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SEMI PR8-0703 © SEMI 2003 50 </xs:sequence> </xs:complexType> <xs:complexType name="OneOrMoreParamsType"> <xs:sequence> <xs:element name="Param" type="eda:ParamType&quo…

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SEMI PR8-0703 © SEMI 2003 49
<xs:choice>
<xs:element name="StringVal"
type="eda:StringValueType"/>
<xs:element name="StringArrayVal"
type="eda:StringArrayValueType"/>
<xs:element name="DateTimeVal"
type="eda:DateTimeValueType"/>
<xs:element name="DateTimeArrayVal"
type="eda:DateTimeArrayValueType"/>
<xs:element name="AnyURIVal"
type="eda:AnyURIValueType"/>
<xs:element name="BoolVal"
type="eda:BooleanValueType"/>
<xs:element name="BoolArrayVal"
type="eda:BooleanArrayValueType"/>
<xs:element name="Base64BinaryVal"
type="eda:Base64BinaryValueType"/>
<xs:element name="IntVal"
type="eda:IntegerValueType"/>
<xs:element name="IntArrayVal"
type="eda:IntegerArrayValueType"/>
<xs:element name="FloatVal"
type="eda:FloatValueType"/>
<xs:element name="FloatArrayVal"
type="eda:FloatArrayValueType"/>
<xs:element name="DoubleVal"
type="eda:DoubleValueType"/>
<xs:element name="DoubleArrayVal"
type="eda:DoubleArrayValueType"/>
</xs:choice>
</xs:group>
<xs:complexType name="StructureValueType">
<xs:choice>
<xs:group ref="eda:StructureTypeSelectionGroup"
maxOccurs="unbounded" minOccurs="1"/>
</xs:choice>
</xs:complexType>
<xs:complexType name="ParamValueType">
<xs:group ref="eda:TypeSelectionGroup"
maxOccurs="unbounded" minOccurs="1"/>
</xs:complexType>
<xs:complexType name="ParamType">
<xs:sequence>
<xs:element name="Locator" type="xs:string"
minOccurs="0"/>
<xs:element name="Name" type="xs:string"/>
<xs:element name="Value"
type="eda:ParamValueType"/>
<xs:element name="MeasTime" type="xs:dateTime"
minOccurs="0"/>
<xs:element name="Extension"
type="eda:ExtensionsType" minOccurs="0"/>
</xs:sequence>
</xs:complexType>
<xs:complexType name="ExtensionsType">
<xs:sequence>
<xs:any namespace="##other"/>
SEMI PR8-0703 © SEMI 2003 50
</xs:sequence>
</xs:complexType>
<xs:complexType name="OneOrMoreParamsType">
<xs:sequence>
<xs:element name="Param" type="eda:ParamType"
maxOccurs="unbounded"/>
</xs:sequence>
</xs:complexType>
<xs:complexType name="EquipmentIdType">
<xs:sequence>
<xs:element name="Supplier" type="xs:string"/>
<xs:element name="Model" type="xs:string"/>
<xs:element name="ImmutableID"
type="xs:string"/>
</xs:sequence>
</xs:complexType>
<xs:complexType name="EventType">
<xs:sequence>
<xs:element name="EventTime"
type="xs:dateTime"/>
<xs:element name="Locator" type="xs:string"/>
<xs:element name="EventID" type="xs:string"/>
<xs:element name="Context"
type="eda:OneOrMoreParamsType" minOccurs="0"/>
<xs:element name="Data"
type="eda:OneOrMoreParamsType"/>
<xs:element name="Extension"
type="eda:ExtensionsType" minOccurs="0"/>
</xs:sequence>
</xs:complexType>
<xs:complexType name="ExceptionType">
<xs:sequence>
<xs:element name="ExTime" type="xs:dateTime"/>
<xs:element name="Locator" type="xs:string"/>
<xs:element name="ErrorCode" type="xs:string"/>
<xs:element name="ExType" type="xs:string"/>
<xs:element name="ExState" type="xs:string"/>
<xs:element name="ExDesc" type="xs:string"/>
<xs:element name="Severity" type="xs:string"
minOccurs="0"/>
<xs:element name="Data"
type="eda:OneOrMoreParamsType" minOccurs="0"/>
<xs:element name="Extension"
type="eda:ExtensionsType" minOccurs="0"/>
</xs:sequence>
</xs:complexType>
<xs:complexType name="ErrorType">
<xs:sequence>
<xs:element name="ErrorTime"
type="xs:dateTime"/>
<xs:element name="ErrorType" type="xs:string"/>
<xs:element name="ErrorCode" type="xs:string"/>
<xs:element name="ErrorDesc" type="xs:string"/>
<xs:element name="Extension"
type="eda:ExtensionsType" minOccurs="0"/>
</xs:sequence>
</xs:complexType>
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<xs:complexType name="MessageHeaderType">
<xs:sequence>
<xs:element name="To" type="xs:anyURI"/>
<xs:element name="From" type="xs:anyURI"/>
<xs:element name="CorrelationId"
type="xs:string" minOccurs="0"/>
</xs:sequence>
</xs:complexType>
<xs:element name="MessageHeader"
type="eda:MessageHeaderType" />
<xs:element name="EquipmentID" type="eda:EquipmentIdType"/>
<xs:element name="EdaData">
<xs:complexType>
<xs:sequence>
<xs:element ref="eda:EquipmentID"/>
<xs:choice maxOccurs="unbounded"
minOccurs="1">
<xs:element name="Event"
type="eda:EventType"/>
<xs:element name="ExEvent"
type="eda:ExceptionType"/>
</xs:choice>
</xs:sequence>
</xs:complexType>
</xs:element>
<xs:element name="EdaError">
<xs:complexType>
<xs:sequence>
<xs:element name="EquipmentID"
type="eda:EquipmentIdType"/>
<xs:element name="Error"
type="eda:ErrorType"/>
</xs:sequence>
</xs:complexType>
</xs:element>
<xs:element name="EdaEnabled">
<xs:complexType>
<xs:sequence>
<xs:element ref="eda:EquipmentID"/>
</xs:sequence>
</xs:complexType>
</xs:element>
<xs:element name="EdaDisabled">
<xs:complexType>
<xs:sequence>
<xs:element ref="eda:EquipmentID"/>
</xs:sequence>
</xs:complexType>
</xs:element>
<xs:element name="IsEdaEnabled">
<xs:complexType>
<xs:sequence>
<xs:element ref="eda:EquipmentID"/>
</xs:sequence>
</xs:complexType>
</xs:element>
<xs:element name="IsEdaEnabledResponse">