IMM owner.
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7.6 Service Requirements
7.6.1 This document does not redefine services defined in other SEMI standards. However, for emphasis, those that
are beyond the requirements of fundamental compliance to other standards are included in the lists of services as
applicable.
8 Overview
8.1 Background
8.1.1 Both modern manufacturing processes and modern manufacturing equipment are increasingly complex. A
single installation of equipment may have hundreds of sensors and actuators. In order to manage this complexity,
better methods of referencing the internal components of equipment are needed. Use of the object paradigm
provides a means for the equipment to describe its internal composition to the factory in a natural way.
8.1.2 Definition of standardized objects allows the factory to be specific about its requirements and its need for
information.
8.1.3 The measurement module is not concerned about the role of its client. Depending on the architectural layout,
it might be communicating with the controller of the integrated equipment, the controller of the equipment’s front-
end carrier handling module or the factory host.
8.1.4 The IMM is one module of many that receive instructions about a specific substrate. The substrate may be
given to the IMM at any point in a sequence of individual process steps. While it typically may be the first or the
last in the sequence, or both, it may also appear at any point in the middle.
8.1.5 The IMM is given a substrate, a recipe, and a process job. It may or may not have an alignment station, and it
may or may not be able to contain more than one substrate at a time. For example, it might be able to align one
substrate while it is executing a process job on a previous substrate. Also, the IMM may or may not have an
integrated data analysis subsystem. Modules with data analysis capability may require additional processing time to
complete the analysis. Finally, the substrate is unloaded and the results of the measurement are sent on the data port.
9 Communication Ports and Clients
9.1 Ports
9.1.1 The IMM shall provide two or more communication ports, one of which to be used for control as well as
information and is called the primary port. Other ports are called secondary ports and are mainly used for sending
and receiving information to applications that may be either on- or off-tool, such as remote process control and/or
fault detection, archiving substrate data tables, uploading and downloading recipes, etc.
9.1.2 Control in this case signifies the request for services that can change the hardware state of the integrated
metrology module, including substrate exchange, process jobs, clock services, and maintenance-related activities. In
general, the controller of the process tool, or one of its major components, will require the use of the primary port
for control, although there may be special circumstances where this is not true.
9.1.3 The IMM shall support one or more additional communication ports to be used mainly for sending and/or
receiving information, such as event reports, alarm-related messages, recipes, and data tables. It is recommended
that at least one of the additional ports be physically separate to allow a connection to a different network.
9.1.4 The requirement to support a second or multiple ports is a requirement on the IMM side of the communication
only. The decision to utilize these ports, and the manner in which they are utilized, is left to the application of the
integrated metrology tool and the factory.
9.2 Clients
9.2.1 There are two types of clients, the Control Client and the Data Client.
9.2.2 All clients are able to configure the following independently of other clients:
event reports,
alarm reports, and