semi合集-English.pdf - 第148页

SEMI E19.4-0998 E © SEMI 1992, 2003 4 Feature Dimension L abel Metric English D5 6.35 mm ± 0.02 5 mm (0.250 in. diameter ± 0.001 in.) D6 16.26 mm ± 0.2 5 mm (0.640 in. ± 0.010 in.) D7 Full Spherical Radius Full Spherical…

SEMI E19.4-0998

6.2.5.6 A pod hold-down latch is required. The available latch area is specified by dimension B11 in Figure 2. Latch

detail dimensions are specified in Figure 3.

6.2.5.7 The pod latch holes have a dimension of I1 perpendicular to the plane connecting both holes.

6.2.5.8 Positions for latches are identified in Figure 2 by positions 1, 2, 3, and 4. The following options for hold-

down latch positions are defined by this specification:

Option A Positions 1 and 2

Option B Positions 3 and 4

Option C Positions 1, 2, 3, and 4

7 References

The following articles describe the standard mechanical interface concept:

“The Challenge to Control Contamination: A Novel Technique for the IC Process,” The Journal of Environmental

Sciences (May/June 1984), page 23.

“SMIF, A Technology for Wafer Cassette Transfer in VLSI Manufacturing,” Solid State Technology (July 1984),

page 111.

The complete specification for this interface includes all general requirements of SEMI E19.

Table 1 Port Dimensions for 200 mm (8 inch) Wafer Cassette

Feature Dimension Label Metric English

Port Door A1 135.84 mm ± 0.13 mm (5.348 in. ± 0.005 in.)

A2 131.06 mm ± 0.13 mm (5.160 in. ± 0.005 in.)

A3 13.08 mm ± 0.25 mm (0.515 in. radius ± 0.010 in.)

A4 0.38 mm ± 0.13 mm (0.015 in. ± 0.005 in.)

Guide Rails B1 146.48 mm ± 0.13 mm (5.767 in. ± 0.005 in.)

B2 141.71 mm ± 0.13 mm (5.579 in. ± 0.005 in.)

B5 29.97 mm maximum (1.18 in. maximum)

B7 16 mm minimum (0.630 in. minimum)

B8 45° maximum (45° maximum)

B9 22.22 mm radius maximum (0.875 in. radius maximum)

B10

B11 50.8 mm maximum (2.00 in. maximum)

B12 26.9 mm minimum (1.06 in. minimum)

Latch Pins C1 16° ± 0° 30' (16° ± 0° 30' )

C2 86° ± 0° 30' (86° ± 0° 30' )

C3 26.72 mm ± 0.05 mm (1.052 in. diameter ± 0.002 in.)

C4 3.175 mm ± 0.025 mm (0.125 in. diameter ± 0.001 in.)

C6 9.14 mm ± 0.25 mm (0.360 in. ± 0.010 in.)

C7 Full Spherical Radius Full Spherical Radius

Registration Pins D1 183.39 mm ± 0.25 mm (7.22 in. ± 0.010 in.)

D2 91.69 mm ± 0.13 mm (3.610 in. ± 0.005 in.)

D3 231.78 mm ± 0.25 mm (9.125 in. ± 0.010 in.)

D4 116.59 mm ± 0.13 mm (4.590 in. ± 0.005 in.)

SEMI E19.4-0998

Feature Dimension Label Metric English

D5 6.35 mm ± 0.025 mm (0.250 in. diameter ± 0.001 in.)

D6 16.26 mm ± 0.25 mm (0.640 in. ± 0.010 in.)

D7 Full Spherical Radius Full Spherical Radius

Latch Pin F1 0.8 Nm minimum (7 in. lbf. minimum)

Force (Torque) 1.7 Nm maximum (15 in. lbf. maximum)

Position of Cassette G1 20.70 mm ± 0.25 mm (0.815 in. ± 0.010 in.)

G2 H-Bar Centered ± 0.51 mm (H-Bar Centered ± 0.020 in.)

Pod Latch Holes I1 3.4 mm ± 0.1 mm (0.135 in. ± 0.004 in.)

Figure 1

Port Terminology

SEMI E19.4-0998

Figure 2

Port Dimensions