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SEMI E90-0705 © SEMI 1999, 2005 26 15 Requirements for Compliance 15.1 Table 19 provi d es a checklist for Substrate Tracking (STS) compliance. Table 19 STS Compliance Statemen t Fundamental STS Requirements STS S ection…

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SEMI E90-0705 © SEMI 1999, 2005 25
Table 17 Variables Required for Batch Location Object State Model Transitions
Variable Name Description Access Form Comment
BatchLocID Identifier for batch location associated
with the last event.
RO Text.
BatchLocState State of batch location associated with
the last event.
RO Enumerated:
OCCUPIED
UNOCCUPIED
BatchSubstIDMap Ordered list of substrate identifiers
corresponding to the positions in a batch
(e.g., slot positions of a batch container
or a process carrier) associated with the
last event.
RO Ordered list of SubstID. Ordered list indicates
position in the batch
and SubstID can be
actual substrate
identifier, blank “”
when location is
empty or “filler”
when such substrate
is used.
Table 18 Status Variables Representing Object Attributes for Persistent Objects
Variable Name Description Access Form Comment
BatchLocID
i
Identifier of the ith batch location. RO Text.
BatchLocState
i
State of ith batch location. RO Enumerated:
OCCUPIED
UNOCCUPIED
BatchSubstIDMap
i
Ordered list of substrate identifiers
corresponding to the positions in the
batch held at the ith batch location.
RO Ordered list of SubstID. Ordered list indicates
position in the batch
and SubstID can be
actual substrate
identifier, blank ""
when position is
empty or "filler"
when such substrate
is used.
SubstLocID
i
Identifier of the ith equipment substrate
location.
RO Text.
SubstLocState
i
State of ith equipment substrate location. RO Enumerated:
OCCUPIED
UNOCCUPIED
SubstrLocSubstrID
i
Substrate ID of the substrate at the ith
equipment substrate location, when
occupied.
RO Text. Blank “” when
location is
UNOCCUPIED.
14 Additional Events (Equipment with substrate ID reader only)
14.1 SubstrateIDReaderAvailable Event
14.1.1 An event shall be generated whenever a substrate ID reader becomes available.
14.2 SubstrateIDReaderUnavailable Event
14.2.1 An event shall be generated whenever a substrate ID reader becomes unavailable.
SEMI E90-0705 © SEMI 1999, 2005 26
15 Requirements for Compliance
15.1 Table 19 provides a checklist for Substrate Tracking (STS) compliance.
Table 19 STS Compliance Statement
Fundamental STS Requirements STS Section Implemented STS Compliant
Substrate Tracking 8 (except 8.4) Yes No Yes No
Substrate Object and State Model 9 Yes No Yes No
Substrate Location Object and State Model 10 Yes No Yes No
Service Message Implementation (except host-initiated Register
(Create) Substrate and Remove Substrate)
12 Yes No Yes No
Variable Data 13 Yes No Yes No
Events 8.4 Yes No Yes No
Additional STS Capabilities STS Section Implemented STS Compliant
Host-Initiated Register (Create Substrate) 12.1.1 Yes No Yes No
Host-Initiated Remove Substrate Yes No Yes No
Batch Location Object and State Model 11 Yes No Yes No
UpdateSubstrateObject service 12 Yes No Yes No
Substrate Reading Status 9.3 Yes No Yes No
"SubstIDStatus" substrate object attribute 9.5 Yes No Yes No
ProceedWithSubstrate service 12.2 Yes No Yes No
CancelSubstrate service 12.2 Yes No Yes No
Additional Events 14 Yes No Yes No
SEMI E90-0705 © SEMI 1999, 2005 27
RELATED INFORMATION 1
NOTICE: This related information is not an official part of SEMI E90. This related information was approved for
publication by full letter ballot procedures on January 14, 2000.
R1-1 Substrate State Model Implementation
R1-1.1 The Substrate Object State Model defined in ¶9.1 is a generic representation of the substrate object state
model that includes standard transitions for various equipment types.
R1-1.2 Some equipment may not be able to implement all of the transitions defined in this model. For example, the
transition from AT WORK to AT SOURCE (Transition Number 3) represents the case where the substrate returns to
the original (source) location, typically for further processing. If the equipment is unable to implement this return,
then the transition would never occur, and it should be omitted from the implemented state model.
R1-1.3 The state model shall be implemented based on the definition of the state model; however, substates and
transitions that cannot occur for a particular equipment design may be omitted where the model allows.
R1-2 Example of Substrate Object State Model for Simple Equipment
R1-2.1 This section shows an example of Substrate Object State Model for simple equipment. (See Figure R1-1.)
R1-2.2 The equipment transports the substrate only in a forward direction, so that the Substrate Transport Substate
takes straight forward transitions from AT SOURCE to AT WORK and then to AT DESTINATION. For example,
the wirebonder removes leadframes from a magazine and carries them on a transport mechanism but is unable to
return them to the magazine.
R1-2.3 Also, the equipment processes the substrate only in forward steps so that the Substrate Processing Substate
takes straight forward transitions from NEED PROCESSING to IN PROCESS and then to PROCESSING
COMPLETE. The REJECTED state is not applied to this equipment.
SUBSTRATE
IN PROCESS
NEEDS PROCESSING
PROCESSED
C
ABORTED
STOPPED
AT SOURCE
AT WORK
AT DESTINATION
PROCESSING COMPLETE
1
9
7
5
2
10
12
11
SUBSTRATE PROCESSING
SUBSTRATE TRANSPORT
4
Figure R1-1
Substrate State Model for Simple Equipment