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SEMI D25-0600 E © SEMI 2000, 2003 23 APPENDIX 2 NOTE: The material in this appendix is an official part of SEMI D25 and was approved by full letter ballot pro cedures on April 21, 2000 by the Japanese R egional Standards…

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SEMI D25-0600
E
© SEMI 2000, 2003 22
Supplier clean room
Figure A1-17
Vacant Box, Supplier Clean Room
SEMI D25-0600
E
© SEMI 2000, 2003 23
APPENDIX 2
NOTE: The material in this appendix is an official part of SEMI D25 and was approved by full letter ballot procedures on April
21, 2000 by the Japanese Regional Standards Committee.
A2-1 40 Foot Container Size
Reference: ISO 668, Series 1 Freight Container – Classification, Dimensions and Ratings
W=2350 L=12060 H=2390 (Unit = mm)
SEMI D25-0600
E
© SEMI 2000, 2003 24
APPENDIX 3
NOTE: The material in this appendix is an official part of SEMI D25 and was approved by full letter ballot procedures on April
21, 2000 by the Japanese Regional Standards Committee.
A3-1 Sag Caused by Acceleration
Glass Loading Method
During Transport
Example
Sag resulting
from 1G
added force
1G
Shrinkage
Unit = mm
Substrate Dimensions
Substrate Size G Value Support
Method
Span Sag Curved
Shrinkage
Long Edge Short Edge
Memo
800 × 950 × 0.7
1 4 --
20 1.4 950 800
Sag is for substrates
2 800 52 9.0 950 800 supported in
950 103 30.2 950 800 horizontal.
NOTE: Calculated by Asahi Glass Company
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