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SEMI E54.12-0701 E © SEMI 2001 1 SEMI E54.12-0701 E SPECIFICA TION FOR SENSOR/ACTUATOR NETWORK COMM UNICATIONS FOR CC-LINK This s pecif ication was te chnically approv ed by the G lobal Inform ation and Control Comm itte…

SEMI E54.11-0301 © SEMI 200117

Table 22 Assembly-EPD #3 Object Data List

Data Index Source Object ID Source Attribute ID Description

1 EPD1 A12 Device Manager

Exception Status

2 EPD2 SacA65 SAC

Number of Endpoint Objects

3 EPD3 SbithepA16 Sensor-BI-TH-EP #1

Value

4 EPD3 SbithepA16 Sensor-BI-TH-EP #2

Value

. EPD3 SbithepA16 Sensor-BI-YH-EP #3 to Sensor-BI-TH-EP #N-1

Value

N ≤ 1024

(See NOTE 1.)

EPD3 SbithepA16 Sensor-BI-TH-EP #N

Value

NOTE 1: ‘N’ is the value of the Sensor-BI-EP object attribute “Number of Endpointing Objects”. Note also that the number of endpoints

reported in an assembly is fixed throughout the life of the device, and is specified by the manufacturer.

Table 23 Assembly-EPD #4 Object Data List

Data Index Source Object ID Source Attribute ID Description

1 EPD1 A12 Device Manager

Exception Status

2 EPD1 A13 Device Manager

Exception Detail Alarm

3 EPD1 A14 Device Manager

Exception Detail Warning

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SEMI E54.12-0701

SPECIFICATION FOR SENSOR/ACTUATOR NETWORK

COMMUNICATIONS FOR CC-LINK

This specification was technically approved by the Global Information and Control Committee and is the

direct responsibility of the North American Global Information and Control Committee. Current edition

approved by the North American Information and Control Committee on April 30, 2001. Initially available

at www.semi.org May 2001; to be published July 2001.

This standard was editorially modified in September 2001 to correct a typographical error and the omission

of a required disclaimer. Section 2.3 was added and changes were made to Section 7.6.2.6.

1 Purpose

1.1 This specification is part of the SEMI

Sensor/Actuator Network (SAN) suite of standards and

defines a specific communications protocol based on

the CC-Link standard. This Network Communication

Standard (NCS) taken together with the SEMI

Sensor/Actuator Network standard suite and the CC-

Link standard completely and unambiguously defines

an open standard providing an industry specific solution

to off-the-shelf interoperability of networked devices in

semiconductor manufacturing equipment.

1.2 CC-Link is a vendor independent, open device

level network standard. Vendor independence and

openness are guaranteed by the CC-Link Partner

Association.

2 Scope

2.1 This document specifies a SAN communications

standard based on the CC-Link specification that is in

compliance with SEMI E54.1. As such, it specifies the

protocol, services and behavior that compliant

intelligent devices must support in order to interchange

information over this SAN in a method compatible with

SEMI E39.

2.2 In conjunction with a SEMI standard SAN

Common Device Model (CDM) specification and one

or more SEMI standard Specific Device Model (SDM)

specifications (e.g., for a mass flow controller), this

Network Communication Standard (NCS) with the

related CC-Link standard describe the data structures,

interactions and behavior that are characteristic of the

various devices on the network. This composite model

forms a complete interoperability standard for

communications among intelligent sensors, actuators

and controllers in semiconductor manufacturing

equipment.

2.3 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety health practices and determine the

applicability or regulatory limitations prior to use.

3 Limitations

3.1 This document specifies a semiconductor

equipment SAN based solely on CC-Link; thus, a

complete specification of this standard necessarily

includes the CC-Link specifications. There are other

semiconductor equipment SAN communications

options. The specifications for these options are not

included here.

3.2 The specifications within are strictly enhancements

that provide additional capabilities over and above

those currently required by CC-Link. Included

throughout this document, primarily in Section 6, is

information paraphrased from the CC-Link

specifications — such as: protocol structure,

capabilities, options and limitations. This information is

provided here for reference only and is not intended to

provide specification definitions. In all such areas, refer

to the CC-Link specification documents for

information. This document is limited to describing

enhancements or limitations to the CC-Link

specification that are imposed by this standard.

