semi合集-English.pdf - 第2868页

SEMI E105-0701 © SEMI 2000, 2001 19 Operati on Descripti on Step MES Factory Ops Schedul er / Dispatcher MTS C Productio n Machin e EQ1 Productio n Machin e EQ2 AM HS Equipme nt 27 <> FO updates E Q1LP1 port ava il…

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SEMI E105-0701 © SEMI 2000, 2001 18
R2-4 Scenario 4 — Dispatch List Based Scheduler/Dispatcher, Stocker is Not managed by Scheduling Component
R2-4.1 Dispatch list based. EQ1->Stocker->EQ2. After lot 1 processing on EQ1 is finished, Scheduler assigns lot
1 to EQ2. FO checks the EQ2 port status and finds No available port. FO makes the logistic decision to transfer lot
1 from “EQ1 to Stocker 2” instead of “from EQ1 to EQ2”. Scheduler does not assign lots to Stocker. In this
scenario 4, the separate transfers “from EQ1 to Stocker 2” and “from Stocker 2 to EQ2” are described.
Stocker 1
Production
EQ1
Stocker 2
Production
EQ2
Operation 1000 Operation 2000
lot 1 in C1
AGV 1 OHT 1
OHS 2
S/D assigns lot 1 to EQ2.
FO decides to transfer lot 1 to Stocker2
Operation Description Step MES
Factory
Ops
Scheduler /
Dispatcher
MTSC
Production
Machine
EQ1
Production
Machine
EQ2
AMHS
Equipment
1
Inform State Transition (resource:EQ1, from: Down to:Available)
2
Inform (resource:EQ1LP1, to :Available)
3
Inform (resource:EQ1LP2, to :Available)
Dispatch Decision for EQ1
4
whatNextForResourceByCount (resource:EQ1)
5
Reply Production Activity (resource:EQ1, material:lot 1)
Port Reservation for EQ1LP1
6
Get Port Reservation (machine:EQ1, port:EQ1LP1, carrier:C1)
7
Production Job Setup (get Lot Info, verify job properties)
8
Reply Port Reservation (port:EQ1LP1, carrier:C1)
Request Transport Job for C1
from Stocker to EQ1
9
Request Transport Job (carrier:C1 dest:EQ1LP1, deadline: , priority)
10
Reply Transport Job (TJ1)
Request Production Job for
C1
11
Request Production Job (Lot:lot 1, machine:EQ1)
12
Reply Production Job (ProdJ1)
Determine EQ1 Lot to be
Processed after L1
13
whatNextForResourceByCount (resource:EQ1)
14
Reply Production Activity (resource:EQ1, material:L2)
Move C1 via AMHS
15
MTSC controls movement of TJ1 via AMHS
16
TransportJob State Change (job:TJ1, from:Queued, to:Executing)
17
<> MTSC publishes location updates as C1 moves through
AMHS
Port Reservation for EQ1LP2
18
Get Port Reservation (machine:EQ1, port:EQ1LP2, carrier:C2)
19
Production Job Setup (get Lot Info, verify job properties)
20
Reply Port Reservation (port:EQ1LP2, carrier:C2)
Request Transport Job for C2
from Stocker to EQ1LP2
21
Request Transport Job (carrier:C2 dest:EQ1LP2)
22
Reply Transport Job (TJ2)
Request Production Job for
C1
23
Request Production Job (Lot:L2, machine:EQ1)
24
Reply Production Job (ProdJ2)
25
TransportJob State Change (job:TJ2, from:Queued, to:Executing)
26
TransportJob State Change (job:TJ1, from:Executing, to:Completed)
SEMI E105-0701 © SEMI 2000, 200119
Operation Description Step MES
Factory
Ops
Scheduler /
Dispatcher
MTSC
Production
Machine
EQ1
Production
Machine
EQ2
AMHS
Equipment
27
<> FO updates EQ1LP1 port availability status
Login lot 1 & change EQ1
status
28
Login lot 1, change equipment status, etc.
29
Notify Carrier C1 Arrives at EQP1
Process lot L1
30
ProductionJob State Change (job:ProdJ1, from:Queued, to:Executing)
31
L1 Processing
32
TransportJob State Change (job:TJ2, from:Executing, to:Completed)
33
<> FO updates EQ1LP2 port availability status
Logout lot 1 & change EQ1
status
34
Logout lot 1, change equipment status, etc.
35
ProductionJob State Change (job:ProdJ1, from:Executing, to:Completed)
36
Notify WIP State Change
Process lot 2
37
ProductionJob State Change (job:ProdJ2, from:Queued, to:Executing)
38
L2 Processing
Login lot 2 & change EQ1
status
39
Login lot 2, change equipment status, etc.
