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SEMI E130-1104 © SEMI 2003, 2004 23 22.3.9 LOA D-TEST-SUBST — This command causes a test substrate from the specified substrate location to be loaded onto t he chuck. 22.3.9.1 A substrate occupyin g the chuck is suspende…

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SEMI E130-1104 © SEMI 2003, 2004 22
22.3.5 INSPECT-INK-MARKS — This command causes the ink marks to be inspected. The Process model
transitions to the SERVICE TASK state. When the inspection task is completed, the chuck is returned to the pre-
task coordinates and the Process State model transitions from the SERVICE TASK to AWAITING COMMAND
state.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “INSPECT-INK-MARKS”
Die List C List of type
DieCoordinate,
see Data Types
and Sizes.
If this parameter is present, inspect the site listed. Otherwise,
inspect the current site.
Ack - M Integer Service Acknowledgement.
22.3.6 INSPECT-PTP-ALIGN — This command causes the probe to pad alignment to be inspected. The Process
State model transitions to the SERVICE TASK state. When the inspection task is completed, the chuck is returned
to the pre-task coordinates and the Process State model transitions from the SERVICE TASK to AWAITING
COMMAND state.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “INSPECT-PTP-ALIGN”
Ack - M Integer Service Acknowledgement.
22.3.7 INSPECT-PROBES — This command causes the probes to be inspected. Support for selective probe site
inspection is not a fundamental requirement. When this capability exists, the supplier must document the format of
the probe site list. If the Process State model is in the AWAITING COMMAND state, the Process State model
transitions to the SERVICE TASK state. When the inspection task is completed, the chuck is returned to the pre-
task coordinates and the Process State model transitions from the SERVICE TASK to AWAITING COMMAND
state.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “INSPECT-PROBES”
Probe Site List M C Supplier
defined
List of probe sites to be inspected. Zero length list indicates
that all probes to inspected.
Ack - M Integer Service Acknowledgement.
22.3.8 LOAD-SUBSTRATE — This command causes the next substrate identified in the Process Job to be loaded
onto the chuck. The prober must perform all the pre-conditioning requirements for probing to begin. The transition
from HANDLING MATERIAL to AWAITING COMMAND indicates that probing can commence. If the probe is
unable to perform the necessary steps to prepare the substrate for probing, the prober will send an alarm and
transition to the PROCESSING BLOCKED state.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “LOAD SUBSTRATE”
Ack - M Integer Service Acknowledgement.
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22.3.9 LOAD-TEST-SUBST — This command causes a test substrate from the specified substrate location to be
loaded onto the chuck.
22.3.9.1 A substrate occupying the chuck is suspended. When the host issues the UNLOAD-TEST-SUBST
command, a suspended substrate is automatically resumed.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “LOAD-TEST-SUBST”
SubstLocID M Text Substrate Location containing the test substrate.
Ack - M Integer Service Acknowledgement.
22.3.10 LOCKOUT-CONTROL — This command is used to enable and disable the equipment console during
remote operations. Passing a value of Lockout=TRUE disables the equipment console and requires the user to
switch the control state to ONLINE LOCAL to regain console control.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “LOCKOUT-CONTROL”
Lockout M C Boolean True = Lockout console control. User must switch to
ONLINE-LOCAL mode to regain control.
Ack - M Integer Service Acknowledgement.
22.3.11 MOVE — This commande is used to perform a relative move operation. At least one of the optional
parameters: X, Y, or Z must be included with this command. An omitted X, Y, or Z is equivalent to specifying zero.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “MOVE”
X C - Integer
Y C - Integer
Z C - Integer
Relative step value. At least one parameter must be included.
Ack - M Integer Service Acknowledgement.
22.3.12 MOVE-ABS — This command is used to perform an absolute move. At least one of the optional
parameters: X, Y, or Z must be included with this command. An omitted X, Y, or Z is equivalent to specifying the
current value, resulting in no net movement in that direction.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “MOVE-ABS”
X C - Integer
Y C - Integer
Z C - Integer
Absolute index. At least one parameter must be included.
Ack - M Integer Service Acknowledgement.
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22.3.13 MOVE-SUBSTEP — This command is used to perform a sub-index step. At least one of the optional
parameters: XSubstep, YSubstep, or ZSubstep must be included with this command. An omitted XSubstep,
YSubstep, or ZSubstep is equivalent to specifying zero.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “MOVE-SUBSTEP”
XSubstep C - Float
YSubstep C - Float
ZSubstep C - Float
Relative step value. At least one parameter must be
included.
Ack - M Integer Service Acknowledgement.
22.3.14 MOVE-TO-REF-DIE — Move to the Reference Die coordinate as defined within the recipe.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “MOVE–TO-REF-DIE”
Ack - M Integer Service Acknowledgement.
22.3.15 UNLOAD-TEST-SUBST — This command unloads the test substrate from the chuck to the specified
substrate location. A suspended substrate is automatically resumed.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “UNLOAD-TEST-SUBST”
SubstLocID M Text Target Substrate Location.
Ack - M Integer Service Acknowledgement.
22.3.16 RESET-CONTACT-CNT — This command is used to reset the accumulators associated with the number of
contacts made for a given probe card.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “RESET-CONTACT-CNT”
Ack - M Integer Service Acknowledgement.
22.3.17 RESET-CONTROL MAP — This command is used to reset the coordinate index within a current Control
Map. The host can designate the coordinate index within the Control Map by providing the optional XY coordinates
with this command.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “RESET-CONTROL-MAP”
X C - Integer
Y C - Integer
If coordinates are designated, both X and Y must be
provided. The host is responsible for providing XY
coordinates that match coordinates contained in the
Control Map.
Ack - M Integer Service Acknowledgement.