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SEMI E116-0705 © SEMI 2002, 2005 10 # PREVIOUS STATE TRIGGER NEW STATE ACTIONS COMMENTS 8 IDLE Material arrives at the EPT Module i and the EP T Module i cannot begin executing a task on the material. [OR] A fault condit…

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SEMI E116-0705 © SEMI 2002, 2005 9
# PREVIOUS
STATE
TRIGGER
NEW STATE ACTIONS COMMENTS
5 BUSY A pause command is
received that pauses the EPT
Module
i
.
[OR]
An abort command is
received that aborts the EPT
Module
i
.
[OR]
A Fault condition occurs
that prevents the EPT
Module
i
from executing its
task.
BLOCKED
EPTStateChange
i
event is
triggered
EPTStateTime
i
is calculated
BlockedReason
i
is set
BlockedReasonText
i
is set
EPTState
i
=BLOCKED
PreviousEPTState
i
=BUSY
TaskName
i
and
TaskType
i
do not
change. The variables
continue to reflect the
information of the task
that is currently blocked
from executing.
6 BLOCKED All fault conditions that
prevented task execution are
cleared and the EPT
Module
i
resumes execution
of its task or starts execution
of a new task.
[OR]
A resume command is
received that enables the
EPT Module
i
to resume its
task.
BUSY
EPTStateChange
i
event is
triggered
EPTStateTime
i
is calculated
EPTState
i
= BUSY
PreviousEPTState
i
=BLOCKED
TaskName
i
is set
TaskType
i
is set
BlockedReason
i
= 0
BlockedReasonText
i
= “Not
Blocked”
7 BLOCKED All fault conditions that
prevented task execution are
cleared.
[AND]
All material is removed
from the EPT Module
i
.
[AND]
EPT Module
i
can begin a
new task.
IDLE
EPTStateChange
i
event is
triggered
EPTStateTime
i
is calculated
EPTState
i
=IDLE
PreviousEPTState
i
=BLOCKED
TaskName
i
= “No Task”
TaskType
i
= 0
PreviousTaskName
i
is set
PrevoiusTaskType
i
is set
BlockedReason
i
= 0
BlockedReasonText
i
= “Not
Blocked”
SEMI E116-0705 © SEMI 2002, 2005 10
# PREVIOUS
STATE
TRIGGER
NEW STATE ACTIONS COMMENTS
8 IDLE Material arrives at the EPT
Module
i
and the EPT
Module
i
cannot begin
executing a task on the
material.
[OR]
A fault condition occurs
which prevents the EPT
Module
i
from starting a new
task.
BLOCKED
EPTStateChange
i
event is
triggered
EPTStateTime
i
is calculated
BlockedReason
i
is set
BlockedReasonText
i
is set
EPTState
i
= BLOCKED
PreviousEPTState
i
= IDLE
9 BLOCKED Fault conditions occur that
prevent the EPT Module
i
from resuming a blocked
task, or starting a new task.
BLOCKED
EPTStateChange
i
event is
triggered
BlockedReason
i
is set
BlockedReasonText
i
is set
EPTStateTime
i
does not
change. Thus when the
module transitions out
of BLOCKED state, the
value of EPTStateTime
i
will reflect the total
time the module was
BLOCKED from
processing.
PreviousEPTState
i
does
not change. Thus,
PreviousEPTState
i
will
continue to reflect the
state of the module
before it was
BLOCKED from
processing.
9.6 EPT State Transition Table for Equipment
9.6.1 This section defines the State Transitions for the Equipment, in terms of its EPT modules.
Table 2 Basic EPT State Transitions — Equipment Level
# PREVIOUS
STATE
TRIGGER
NEW STATE ACTIONS COMMENTS
1 (No state) Equipment initiation
completed (includes
initialization of EPT modules)
IDLE
[OR]
BLOCKED
[OR]
BUSY
EPTStateChange event is
triggered
EPTState = IDLE or
BLOCKED or BUSY
PreviousEPTState =
NoState
EPTStateTime = 0
BlockedReason may be
updated
BlockedReasonText may be
updated
2 IDLE At least one EPT module
transitions to the BUSY state
with task type of 1..5.
BUSY
EPTStateChange event is
triggered
EPTStateTime is calculated
EPTState = BUSY
PreviousEPTState
= IDLE
SEMI E116-0705 © SEMI 2002, 2005 11
# PREVIOUS
STATE
TRIGGER
NEW STATE ACTIONS COMMENTS
3 BUSY All EPT modules that were
BUSY with task type of 1..5
transition either to IDLE or to
BUSY with task type other
than 1..5.
IDLE
EPTStateChange event is
triggered
EPTStateTime is calculated
EPTState = IDLE
PreviousEPTState
=
BUSY
4 BUSY Any EPT module transitions to
BUSY state with task type 1..5.
BUSY
5 BUSY {
At least one EPT module
transitions to a BLOCKED
state and prevents another EPT
module from starting a new
task or completing an existing
task
[AND]
There are no other EPT
modules BUSY with task type
1..5.
} [OR] {
Any EPT module that was
BUSY with task type 1..5
transitions to either IDLE or
BUSY with task type other
than 1..5.
[AND]
There is at least one EPT
module in BLOCKED state
that is preventing another EPT
module from starting a new
task or completing an existing
task.
}
BLOCKED
EPTStateChange event is
triggered
EPTStateTime is calculated
EPTState = BLOCKED
PreviousEPTState
=
BUSY
BlockedReason is set
BlockedReasonText is set
6 BLOCKED At least one EPT module
transitions to BUSY with task
type of 1..5.
BUSY
EPTStateChange event is
triggered
EPTStateTime is calculated
EPTState = BUSY
PreviousEPTState
=
BLOCKED