Disposition Decision for C1
40
whatNextForMaterialGroupByCount (lot 1)
41
Reply (ProductionActivity on EQ2, MaterialGroup:lot 1)
Request Transport Job to
move C1 to Stocker
42
Request Transport Job (carrier:C1, dest:Stocker2, deadline: , priority) (*1)
43
Reply Transport Job (TJ3)
44
<> FO updates port availability status
45
MTSC controls movement of TJ3 via AMHS
46
TransportJob State Change (job:TJ3, from:Queued, to:Executing)
47
<> MTSC publishes location updates as C1 moves through
AMHS
48
EQ2 becomes available
Dispatch Decision for EQ2
49
whatNextForResourceByCount (resource:EQ2)
50
Reply Production Activity (resource:EQ2, material:lot 1)
Port Reservation for EQ2LP1
51
Get Port Reservation (machine:EQ2, port:EQ2LP1, carrier:C1)
52
Production Job Setup (get Lot Info, verify job properties)
53
Reply Port Reservation (port:EQ2LP1, carrier:C1)
Request Transport Job for C1
54
Request Transport Job (carrier:C1 source EQ1LP1, dest:EQ2LP1)
55
Reply Transport Job (TJ4)
Request Production Job for
C1
56
Request Production Job (Lot:lot 1, machine:EQ2)
57
Reply Production Job (ProdJ3)
Transport Job to Store C1
Complete
58
TransportJob State Change (job:TJ3, from:Executing, to:Completed)
(*1) FO checks port status on tool. Finds no ports available. Delivers lot to stocker close to tool.
SEMI E105-0701 © SEMI 2000, 2001 20
R2-5 Scenario 5 — Dispatch List Based Scheduler/Dispatcher, Stocker is managed by Scheduling Component
R2-5.1 Dispatch list based. EQ1->EQ2. After lot 1 processing on EQ1 is finished, Scheduler assigns lot 1 to EQ2.
Scheduler additionally checks the EQ2 port status and finds the available port. Scheduler makes the logistic
decision to transfer lot 1 from EQ1 to EQ2 directly. Scheduler assigns lots to Stocker when the next assigned
equipment is not available. In this scenario 5, the direct transfer “from EQ1 to EQ2” is described.
Stocker 1
Production
EQ1
Stocker 2
Production
EQ2
Operation 1000 Operation 2000
lot 1 in C1
AGV 1 OHT 1
OHS 2
S/D assigns lot 1 to EQ2.
S/D decides to transfer lot 1 to EQ2
Operation Description Step MES
Factory
Ops
Scheduler /
Dispatcher
MTSC
Production
Machine
EQ1
Production
Machine
EQ2
AMHS
Equipment
1
Inform State Transition (resource:EQ1, from: Down to:Available)
2
Inform (resource:EQ1LP1, to :Available)
3
Inform (resource:EQ1LP2, to :Available)
Dispatch Decision for EQ1
4
whatNextForResourceByCount (resource:EQ1)
5
Reply Production Activity (resource:EQ1, material:lot 1)
Port Reservation for EQ1LP1
6
Get Port Reservation (machine:EQ1, port:EQ1LP1, carrier:C1)
7
Production Job Setup (get Lot Info, verify job properties)
8
Reply Port Reservation (port:EQ1LP1, carrier:C1)
Request Transport Job for C1
from Stocker to EQ1
9
Request Transport Job (carrier:C1 dest:EQ1LP1, deadline: , priority)
10
Reply Transport Job (TJ1)
Request Production Job for
C1
11
Request Production Job (Lot:lot 1, machine:EQ1)
12
Reply Production Job (ProdJ1)
Determine EQ1 Lot to be
Processed after L1
13
whatNextForResourceByCount (resource:EQ1)
14
Reply Production Activity (resource:EQ1, material:L2)
Move C1 via AMHS
15
MTSC controls movement of TJ1 via AMHS
16
TransportJob State Change (job:TJ1, from:Queued, to:Executing)
17
<> MTSC publishes location updates as C1 moves through
AMHS
Port Reservation for EQ1LP2
18
Get Port Reservation (machine:EQ1, port:EQ1LP2, carrier:C2)
19
Production Job Setup (get Lot Info, verify job properties)
20
Reply Port Reservation (port:EQ1LP2, carrier:C2)
Request Transport Job for C2
from Stocker to EQ1LP2
21
Request Transport Job (carrier:C2 dest:EQ1LP2)
22
Reply Transport Job (TJ2)
Request Production Job for
C1
23
Request Production Job (Lot:L2, machine:EQ1)
24
Reply Production Job (ProdJ2)
25
TransportJob State Change (job:TJ2, from:Queued, to:Executing)
26
TransportJob State Change (job:TJ1, from:Executing, to:Completed)