semi合集-English.pdf - 第3147页

SEMI E125.1-0305 © SEMI 2005 1 SEMI E125.1-0305 PROVISIONAL SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT SELF DESCRIPTION (EqSD) This provisional specification w as technically approved by the Global Informat ion and Con…

100%1 / 7923
SEMI E125-0305 © SEMI 2003, 2005 54
R8-1.2.38 subclass — in a generalization relationship, the specialization of another class; the superclass. See:
generalization. Contrast: superclass.
R8-1.2.39 subtype — in a generalization relationship, the specialization of another type; the supertype. See:
generalization. Contrast: supertype.
R8-1.2.40 superclass — in a generalization relationship, the generalization of another class; the subclass. See:
generalization. Contrast: subclass.
R8-1.2.41 supertype — in a generalization relationship, the generalization of another type; the subtype. See:
generalization. Contrast: subtype.
R8-1.2.42 type — a stereotyped class that specifies a domain of objects together with the operations applicable to
the objects, without defining the physical implementation of those objects. A type may not contain any methods,
maintain its own thread of control, or be nested. However, it may have attributes and associations. Although an
object may have at most one implementation class, it may conform to multiple different types. See: implementation
class. Contrast: interface.
R8-1.2.43 visibility — an enumeration whose value (public, protected, or private) denotes how the model element
to which it refers may be seen outside its enclosing namespace.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E125.1-0305 © SEMI 2005 1
SEMI E125.1-0305
PROVISIONAL SPECIFICATION FOR SOAP BINDING FOR
EQUIPMENT SELF DESCRIPTION (EqSD)
This provisional specification was technically approved by the Global Information and Control Committee
and is the direct responsibility of the North American Information and Control Committee. Current edition
approved by the North American Regional Standards Committee on December 10, 2005. Initially available
at www.semi.org February 2005; to be published March 2005.
Table of Contents
1 Purpose....................................................................................................................................................................4
1.1 SOAP Implementation Mapping.......................................................................................................................4
2 Scope.......................................................................................................................................................................4
2.1 Specification Scope...........................................................................................................................................4
3 Limitations..............................................................................................................................................................4
3.1 Provisional Specification..................................................................................................................................4
4 Referenced Standards..............................................................................................................................................4
4.1 SEMI Standards................................................................................................................................................4
4.2 OMG Standards................................................................................................................................................4
4.3 W3C Standards.................................................................................................................................................4
4.4 Other Specifications .........................................................................................................................................5
5 Terminology............................................................................................................................................................5
5.1 Abbreviations and Acronyms............................................................................................................................5
5.2 Definitions ........................................................................................................................................................5
6 Conventions ............................................................................................................................................................5
6.1 Translating UML to XML Schema....................................................................................................................5
6.2 Documenting XML Schema and WSDL Files...................................................................................................6
6.3 Documenting XML Schema with Diagrams......................................................................................................7
6.4 XML Schema Sample........................................................................................................................................7
6.5 Translating UML to WSDL...............................................................................................................................9
7 Mapping of SEMI E125 UML to XML Schema and WSDL..................................................................................9
7.1 WSDL Organization .........................................................................................................................................9
7.2 EquipmentMetadataManager.........................................................................................................................10
7.3 MetadataClient...............................................................................................................................................42
List of Figures
Figure 1 XML Schema Example Diagram ....................................................................................................................8
Figure 2 XML for Sample .............................................................................................................................................8
Figure 3 XML Schema and WSDL File Organization ................................................................................................10
Figure 4 WSDL and XML Schema Files for SEMI E125...........................................................................................10
Figure 5 Mapping the EquipmentMetadataManager to a WSDL portType.................................................................12
Figure 6 GetUnitsRequest Global Element .................................................................................................................13
Figure 7 GetUnitsResponse Global Element...............................................................................................................13
Figure 8 GetTypeDefinitionsRequest Global Element................................................................................................15
Figure 9 GetTypeDefinitionsResponse Global Element..............................................................................................15
Figure 10 ParameterTypeDefinitionType Global complexType .................................................................................16
Figure 11 VariableTypeType Global complexType....................................................................................................20
Figure 12 ArrayTypeType Global complexType ........................................................................................................21
Figure 13 StructureTypeType Global complexType ...................................................................................................22
Figure 14 EnumeratedTypeType Global complexType...............................................................................................23
Figure 15 GetStateMachinesRequest Global Element.................................................................................................24
