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SEMI E87-0705 © SEMI 1999, 2005 10 Num Previous State Trigger New State Actions Comments 6 READY TO LOAD Manual : The equipmen t recognizes the logical indication of the start of a manual load transfer. This trigger is c…

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SEMI E87-0705 © SEMI 1999, 2005 9
9.5.4 Load Port Transfer State Transition Table
Table 5 Load Port Transfer State Transition Definition
Num Previous State Trigger New State Actions Comments
1 (no state) System reset. OUT OF
SERVICE
or
IN SERVICE
(History)
This transition is based on what the current
transfer status was prior to system reset.
Data required to be available for this event
report:
PortID
PortTransferState
2 OUT OF
SERVICE
The host or an operator has
invoked the ChangeServiceStatus
service for this load port with a
value of IN SERVICE.
IN SERVICE Load port is now usable for transfer.
Data required to be available for this event
report:
PortID
PortTransferState
3 IN SERVICE The host or an operator has
invoked the ChangeServiceStatus
service for this load port with a
value of OUT OF SERVICE.
OUT OF
SERVICE
Load port is now rendered unusable for
transfer. Attempted usage of the load port
for carrier transfer after the state transition
results in an alarm.
Data required to be available for this event
report:
PortID
PortTransferState
4 IN SERVICE Service: The host or an operator
has invoked the
ChangeServiceStatus service for
this load port with a value of IN
SERVICE.
System Reset: This transition can
be activated by an equipment re-
initialization.
TRANSFER
READY
or
TRANSFER
BLOCKED
This is the default entry into IN SERVICE.
The state is TRANSFER BLOCKED if the
carrier, or load port, is not available for
carrier transfer. Otherwise, the state is
TRANSFER READY.
Data required to be available for this event
report:
PortID
PortTransferState
5 TRANSFER
READY
Service: The host or an operator
has invoked the
ChangeServiceStatus service for
this load port with a value of IN
SERVICE.
System Reset: This transition can
be activated by an equipment re-
initialization.
Failed Transfer: If a transfer fails,
this transition is activated by
transition #10.
READY TO
LOAD
or
READY TO
UNLOAD
When entering the TRANSFER READY
state, if a carrier is present, the sub-state is
READY TO UNLOAD, else the sub-state
is READY TO LOAD.
If the state is READY TO LOAD, data
required to be available for this event
report:
PortID
If the state is READY TO UNLOAD, data
required to be available for this event
report:
PortID
CarrierID
PortTransferState
SEMI E87-0705 © SEMI 1999, 2005 10
Num Previous State Trigger New State Actions Comments
6 READY TO
LOAD
Manual: The equipment recognizes
the logical indication of the start of
a manual load transfer. This trigger
is configurable by the user,
examples are included in Table 8.
Automated: The PIO load transfer
is beginning and the PIO
“READY” signal is activated (see
SEMI E84).
Internal Buffer: A CarrierOut
service has started for this load
port.
TRANSFER
BLOCKED
When a CarrierOut service is queued and
the equipment load port is currently in the
TRANSFER BLOCKED state, the
equipment shall keep the load port in the
TRANSFER BLOCKED state.
Data required to be available for this event
report:
PortID
PortTransferState
7 READY TO
UNLOAD
Manual: The equipment recognizes
the logical indication of the start of
a manual unload transfer. This
trigger is configurable by the user,
examples are included in Table 8.
Automated: The PIO unload
transfer is beginning and the PIO
“READY” signal is activated (see
SEMI E84).
Internal Buffer: A CarrierIn
service has started for this load
port.
By CarrierReCreate Service: A
CarrierReCreate service command
has been issued by host or
operator.
TRANSFER
BLOCKED
When a CarrierOut service is queued and
the equipment load port is currently in the
TRANSFER BLOCKED state, the
equipment shall keep the load port in the
TRANSFER BLOCKED state.
Data required to be available for this event
report:
PortID
PortTransferState
8 TRANSFER
BLOCKED
Manual: The carrier unload
transfer has completed, and the
load port is now empty and ready
for load transfer. This is indicated
when two conditions are met, the
presence signal indicates that no
carrier is present and the operator
has logically indicated that the
transfer is complete.
Automated: The PIO unload
transfer ends with the PIO
“COMPT” signal (see SEMI E84).
Internal Buffer: The carrier has
finished its move from the load
port into the internal buffer, and no
CarrierOut services are queued for
this load port.
READY TO
LOAD
A carrier can now be loaded onto the load
port from either an external entity, or by
the equipment’s internal material handling
resource.
Data required to be available for this event
report:
PortID
PortTransferState
SEMI E87-0705 © SEMI 1999, 2005 11
Num Previous State Trigger New State Actions Comments
9 TRANSFER
BLOCKED
Manual: Processing for substrates
contained within the carrier has
completed, or a CancelCarrier/
CancelCarrierAtPort service has
been issued, and the carrier has
returned to the load/unload
position on the load port.
Automated: Processing for the
substrates belonging to the carrier
has completed, or a
CancelCarrier/CancelCarrier-
AtPort service has been received,
and the carrier has returned to the
load/unload position.
Internal Buffer: A carrier has
completed its move from the
internal buffer to the load port.
READY TO
UNLOAD
The carrier on the load port can now be
unloaded from the load port to an external
entity.
Data required to be available for this event
report:
PortID
CarrierID
PortTransferState
10 TRANSFER
BLOCKED
The transfer was unsuccessful, and
the carrier was not loaded or
unloaded.
TRANSFER
READY
The sub-state of TRANSFER READY
which is decided by transition #5.
Data required to be available for this event
report:
PortID
PortTransferState
10 Carrier Object
10.1 Information about a carrier is encapsulated as an object. This allows the host to exchange information with the
equipment about one or more specific carriers using services defined in SEMI E39, Object Services Standard. A
carrier has properties (attributes) that are defined in Table 6, Carrier Attribute Definition.
10.2 Object Instantiation
10.2.1 The carrier object is a software representation of the carrier in the equipment. Under normal circumstances
this object is instantiated by the equipment when the host uses the Bind or Carrier Notification service or when the
equipment successfully reads the carrierID from the carrier. A carrier object is instantiated by carrierID read only if
there are no currently existing objects with the carrierID just read. A carrier object can also be instantiated by either
the ProceedWithCarrier or CancelCarrier Services on an NOT ASSOCIATED port. (This implies a failed carrierID
read event.) The ContentMap attribute will be an empty list (a list of zero) when the instantiation is done by
CarrierID read. The SlotMap attribute should be a list consisting of all slots enumerated as “UNDEFINED” when
the carrier object is instantiated by CarrierID read.
10.2.2 From the host point of view, an object is instantiated if the host is able to query the equipment about that
object, it's current state, and other attributes. Once instantiated, the object is considered destroyed (no longer
instantiated) if the response to such queries is “unknown object”.
10.2.3 Summary of carrier object instantiation:
1. Bind or Carrier Notification or CarrierReCreate (with PropertiesList) service;
2. CarrierID read with no currently existing carrier objects having the carrierID just read; and
3. ProceedWithCarrier or CancelCarrier Service on an NOT ASSOCIATED port with a carrier.
10.2.4 Carrier Object Identifier (ObjID)
10.2.4.1 The purpose of an Object Identifier is to allow references to an object within the system. The object
identifier is created when an object is instantiated and should be unchanged or persistent until the end of the object
lifecycle. The Object Identifier shall be unique at the equipment during lifecycle of the object. The Carrier ID is the