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SEMI E40-0705 © SEMI 1995, 2005 14 8.3.2.10 .1 The order t hat jobs becom e active is dependent upon whet her the equipm ent supports j ob queuing an d/or job poolin g. Example methods for job acti v ation incl ude FIFO …

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1
PROCESS JOB
ACTIVE
EXECUTING
SETTING UP
3
5
PROCESSING
WAITING FOR
START
PAUSE
9
10
11
POST ACTIVE
13
15
12
H
8
4
14
POOLED/
QUEUED
PAUSING
PAUSED
STOPPING
ABORTING
STOPPED
ABORTED
18
16
17
6
2
PROCESS
COMPLETE
7
Figure 4
Process Job State Model
8.3.2.6 PAUSED (PAUSE Substate) — While the PR Job is in the PAUSED substate all processing resource
activity has ceased. The PR Job is awaiting a RESUME (or STOP or ABORT) command.
8.3.2.7 PAUSING (PAUSE Substate) — While the PR Job is in the PAUSING substate, the processing resource
continues to the first safe, continuable pausing place and then ceases activity. The activity may only cease at points
that allow for resumption of the activity such that material integrity is maintained and the processing goals are
accomplished.
8.3.2.8 PROCESSING (EXECUTING Substate) — While the PR Job is in the PROCESSING substate, the
processing resource is doing the actual material processing using the equipment recipe(s) specified by the PR Job.
8.3.2.9 PROCESS COMPLETE (POST ACTIVE Substate) — While the PR Job is in the PROCESS COMPLETE
substate the processing resource has completed processing all material specified by the PR Job. When all material
removed from the processing resource, processing resource performs any required post-conditioning. Post-
conditioning includes all operations in the processing resource after material departure, which are required by the
recipe.
8.3.2.9.1 In cases where the process job is superseded by another process job on the same material and post-
conditioning is not required, the first job terminates successfully while the material is still present. If post-
conditioning is required, the second job may not supersede and remains on the queue.
8.3.2.10 QUEUED/POOLED — While the PR Job is in the QUEUED/POOLED substate, the process job has been
accepted by the processing resource through a PR Job Create/Acknowledge transaction (such as PRJobCreate,
PRJobCreateEnh, and PRJobMultiCreate) and is awaiting execution. One or more jobs may be in this state
depending upon specific equipment capabilities. That is, if equipment does not support job queuing, then only one
PR Job may be in this state at a time. If equipment does support job queuing, then the number of jobs that may be in
this state must at least be equal to the number of load ports on the equipment. Advanced equipment job manage-
ment capabilities require multiple jobs (greater than two) be in this state per load port.
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8.3.2.10.1 The order that jobs become active is dependent upon whether the equipment supports job queuing and/or
job pooling. Example methods for job activation include FIFO (first-in/first-out) order, material arrival order, and
host ordering of jobs (provided by additional services). The equipment may support only one method of selecting
jobs for activation, or more than one method allowing only one method to be used at a time or more than one
method to be used at a time.
8.3.2.10.2 All process jobs pass through this state. If the processing resource supports queuing/pooling, jobs may
remain in this state for prolonged periods. In any case, a process job remains queued/pooled until the material
positions (of the processing resource) needed for the process are available or are already occupied by the material to
be processed.
8.3.2.11 STOPPING (ACTIVE Substate) — While the PR Job is in the STOPPING substate, the processing resource
is performing a stop procedure to terminate processing in an orderly manner. It is the responsibility of the processing
resource to cease the current activity at the next safe, convenient point, preserving material integrity. For processing
equipment this may require sending all related substrates to its output destination. This implies that each material is
processed as specified in the recipe or not at all.
8.3.2.12 WAITING FOR START (EXECUTING Substate) — The substate WAITING FOR START is used only in
manual start process jobs. It is entered once SETUP is complete and a PR Job Start Process has not yet been
received by the processing resource. Manual start is defined by the supervisor in PR Job Create.
