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SEMI E130-1104 © SEMI 2003, 2004 22 22.3.5 INSPEC T-INK-MARKS — This command causes the ink m arks to be inspected. The Process model transitions to the SERVICE TASK state. Whe n the inspection task is com p leted, the c…

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SEMI E130-1104 © SEMI 2003, 2004 21
must be identified with a name. If The Process State model was in the AWAITING COMMAND state when the
CLEAN-PROBES command was issued, and the cleaning task requires the substrate to be removed from the chuck,
the Process State model will transition to the SERVICE TASK state the substrate will be suspended. When the
cleaning task is completed, a suspended substrate must be restored to the chuck and the chuck will be returned to the
pre-task coordinates prior to the transition from SERVICE TASK to AWAITING COMMAND.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “CLEAN-PROBES”
Cleaning Process C - Text The name of the cleaning process that is to be performed.
If there is only one cleaning process defined, this
parameter may be omitted.
Die List M - List of type
DieCoordinate,
see Data Types
and Sizes.
List of probe sites to be cleaned. Zero length list indicates
that all sites should be cleaned.
Ack - M Integer Service Acknowledgement.
22.3.2 INDEX — This command is used in conjunction with Control Maps. The USE CONTROL MAP recipe
attribute must be set to TRUE. The INDEX command causes the prober to move the chuck to the next unprocessed
site contained in the control map.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “INDEX”
Ack - M Integer Service Acknowledgement.
22.3.3 INK-DEVICE — This command causes the current die location to be inked.
22.3.3.1 The Process State model transitions to the SERVICE TASK state. When the task is completed, the Process
State model transitions from the SERVICE TASK to AWAITING COMMAND state.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “INK-DEVICE”
Ack - M Integer Service Acknowledgement.
22.3.4 INK-DIE — This command causes the die locations contained in the die-list to be inked. Optionally, the
host can specify a control map containing the sites to be inked.
22.3.4.1 The Process State model transitions to the SERVICE TASK state. When the task is completed, the chuck
is returned to the pre-task coordinates and the Process State model transitions from the SERVICE TASK to
AWAITING COMMAND state.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “INK-DIE”
Die List C - List of type
DieCoordinate,
see Data Types
and Sizes.
List of die sites to be inked.
Control Map C - Text Control Map Identifier
Either Die List or Control
Map must be supplied.
Ack - M Integer Service Acknowledgement.
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22.3.5 INSPECT-INK-MARKS — This command causes the ink marks to be inspected. The Process model
transitions to the SERVICE TASK state. When the inspection task is completed, the chuck is returned to the pre-
task coordinates and the Process State model transitions from the SERVICE TASK to AWAITING COMMAND
state.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “INSPECT-INK-MARKS”
Die List C List of type
DieCoordinate,
see Data Types
and Sizes.
If this parameter is present, inspect the site listed. Otherwise,
inspect the current site.
Ack - M Integer Service Acknowledgement.
22.3.6 INSPECT-PTP-ALIGN — This command causes the probe to pad alignment to be inspected. The Process
State model transitions to the SERVICE TASK state. When the inspection task is completed, the chuck is returned
to the pre-task coordinates and the Process State model transitions from the SERVICE TASK to AWAITING
COMMAND state.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “INSPECT-PTP-ALIGN”
Ack - M Integer Service Acknowledgement.
22.3.7 INSPECT-PROBES — This command causes the probes to be inspected. Support for selective probe site
inspection is not a fundamental requirement. When this capability exists, the supplier must document the format of
the probe site list. If the Process State model is in the AWAITING COMMAND state, the Process State model
transitions to the SERVICE TASK state. When the inspection task is completed, the chuck is returned to the pre-
task coordinates and the Process State model transitions from the SERVICE TASK to AWAITING COMMAND
state.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “INSPECT-PROBES”
Probe Site List M C Supplier
defined
List of probe sites to be inspected. Zero length list indicates
that all probes to inspected.
Ack - M Integer Service Acknowledgement.
22.3.8 LOAD-SUBSTRATE — This command causes the next substrate identified in the Process Job to be loaded
onto the chuck. The prober must perform all the pre-conditioning requirements for probing to begin. The transition
from HANDLING MATERIAL to AWAITING COMMAND indicates that probing can commence. If the probe is
unable to perform the necessary steps to prepare the substrate for probing, the prober will send an alarm and
transition to the PROCESSING BLOCKED state.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “LOAD SUBSTRATE”
Ack - M Integer Service Acknowledgement.
SEMI E130-1104 © SEMI 2003, 2004 23
22.3.9 LOAD-TEST-SUBST — This command causes a test substrate from the specified substrate location to be
loaded onto the chuck.
22.3.9.1 A substrate occupying the chuck is suspended. When the host issues the UNLOAD-TEST-SUBST
command, a suspended substrate is automatically resumed.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “LOAD-TEST-SUBST”
SubstLocID M Text Substrate Location containing the test substrate.
Ack - M Integer Service Acknowledgement.
22.3.10 LOCKOUT-CONTROL — This command is used to enable and disable the equipment console during
remote operations. Passing a value of Lockout=TRUE disables the equipment console and requires the user to
switch the control state to ONLINE LOCAL to regain console control.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “LOCKOUT-CONTROL”
Lockout M C Boolean True = Lockout console control. User must switch to
ONLINE-LOCAL mode to regain control.
Ack - M Integer Service Acknowledgement.
22.3.11 MOVE — This commande is used to perform a relative move operation. At least one of the optional
parameters: X, Y, or Z must be included with this command. An omitted X, Y, or Z is equivalent to specifying zero.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “MOVE”
X C - Integer
Y C - Integer
Z C - Integer
Relative step value. At least one parameter must be included.
Ack - M Integer Service Acknowledgement.
22.3.12 MOVE-ABS — This command is used to perform an absolute move. At least one of the optional
parameters: X, Y, or Z must be included with this command. An omitted X, Y, or Z is equivalent to specifying the
current value, resulting in no net movement in that direction.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “MOVE-ABS”
X C - Integer
Y C - Integer
Z C - Integer
Absolute index. At least one parameter must be included.
Ack - M Integer Service Acknowledgement.