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SEMI E87-0705 © SEMI 1999, 2005 15 10.7.2 Carrier State Model Di agram CARRIER 1 21 CARRIER SLOT MAP STATUS SLOT MAP NOT READ WA IT ING F OR HOST SLOT MAP VERIF ICA T ION OK SLOT MAP VERIF ICA T ION FAIL 12 13 14 15 16 C…

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10.4 Carrier Location Naming
10.4.1 Carrier locations shall be assigned a unique name. Information about the carrier location can be ob-tained by
querying the CarrierObject for the LocationID or by asking the equipment for the CarrierLocation-Matrix. The text
form of the LocationID shall be descriptive of the location. For example, LocationID form for load port load/unload
location might be “LPn”, where “n” equal is equal to the load port number (the load port number is determined
through the numbering rule in ¶9.1). The LocationID form for the FIMS port location might be “FIMSn”. The
LocationID form for a buffer location might be “BUFn”.
10.5 Load Port Carrier Locations
10.5.1 For fixed buffer equipment configured to handle FOUPs, a Load Port has two different Carrier Locations.
One represents the place where a Carrier is delivered and picked up, while the other represents the place where the
Carrier is docked and can be opened.
10.6 Carriers Between Locations
10.6.1 When the carrier is traveling from one location to another, the location attribute remains equal to the source
location until the carrier movement is complete and the carrier is resting at the new carrier location (the destination
location).
10.6.2 Usage
10.6.2.1 The Usage parameter indicates the type of substrate the carrier contains. All Usage values are equipment
specific values. Some internal buffer equipment manages carriers by establishing logical partitions. This type of
equipment shall use the Usage parameter to determine which logical partition where the carrier is held.
10.6.3 SubstrateCount
10.6.3.1 The SubstrateCount parameter can be sent to the equipment by the host in either the Bind service or the
ProceedWithCarrier service. However the equipment shall update this parameter based on the results of the read slot
map operation. Furthermore, the equipment shall update the parameter based on it’s own actions of adding and
removing a substrate to and from a carrier. If the equipment does not know the value of SubstrateCount prior to
instantiation, the equipment shall instantiate the carrier object with the value of null for SubstrateCount.
10.6.4 Lot information for ContentMap
10.6.4.1 Lot is defined in SEMI E90 as a group of one or more substrates of the same type. It is organized external
to the equipment. The Lot ID is the identifier of this group. If the equipment is informed of the Lot ID to which a
substrate belongs, the equipment must maintain this information.
10.6.5 Carrier Accessing Status
10.6.5.1 The CarrierAccessingStatus is used by the host to know whether or not the carrier owned by the equipment
can be moved out. If the carrier is within the internal buffer equipment, this status may be used by the host to issue
CarrierOut service.
10.7 Carrier State Model
10.7.1 The purpose of the Carrier State Model is to define the host’s view of a carrier. The equipment shall maintain
a separate and independent state model for each carrier in/at the equipment.
SEMI E87-0705 © SEMI 1999, 2005 15
10.7.2 Carrier State Model Diagram
CARRIER
1
21
CARRIER SLOT MAP STATUS
SLOT MAP NOT
READ
WAITING FOR
HOST
SLOT MAP
VERIFICATION
OK
SLOT MAP
VERIFICATION
FAIL
12
13
14
15 16
C
CARRIER ID STATUS
ID NOT READ
WAITING FOR
HOST
ID
V
ERIFICATION
OK
ID
V
ERIFICATION
FAILED
3
4
5
6
7
9
2
8
C
11
10
NOT
ACCESSED
IN
A
CCESS
CARRIER
COMPLETE
18
19
17
CARRIER
STOPPED
20
CARRIER ACCESSING STATUS
Figure 3
Carrier State Model Diagram
10.7.3 Carrier State Definitions
10.7.3.1 CARRIER — The CARRIER state has three ANDed (orthogonal) states: CARRIER ID STATUS,
CARRIER SLOT MAP STATUS and CARRIER ACCESSING STATUS.
10.7.3.2 CARRIER ACCESSING STATUS — This is a substate of CARRIER and indicates the current accessing
status of the carrier. It has four substates, NOT ACCESSED, IN ACCESS, CARRIER COMPLETE, and CARRIER
STOPPED. The initial default entry substate is NOT ACCESSED.