8.3.2.12.1 The job remains in this state, ready to process the material, until the PR Job Start Process is received or
Abort or Stop terminates the job.
8.3.2.13 POST ACTIVE — This is the parent state of those states that refer to the final state (completion) of the
process jobs. Process jobs that have completed, stopped or aborted should remain in this state until the trigger to
transition to extinction is detected (see Table 1). If there is no Control Job associated with the process job, as in the
case of the inline stepper/scanner, the process job should remain until all material associated with the process job has
left the equipment or a process job specifying the same material replaces it.
8.3.2.14 STOPPED (POST ACTIVE substate) — This is the final state for those jobs that have been in the
STOPPING state.
8.3.2.15 ABORTED (POST ACTIVE substate) — This is the final state for those jobs that have been in the
ABORTING state.
8.3.3 Process Job State Transitions — The detailed state definitions are defined in Table 1.
Table 1 Process Job State Transition Table
# Current State Trigger New State Action(s)
1 (no state) The processing resource accepts a
Process Job create request.
QUEUED/ POOLED The job is placed the job queue/pool.
Acknowledge the Process Job creation.
2 QUEUED/
POOLED
The processing resource has been
allocated to the Process Job.
SETTING UP The job is removed from the queue/pool.
PR Job Setup event is triggered.
All required resource preconditioning is
performed.
When job material arrives all material
preparation is performed.
3 SETTING UP Job material is present AND the
processing resource is ready to
start the process job AND
PRProcessStart attribute is not set.
WAITING FOR
START
PR Job Waiting for Start event is triggered.
4 SETTING UP Material is present and ready for
processing. PRProcessStart
attribute is set.
PROCESSING PR Job Processing event is triggered.
Material is processed.
5 WAITING FOR
START
Job Start directive PROCESSING PR Job Processing event is triggered.
Material is processed.
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# Current State Trigger New State Action(s)
6 PROCESSING Material processing completed. PROCESS
COMPLETE
PR Job Processing Complete event is
triggered.
The processing resource performs all
required resource post-conditioning.
Await material departure.
7 Any POST
ACTIVE sub-
state
Job material departs from the
equipment OR the process job
becomes extinct because the
process job is replaced by another
process job that specifies the same
material when no control job is
used.
(Extinction) PR Job Complete event is triggered. The
process job is deleted.
8 EXECUTING The processing resource initiated a
process pause action.
(it received a PAUSE command or
initiated an internal pause)
PAUSING The processing resource pauses at the first
convenient time.
9 PAUSING The processing resource paused
the job.
PAUSED None.
10 PAUSE The processing resource resumed
the job.
EXECUTING The processing resource resumes the
activity that was paused.
11 EXECUTING The processing resource initiated a
process stop action.
(it received a STOP command or
initiated an internal stop)
STOPPING The processing resource stops the current
execution activity at the first convenient
time.
12 PAUSE The processing resource initiated a
process stop action.
(it received a STOP command or
initiated an internal stop)
STOPPING The processing resource stops the current
execution activity at the first convenient
time.
13 EXECUTING The processing resource initiated a
process abort action.
(it received an ABORT command
or initiated an internal abort)
ABORTING The processing resource terminates the
current execution activity immediately.
14 STOPPING The processing resource initiated a
process abort action.
(it received an ABORT command
or initiated an internal abort)
ABORTING The processing resource terminates the
current execution activity immediately.
15 PAUSE The processing resource initiated a
process abort action.
(it received an ABORT command
or initiated an internal abort)
ABORTING The processing resource terminates the
current execution activity immediately.
16 ABORTING The abort procedure is completed.
For some equipment, substrates are
moved out into a safe location as
part of the error recovery.
ABORTED
17 STOPPING The stop procedure is completed
and all material is in a safe
condition.
STOPPED
18 QUEUED/
POOLED
“CANCEL,” “ABORT,” or
“STOP” command received.
(no state) Remove the process job from the
queue/pool.
PR Job Complete event is triggered.
Delete the process job.