3.3 A complete specification of the conformance

testing procedure shall include the CC-Link protocol

conformance testing specification. Conformance

testing shall also include enhancements and limitations

to the CC-Link specification required by this standard.

4 Referenced Standards

NOTE 1: Unless otherwise indicated, all documents cited

shall be the latest published versions.

4.1 SEMI Standards

SEMI E39 — Object Services Standard: Concepts,

Behavior and Services

SEMI E54.1 — Sensor/Actuator Network Common

Device Model

SEMI E54.3 — Specification for Sensor/Actuator

Network Specific Device Model for Mass Flow Device

SEMI E54.12-0701

4.2 ISO

Standards

7498 OSI — Basic Reference Model for Open Systems

Interconnection

4.3 CC-Link Partner Association

CC-Link Specification, Version 1.11 (or later)

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 CDM — Common Device Model

5.1.2 NCS — Network Communication Standard

5.1.3 OSI — Basic Reference Model for Open Systems

Interconnection (ISO 7498)

5.1.4 SAN — Sensor/Actuator Network

5.1.5 SDM — Specific Device Model

5.2 Definitions from Sensor/Actuator Network

Common Device Model (SEMI E54.1)

5.2.1 Attribute

5.2.2 Behavior

5.2.3 Byte

5.2.4 Common Device Model

5.2.5 Device

5.2.6 Device Manager (DM) Object

5.2.7 Device Model

5.2.8 Instance

5.2.9 Network Communication Standard

5.2.10 Object

5.2.11 Sensor, Actuator and Controller (SAC) Object

5.2.12 Service

5.2.13 Specific Device Model

5.2.14 State Diagram

5.3 Definitions

5.3.1 broadcast polling method — polling to each

station and the data communication are executed by the

same packet, and the data is transmitted to all of the

stations in this method.

5.3.2 cyclic transmission — function to transmit the

data from master station to all stations periodically,

1 ISO - International Organization for Standardization, 1 rue de

Varembe, Case postale 56, CH-1211, Geneva 20, Switzerland

2 CC-Link Partner Association - <www.cc-link.org>

then for each station to transmit the response data to

master station.

5.3.3 intelligent device station — station which can

send cyclic transmission and transient transmission to

master station.

5.3.4 local station — station which can send cyclic

transmission and transient transmission to master

station and other local stations.

5.3.5 master station — station that controls all stations

on CC-Link. One (and only one) master station per

system is required.

5.3.6 profiles — Application Object Model

specifications.

5.3.7 remote device station — station that handles bit

data and word data.

5.3.8 remote I/O station — station that handles only bit

data.

5.3.9 remote station — generic name of remote I/O

station and remote device station.

5.3.10 slave station — generic name of station other

than master station.

5.3.11 station — equipment which can be connected

with CC-Link and is assigned a station number of 0–64.

5.3.12 transient transmission — function to transmit

the non-periodic data generated in master station, local

station, and intelligent device station.

6 Communication Protocol High Level

Structure

6.1 Message transfer is organized in cycles. A message

cycle mainly consists of a request-frame followed by a

corresponding acknowledge/response-frame of the

addressed station.

6.2 A brief description of the CC-Link protocol as it

relates to the ISO 7498 OSI model follows in the

sections below. For protocol efficiency, CC-Link does

not define layers 3 to 6.

NOTE 2: The information contained in this section is for

reference only. It in no way represents specifications for CC-

Link. See related documentation for these specifications.

6.3 Physical Layer - Layer 1 — the Physical Layer

conforms to the EIA RS-485 standard. See the CC-

Link standard for more information.

6.4 Data Link Layer - Layer 2 — the Data Link Layer

conforms to the HDLC standard. See the CC-Link

standard for more information.

6.5 Application Layer - Layer 7 — the Application

Layer defines services and protocols for Network