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SEMI D34-0703 © SEMI 2003 5 RELATED INFORMATION 1 MEASUREMENT METHOD FOR OPTICAL CHAR ACTERI STICS OF POLARIZING FILMS USING CR YSTAL ROTATION METHOD NOTICE : Thi s related information i s not an official part of SEMI D3…
SEMI D34-0703 © SEMI 2003 4
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
SEMI D34-0703 © SEMI 2003 5
RELATED INFORMATION 1
MEASUREMENT METHOD FOR OPTICAL CHARACTERISTICS OF
POLARIZING FILMS USING CRYSTAL ROTATION METHOD
NOTICE: This related information is not an official part of SEMI D34 and was derived from Otsuka Electronics
Co., Ltd. This related information was approved for publication by full letter ballot procedures.
R1-1 Outline
R1-1.1 This method is not to use two polarizing film in normal, but to use polarizing prism and one polarizing film,
which can be used for measurement of Single transmittance (Ty), Parallel transmittance (T
//
), Cross transmittance
(T
⊥
), Transmittance of each wavelength, UV cut performance, Polarizing Efficiency (Py) and Hue a, b.
R1-1.2 Equipments are shown below. Measurement condition is same as standard method.
R1-2 Measurement Equipment
Light Source Lens Polarizing prism Polarizing film Spectrophotometer
R1-3 Formula
R1-3.1 K
A
(λ) is measured on condition of polarizing prism and polarizing film placed perpendicularly and K
B
(λ) is
measured on condition of polarizing prism and polarizing film placed parallel, where K
A
(λ) is transmittance light on
the absorption axis and K
B
(λ) is transmittance light on the transmittance axis.
K
A
(λ) = S
//
(λ) / R
//
(λ)
K
B
(λ) =S
⊥
(λ) / R
⊥
(λ)
S
//
(λ): Light intensity of transmittance on condition of polarizing film and polarizing prism placed parallel with
polarizing film.
R
//
(λ): Light intensity of transmittance without polarizing film on same condition of S
//
(λ).
S
⊥
(λ): Light intensity of transmittance on condition of polarizing film and polarizing prism placed perpendicularly
with polarizing film.
R
⊥
(λ): Light intensity of transmittance without polarizing film on same condition of S
⊥
(λ).
R1-3.2 Definition for Single Transmittance (Ty)
Single transmittance light Ts(λ):
Single transmittance Ty: Value of Ts(λ) visibility corrected (JIS Z8701).
2
)(K)(K
)(
BA
λλ
λ
+
=Ts
SEMI D34-0703 © SEMI 2003 6
R1-3.3 Definition for Parallel Transmittance (T
//
)
Parallel transmittance light Tp (λ):
2
)(K)(K
)(
2
B
2
A
λλ
λ
+
=Tp
Parallel transmittance T
//
: Value of Tp (λ) visibility
corrected (JIS Z8701).
R1-3.4 Definition of Cross Transmittance (T
⊥
)
Cross transmittance light Tc (λ): Tc (λ) = K
A
(λ) × K
B
(λ)
Cross transmittance T
⊥
:
Value of Tc (λ) visibility
corrected (JIS Z8701).
R1-3.5 Definition for Transmittance of Each
Wavelength
Value of Single Transmittance Ts (λ) at the wavelength
of 440 nm, 550 nm and 610 nm.
R1-3.6 UV Cut Performance
Value of Single Transmittance Ts (λ) at the wavelength
of 380 nm.
R1-3.7 Definition for Polarizing Efficiency (Py)
R1-3.7.1 Value calculated from following formula
same as standard method, where the value of
transmittance light K
A
(λ) (visibility corrected) on the
absorption axis is transmittance T
A
on the absorption
axis, and transmittance light K
B
(λ) (visibility corrected)
on the transmittance axis is transmittance T
B
on the
transmittance axis.
(%) 100×
+
−
=
AB
AB
TT
TT
Py
R1-3.7.2 Same as the standard method, Py is calculated
from the Parallel transmittance (T
//
) and Cross
transmittance (T
⊥
) using the latter formula which is
equivalent with the former formula.
(%) 100
//
//
×
+
−
=
⊥
⊥
TT
TT
Py
R1-3.8 Definition for Hue a. b.
R1-3.8.1 Value calculated from below formulas same
as standard method using the tristimulus values (X, Y,
Z) obtained from Single spectra-transmittance Ts (λ)
visibility corrected (JIS Z8701) by light source C at 2°
range of view.
Y
YX
a
)02.1(5.17 −
=
Y
ZY
b
)847.0(0.7
−
=
R1-4 Related Documents
The Kogyo Zairyo Vol. 28 –7 P.37~P.45
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
standards are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
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