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SEMI E42.1-0704 © SEMI 1996, 2004 1 SEMI E42.1-0704 STANDARD FOR SECS- II PROTOCOL FOR RECIPE MANAGEMENT STANDARD (RMS) This standard was technically approved by the Globa l Informat ion & Control Committee and is th…

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SEMI E42-0704 © SEMI 1995, 2004 121
Other examples would be similar. Interactions are primarily with external service users of namespace and recipe
execution capabilities, and between namespace managers and recipe executors.
Namespaces do not interact with one another. To copy a recipe from one namespace to another, an intermediary is
required. This is not covered by RMS.
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the standards set forth herein for any particular application. The determination of the suitability of the standard is
solely the responsibility of the user. Users are cautioned to refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are
subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E42.1-0704 © SEMI 1996, 2004 1
SEMI E42.1-0704
STANDARD FOR SECS-II PROTOCOL FOR RECIPE MANAGEMENT
STANDARD (RMS)
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the Japanese Information & Control Committee. Current edition approved by the Japanese
Regional Standards Committee on April 30, 2004. Initially available at www.semi.org June 2004; to be
published July 2004. Originally published in 1996; previously published September 1997.
1 Purpose
1.1 This document maps the services and data of the
parent document to SECS-II streams and functions and
data definitions.
2 Scope
2.1 This document applies to all implementations of
Recipe Management that use the SECS-II message
protocol (SEMI E5).
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI E42 — Recipe Management Standard: Concepts,
Behavior, and Message Services
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
None.
5 Service Mapping
5.1 Table 1 shows the specific SECS-II streams and
functions that shall be used for SECS-II
implementations of the services defined in RMS.
5.2 Request and notification messages are mapped to
primary (odd-numbered) SECS-II functions and
response messages are mapped to secondary (even-
numbered) SECS-II functions.
5.3 In several cases, a common set of parameters
allows more than one RMS services to be mapped to a
single stream and function, with an additional SECS-II
data item used to differentiate between the two services.
RMNCreateNS and RMNDeleteNS both map to
S15,F3/F4, RMNCreate and RMNUpdate both map to
S15,F13/14, and RMNCopy and RMNRename both
map to S15,F19/20.
5.4 In addition, the notification messages RMNCom-
plete, RMEComplete, RMEChange, RMDComplete,
and RMDNotify all map to S6,F25/F26.
Table 1 Services Mapping Table
Message Name Stream, Function SECS-II Name
RMNCreateNS S15,F3/F4 Recipe Namespace Action Request/Acknowledge
RMNDeleteNS S15,F3/F4 Recipe Namespace Action Request/Acknowledge
RMNRenameNS S15,F5/F6 Recipe Namespace Rename Request/Acknowledge
RMNSpaceInquire S15,F7/F8 Recipe Space Request/Data
RMNRcpStatInquire S15,F9/F10 Recipe Status Request/Data
RMNVersionInquire S15,F11/F12 Recipe Version Request/Data
RMNCreate S15,F13/F14 Recipe Create Request/Acknowledge
RMNUpdate S15,F13/F14 Recipe Create Request/Acknowledge
RMNStore S15,F15/F16 Recipe Store Request/Acknowledge
RMNRetrieve S15,F17/F18 Recipe Retrieve Request/Data
RMNCopy S15,F19/F20 Recipe Rename Request/Acknowledge
RMNRename S15,F19/F20 Recipe Rename Request/Acknowledge
SEMI E42.1-0704 © SEMI 1996, 2004 2
Message Name Stream, Function SECS-II Name
RMNAction S15,F21/F22 Recipe Action Request/Acknowledge
RMNGetDescriptor S15,F23/F24 Recipe Descriptor Request/Data
RMNVarPar S15,F25/F26 Recipe Parameter Update Request/Acknowledge
RMNComplete S6,F25 Notification Report Send
RMEDnldVer S15,F27/F28 Recipe Download
RMEVerify S15,F29/F30 Recipe Verify
RMEUpload S15,F31/F32 Recipe Upload
RMESpaceInquire S15,F7/F8 Recipe Space Request/Data
RMERename S15,F19/F20 Recipe Rename Request/Acknowledge
RMEDelete S15,F35/F36 Recipe Delete Request/Acknowledge
RMESelect S15,F33/F34 Recipe Select Request/Acknowledge
RMEDeselect S15,F35/F36 Recipe Deselect Request/Acknowledge
RMEGetDescriptor S15,F23/F24 Recipe Descriptor Request/Data
RMNAction S15,F21/F22 Recipe Action Request/Acknowledge
RMEChange S6,F25 Notification Report Send
RMEComplete S6,F25 Notification Report Send
RMDSApproveAction S15,F37/F38 DRNS Segment Approve Action Request/Acknowledge
RMDRAdd SegRecord S15,F39/F40 DRNS Recorder Segment Request/Acknowledge
RMDRDelSegRecord S15,F39/F40 DRNS Recorder Segment Request/Acknowledge
RMDRAddChgRecord S15,F41/F42 DRNS Recorder Modify Request/Acknowledge
RMDRDelChgRecord S15,F41/F42 DRNS Recorder Modify Request/Acknowledge
RMDRGetChgRecord S15,F43/F44 DRNS Get Change Request/Data
RMDGetChgRequest S15,F43/F44 DRNS Get Change Request/Data
RMDSegChange S15,F45/F46 DRNS Manager Segment Change Approval Request/Grant
RMDRebuild S15,F47/F48 DRNS Manager Rebuild Request/Acknowledge
RMDComplete S6,F25/F26 Notification Report Send
RMDNotify S6,F25/F26 Notification Report Send
Attach S14F13,F14 Object Attach Request/Acknowledge (SEMI E39.1)
AttachSetAttr S14F15,F16 Attached Object Action request/Acknowledge (SEMI E39.1)
AttachSupervisedObject S14F17,F18 Supervised Object Action Request/Acknowledge (SEMI E39.1)
Create S14F9,F10 Create Object Request/Acknowledge (SEMI E39.1)
Delete S14F11,F12 Delete Object Request/Acknowledge (SEMI E39.1)
Detach S14F15,F16 Attached Object Action Request/Acknowledge (SEMI E39.1)
DetachSupervisedObject S14F17,F18 Supervised Object Action Request/Acknowledge (SEMI E39.1)
Reattach S14F13,F14 Object Attach Request/Acknowledge (SEMI E39.1)
6 Service Parameter Mapping
6.1 Table 2 shows the mapping between message parameters defined by RMS and data items defined by SECS-II.
For parameters specified in the definitions of an RMS service, either the parameters themselves, or individual
elements of complex parameters, map to a specific data item.
Table 2 Service Parameters Item Mapping Table
Parameter Name SECS-II Data Item
RMSectionsCode RCPSECCODE
AgentSpec_DescLength RCPDESCLTH
AgentSpec_DescName RCPDESCNM = “ASDesc”
AgentSpec_DescTimestamp RCPDESCTIME
AgentSpec_SectionName RCPSECNM = “ASDS”