semi合集-English.pdf - 第5522页

SEMI P10-0705 © SEMI 1990, 2005 17 [ <vendor_info>] [< billing_information >] [< materials_used >] {MFG_SITE_REQD} [MFG_SITE_USED] [PRODUCT_TYPE] [PROD UCT_MAGNIFICATION] [MASK_NAME] { TITLE_TEXT [TITLE…

SEMI P10-0705 © SEMI 1990, 2005 16

[SHIP_SURF_INSP_PELL_BOTTOM_MAP [<ship_to>] ]

[SHIP_SURF_INSP_GLASS_SIDE_MAP [<

ship_to>] ]

[SHIP_SURF_INSP_PATTERN_SIDE_MAP [<

ship_to>] ]

[SHIP_STARLIGHT_MAP [<

ship_to>] ]

[

SHIP_PHASE_SHIFT_MEASUREMENTS [<ship_to>] ]

[SHIP_PHASE_SHIFT_REPORT [<

ship_to>] ]

[SHIP_SEM_PHOTOS [<

ship_to>] ]

{<ship_plot>}

[SHIP_BARCODE_PLOT [<ship_to>] ]

films>}

[SHIP_CERTIFICATE_OF_CONFORMANCE [<

ship_to>] ]

{SHIP_CUSTOMER_QUALITY_FORM [<

ship_to>] }

[SHIP_TRAVELER [<

ship_to>] ]

[PERCENT_CLEAR_REQUESTED [<

ship_to>] ]

{SHIP_SPECIAL_REQUEST [<

ship_to>] }

END_SHIPPABLE_DATA

<ship_to> = START_SHIP_TO

{EMAIL_ADDRESS} [<

ftp_address>] [WEB_ADDRESS]

{MAILING_ADDRESS} [SHIP_TO_FAX]

[DUE_DATE_TIME_REQUESTED]

END_SHIP_TO

<ftp_address> = FTP_HOST_NAME [FTP_LOGIN] [FTP_PASSWORD] [FTP_DIRECTORY]

[FTP_MODE] END_FTP_HOST

7.5 Mask Results Data Structure Syntax  The following syntax definition uses the upper case keyword to

represent the permissible applications of the corresponding data record within the mask results data structure. This

structure allows the vendor to deliver to the customer actual data regarding masks being built.

<mask_results> = START_MASK_RESULTS SEMI_REVISION CUSTOMER VENDOR

FILE_DATE_TIME [OPERATOR_NAME]

MASK_SET_ID [<vendor_info>]

ORDER_ID MASK_SET_NAME MASK_SET_VERSION

{MASK_GROUP_ID [<vendor_info>]

{MASK_ID <mask_results_options> END_MASK}

END_MASK_GROUP}

END_MASK_SET

END_MASK_RESULTS

CHECKSUM

<mask_results_options>

= START_MASK_RESULTS_OPTIONS

[STATUS]

SEMI P10-0705 © SEMI 1990, 2005 17

[<vendor_info>]

billing_information>]

materials_used >]

{MFG_SITE_REQD} [MFG_SITE_USED]

[PRODUCT_TYPE] [PRODUCT_MAGNIFICATION]

[MASK_NAME]

{ TITLE_TEXT [TITLE_TYPE] }

[DUE_DATE_TIME_COMMITTED] [ELAPSED_TIME_COMMITTED]

[MILESTONE [ADDITIONAL_MILESTONE_INFO] ]

[PERIODIC_UPDATE [ADDITIONAL_MILESTONE_INFO] ]

[ESTIMATED_ARRIVAL [ADDITIONAL_MILESTONE_INFO] ]

[MASK_SHIPPED_DATE_TIME]

[FINAL_AUDIT_DATE_TIME]

[DESIGN_RULE]

[<wafer_exposure_data> <aerial_image_data>]

[FAB_TECHNOLOGY] [WAFER_FAB]

[JOB_ONLY_APPROVED] [JOB_WITH_PATTERNS_APPROVED]

{PATTERN_APPROVED} [ALL_PATTERNS_APPROVED]

[APPROVAL_GRANTED]

[MIRROR_MASK] [MASK_ROTATION]

[CUSTOMER_SPEC CUSTOMER_SPEC_REVISION]

{WAIVER} {WAIVER_OVERRIDE}

{ [BARCODE_TYPE] BARCODE_TEXT BARCODE_ROTATION }

[SHIPPING_METHOD_USED]

[MEASURED_PERCENT_CLEAR]

[CENTRALITY] [MEASURED_CENTRALITY]

litho_information>}

pattern_group_results>}

phase_shift_measurements>]

{<registr_measurements>}

closure_measurements>}

cd_group_measurements>}

cd_set_results>}

cd_xy_results>}

cd_iso_dense_results>}

{<defect_measurements>}

[THROUGH_PELLICLE_DEFECTS {<defect_measurements>} ]

{<surface_insp_measurements>}

[QUALITY_GROUP_ID]

SEMI P10-0705 © SEMI 1990, 2005 18

[FINAL_QC_AUDITOR]

{

ADDITIONAL_RESULTS_INFO}

END_MASK_RESULTS_OPTIONS

<vendor_info> = START_VENDOR_INFO

[VENDOR_CONTACT] [VENDOR_PHONE] {VENDOR_ADDRESS}

[VENDOR_FAX] [VENDOR_EMAIL]

[

FINAL_QC_AUDITOR]

[VENDOR_ORDER_ID]

END_VENDOR_INFO

<billing_information> = START_BILLING_INFORMATION

[

BLANKET_PO_NUMBER] [PO_NUMBER] [SO_NUMBER] [RELEASE_NUMBER]

END_BILLING_INFORMATION

<materials_used> = START_MATERIALS_USED

[TOP_PELLICLE_USED] [

BOTTOM_PELLICLE_USED]

[PACKAGE_USED]

substrate>] END_MATERIALS_USED

<substrate> = START_SUBSTRATE

BLANK_LENGTH [BLANK_WIDTH] BLANK_THICKNESS

BLANK_TYPE [BLANK_GRADE]

[

BLANK_FLATNESS] [BLANK_FLATNESS_USED] [BLANK_VENDOR]

[BLANK_BIREFRINGENCE_REQD] [BLANK_BIREFRINGENCE_USED]

{<coating>}

[

BLANK_INDEX_OF_REFRACTION]

[

BLANK_LOT] [BLANK_DATE_OF_MFG]

euv_blank_type>] END_SUBSTRATE

<coating> = START_COATING

COATING_TYPE [COATING_COMPOSITION] [COATING_THICKNESS]

[COATING_REFLECTANCE] [COATING_TRANSMITTANCE]

[COATING_WAVELENGTH] [COATING_GRADE]

[COATING_PHASE] [COATING_OPTICAL_DENSITY]

[COATING_LOT_NUMBER] [COATING_DATE_TIME]

[COATING_MASK_VENDOR_APPLIED] [COATING_EQUIP_USED]

END_COATING

<euv_blank_type> = START_EUV_BLANK_TYPE

EUV_BLANK_TYPE

EUV_FLATNESS_FRONT

EUV_FLATNESS_BACK

EUV_MULTILAYER_COMPOSITION

EUV_CAPPING_COMPOSITION