Figure 16 GetStateMachinesResponse Global Element ..............................................................................................25
Figure 17 StateMachineType Global complexType....................................................................................................25
Figure 18 GetSEMIObjTypesRequest Global Element...............................................................................................28
Figure 19 GetSEMIObjTypesResponse Global Element.............................................................................................28
SEMI E125.1-0305 © SEMI 2005 2
Figure 20 StateMachineInstanceType Global complexType.......................................................................................29
Figure 21 GetExceptionsRequest Global Element ......................................................................................................31
Figure 22 GetExceptionsResponse Global Element....................................................................................................32
Figure 23 GetEquipmentStructureRequest Global Element........................................................................................33
Figure 24 GetEquipmentStructureResponse Global Element......................................................................................33
Figure 25 GetEquipmentNodeDescriptionsRequest Global Element ..........................................................................35
Figure 26 GetEquipmentNodeDescriptionsResponse Global Element........................................................................35
Figure 27 EquipmentNodeDescriptionType Global complexType .............................................................................36
Figure 28 ParameterType Global complexType..........................................................................................................37
Figure 29 GetLatestRevisionRequest ..........................................................................................................................40
Figure 30 GetLatestRevisionResponse Global Element..............................................................................................40
Figure 31 NotifyOnRevisionsRequest Global Element...............................................................................................41
Figure 32 NotifyOnRevisionsResponse Global Element.............................................................................................42
Figure 33 MetadataRevisedNotification Global Element............................................................................................44
List of Tables
Table 1 Example Translation Table...............................................................................................................................6
Table 2 Example Translation Table for Operation Input/Output Arguments ................................................................6
Table 3 Example Schema/WSDL Document Description Table...................................................................................6
Table 4 Altova XMLSPY Schema Diagram Symbols...................................................................................................7
Table 5 Example Interface WSDL Port Type Table......................................................................................................9
Table 6 Example Interface WSDL Binding Table.........................................................................................................9
Table 7 Example Operation Binding Table ...................................................................................................................9
Table 8 Example PortType Operation Table .................................................................................................................9
Table 9 XML Schema..................................................................................................................................................11
Table 10 EquipmentMetadataManager PortType Definitions.....................................................................................11
Table 11 EquipmentMetadataManager Binding Definitions.......................................................................................11
Table 12 EquipmentMetadataManager Port Type.......................................................................................................12
Table 13 EquipmentMetadataManager Binding..........................................................................................................12
Table 14 GetUnits Operation Binding.........................................................................................................................13
Table 15 GetUnits PortType Operation.......................................................................................................................13
Table 16 EquipmentMetadataManager Binding..........................................................................................................13
Table 17 Translation Table for Output Arguments for the GetUnits Operation..........................................................14
Table 18 E125 Unit UnitType Translation Table ...................................................................................................14
Table 19 GetTypeDefinitions Operation Binding........................................................................................................14
Table 20 GetUnits PortType Operation.......................................................................................................................14
Table 21 EquipmentMetadataManager Binding..........................................................................................................15
Table 22 Translation Table for Output Arguments for the GetUnits Operation..........................................................15
Table 23 SEMI E125 ParameterTypeDefinition ParameterTypeDefinitionType Translation Table......................16
Table 24 SEMI E125 Type Description Mapping Table .............................................................................................17
Table 25 SECS-II Type Description Mapping Table...................................................................................................17
Table 26 E125 StringType StringTypeType Translation Table..............................................................................18
Table 27 SEMI E125 BinaryType Base64BinaryTypeType Translation Table .....................................................18
Table 28 SEMI E125 IntegerType
ByteTypeType Translation Table....................................................................18
Table 29 SEMI E125 UnitConfig UnitConfigArrayType Translation Table..........................................................18
Table 30 SEMI E125 IntegerType ShortTypeType Translation Table...................................................................19
Table 31 SEMI E125 IntegerType IntTypeType Translation Table .......................................................................19
Table 32 E125 IntegerType LongTypeType Translation Table..............................................................................19
Table 33 SEMI E125 RealType FloatTypeType Translation Table .......................................................................20
Table 34 E125 RealType DoubleTypeType Translation Table ..............................................................................20
Table 35 SEMI E125 ArrayType ArrayTypeType Translation Table ....................................................................21
Table 36 SEMI E125 StructureType StructureTypeType Translation Table..........................................................23
Table 37 SEMI E125 Field FieldType Translation Table.......................................................................................23
Table 38 SEMI E125 EnumerationType EnumerationTypeType Translation Table..............................................23
Table 39 SEMI E125 EnumeratedString EnumeratedStringType Translation Table .............................................24