10.7.3.2.1 NOT ACCESSED — This is a substate of CARRIER ACCESSING STATUS and is active when access
by the equipment to the carrier has not been started. The carrier can be moved out.
10.7.3.2.2 IN ACCESS — This is a substate of CARRIER ACCESSING STATUS and is active when access by the
equipment to the carrier has been started but has not been finished, and the carrier should not be moved out.
10.7.3.2.3 CARRIER COMPLETE — This is a substate of CARRIER ACCESSING STATUS and is active when
the access by the equipment to the carrier has been finished, and the carrier should be moved out. This is a final
state.
10.7.3.2.4 CARRIER STOPPED — This is a substate of CARRIER ACCESSING STATUS and is active when the
access by the equipment to the carrier has been stopped abnormally, and the carrier should be moved out. This is a
final state.
10.7.3.3 CARRIER ID STATUS — This is a substate of CARRIER and indicates the current status of the carrier
with respect to its identifier. It has four substates, ID NOT READ, WAITING FOR HOST, ID VERIFICATION
FAILED, ID VERIFICATION OK. The initial substate is conditional based on information the equipment has
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about the carrier. When the carrierID is provided by the Bind or the Carrier Notification service, the carrier object
shall be instantiated in the ID NOT READ substate. When the carrierID is provided by the carrier ID reader, the
carrier shall be instantiated in the WAITING FOR HOST substate. When the Carrier is instantiated by the
ProceedWithCarrier service, the carrier shall be instantiated in the ID VERIFICATION OK substate. Finally when
the carrier is instantiated by the CancelCarrier service, the carrier will be instantiated in the ID VERIFICATION
FAILED substate.
10.7.3.3.1 ID NOT READ — This is a substate of CARRIER ID STATUS. This state is active whenever the
CarrierID has not been read by the equipment.
10.7.3.3.2 ID VERIFICATION FAILED — This is a substate of CARRIER ID STATUS and is active when the
carrierID has failed verification by the host following the CancelCarrier service. This is a final state.
10.7.3.3.3 ID VERIFICATION OK — This is a substate of CARRIER ID STATUS and is active as soon as the
CarrierID has been accepted. The ID is determined to be accepted by either successful verification by the equipment
or the host, or by bypassing ID read because a carrier ID reader is not available and the BypassReadID variable is
set to true. This is a final state.
10.7.3.3.4 WAITING FOR HOST — This is a substate of CARRIER ID STATUS and is active during the period of
time when the carrierID has been read by the equipment successfully or unsuccessfully and has not yet been verified
by the host.
10.7.3.4 CARRIER SLOT MAP STATUS — This is a substate of CARRIER and indicates the current status of the
carrier with respect to its slot map. It has four substates, SLOT MAP NOT READ, WAITING FOR HOST, SLOT
MAP VERIFICATION FAILED, SLOT MAP VERIFICATION OK. The initial default entry sub-state is SLOT
MAP NOT READ.
10.7.3.4.1 SLOT MAP NOT READ — This is a substate of CARRIER SLOT MAP STATUS and is the default
entry state. It is active when the Carrier is first loaded at the equipment until the Slot Map has been read successfully
by the equipment at the Substrate Port.
10.7.3.4.2 SLOT MAP VERIFICATION FAIL — This is a substate of CARRIER SLOT MAP STATUS and is
active when the Slot Map has been read by the equipment and has failed verification by the host. This is a final
state.
10.7.3.4.3 SLOT MAP VERIFICATION OK — This is a substate of CARRIER SLOT MAP STATUS and is active
as soon as the slot map has been verified. This is a final state.
10.7.3.4.4 WAITING FOR HOST — This is a substate of CARRIER SLOT MAP STATUS and is active when the
equipment is waiting for input from the host.
10.7.4 Carrier State Transition Table
10.7.4.1 Table 7 indicates the triggers and the expected behavior of the instantiated carrier object.
Table 7 Carrier State Transition Definition
# Previous State Trigger New State Actions Comment
1 (no state) A carrier is instantiated. CARRIER None. No event is required for this
transition
2 (no state) Normal: A Bind or Carrier
Notification service is received.
ID NOT READ None. Data required to be available for
this event report:
CarrierID
CarrierIDStatus