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SEMI G85-0703 © SEMI 2001, 2003 2 and nodes as lon g as the resulting document is well formed XML and the elemen ts, node s and attributes defined in SEMI G85 remain unaffected. The elements of this template will be desc…
SEMI G85-0703 © SEMI 2001, 2003 1
SEMI G85-0703
SPECIFICATION FOR MAP DATA FORMAT
This specification was technically approved by the Global Automated Test Equipment Committee and is the
direct responsibility of the North American Automated Test Equipment Committee. Current edition approved
by the North American Regional Standards Committee on March 12, 2003 and April 11, 2003. Initially
available at www.semi.org May 2003; to be published July 2003. Originally published November 2001;
previously published March 2003.
1 Purpose
1.1 This document describes in detail how the data
items that relate to electronic mapping are to be
represented in a file format.
1.2 Although the examples given in this document are
for wafers, the map data format described can be
applied to any substrate including, but not limited to,
wafer, tray, strip or tape.
2 Scope
2.1 This document applies to format of map data items.
This document does not address the transmission, file
naming conventions, storage or archiving of maps.
2.2 The semantics of the map data items are not
specified in this document.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 This document is limited to representing maps for
MapType = “Array”. See SEMI G81 for a definition of
MapType.
4 Referenced Standards
4.1 SEMI Standards
SEMI G81 — Specification for Map Data Items
4.2 World Wide Web Consortium Documents
1
Extensible Markup Language (XML) 1.0 (Second
Edition. Namespaces in XML)
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
1 World Wide Web Consortium Documents are available from
Massachusetts Institute of Technology Laboratory for Computer
Science, 200 Technology Square, Cambridge, MA 02139, USA
Telephone: + 1.617.253.2613, Fax: + 1.617.258.5999,
http://www.w3.org/TR/REC-xml
5 Terminology
5.1 Definition
5.1.1 map — a two dimensional array of bin codes
derived from electrical test data of a two dimensional
substrate including, but not limited to, wafer, tray, strip
or tape.
6 Ordering Information
None.
7 Description
7.1 XML Notation Extensible Markup Language is the
universal language for data on the Web. It gives
developers the power to deliver structured data from a
wide variety of applications to the desktop for local
computation and presentation. XML allows the creation
of unique data formats for specific applications. It is
also an ideal format for server-to-server transfer of
structured data.
7.2 XML consists of elements (referred to as ‘items’ in
the remainder of this document) that may have
attributes and nested items.
7.2.1 Example:
<Map xmlns: " http://www.semi.org" >
<Device>
</Device>
</Map>
defines a Map item with the attribute xmlns:
“http://www.semi.org” which defines a namespace and
the governing body for that namespace. This is in
accordance with the “Namespaces in XML”
specification (see references). Specifying the
namespace ensures that the names within the Map
element are distinguishable from the same names in
other non-SEMI XML documents.
7.2.2 The Map item contains nested items called
Device.
7.3 The listing below is an example of a well-formed
map data file for a single map with all the map data
items. A map supplier may insert their own elements
SEMI G85-0703 © SEMI 2001, 2003 2
and nodes as long as the resulting document is well
formed XML and the elements, nodes and attributes
defined in SEMI G85 remain unaffected. The elements
of this template will be described in the sections that
follow. Examples of map data files with data are
shown in the appendices.
<? xml version=" 1.0" ? >
<Map
xmlns: " http://www.semi.org"
SubstrateType=" "
SubstrateId=" "
FormatRevision=" " >
<Device
ProductId=" "
LotId=" "
Orientation=" "
DeviceSizeX=" "
DeviceSizeY=" "
Rows=" "
Columns=" "
BinType=" "
FrameId=" "
NullBin=" "
SupplierName=" "
OriginLocation=" "
CreateDate=" "
LastModified=" "
Status=" " >
<ReferenceDevice
ReferenceDeviceX=" "
ReferenceDeviceY=" "
RefDevicePosX=" "
RefDevicePosY=" "
/>
<Bin
BinCode=" "
BinQuality=" "
BinDescription=" "
/>
<Data MapName=" " MapVersion=" " >
<Row><! [CDATA[]]></Row>
</Data>
</Device>
</Map>
7.3.1 The order of attributes and sub items within their
parent item is not significant but the parent child
relationship is. One exception is the Row items which
must match the actual rows on the substrate being
mapped.
7.4 Every map file starts with the declaration:
<? xml version=" 1.0" ? >
This line informs the parser that the data that follows
conforms to the XML Version 1.0 specification.
7.5 The data for each wafer is enclosed within the map
data item:
<Map xmlns: http://www.semi.org
SubstrateType=" Wafer"
SubstrateId =" ZSDGS88DF"
</Map>
7.5.1 The attribute setting, xmlns: “http://www.
semi.org” informs the parser that the item and attribute
names within this item are unique within the namespace
identified as SEMI.
7.5.2 All the attributes within the Map item are defined
in the SEMI G81.
7.5.3 All the items within the Map Item are defined in
this document.
7.5.4 Some of these attributes and items are mandatory
and some are optional as defined in Table 1.
7.5.5 One or more maps can be represented in a single
file by simply repeating the <Map> element. Each map
can be distinguished based on an identifier attribute as
shown in the following example:
<? xml version=" 1.0" ? >
<Maps>
<Map xmlns: " http://www.semi.org"
SubstrateType=" Wafer"
SubstrateId =" ZSDGS88DF"
</Map>
<Map xmlns: " http://www.semi.org"
SubstrateType=" Wafer"
SubstrateId=" JDUJ102MJS"
</Map>
</Maps>
7.6 The Map item contains one or more Device items.
This allows multiple overlaying maps of different
device types to be represented. The Device item
contains a number of attributes and some sub items.
7.6.1 The ReferenceDevice item contains attributes
which describe a single reference device. Several
ReferenceDevice items may be represented by
repeating this item with different attribute values.
7.6.2 The Bin item contains attributes which describe a
single bin code. Several Bin items may be represented
by repeating this item with different attribute values.
7.6.3 The Data item contains attributes and a list of
Row items. Several Data items may be represented by
repeating this item with different attribute values. This
SEMI G85-0703 © SEMI 2001, 2003 3
might be used for example to represent versions of the
map after each process step.
7.6.4 The Row items are defined as XML CDATA
section. The example below shows the Data item for a
binary map with two rows and two columns.
<Data>
<Row><! [CDATA[FFFF]]></Row>
<Row><! [CDATA[FF14]]></Row>
</Data>
7.6.4.1 A CDATA section contains data that should not
be parsed by the XML parser. After <! [CDATA[, only
the string ]]> will be interpreted by the XML parser. If
this string occurs in the actual data (for example in an
ASCII map) then it must be replaced by the string
]]> so that the XML parser will not interpret it as the
end of the CDATA section.
7.6.4.2 Each Row item specifies the BinCode for each
column in the row in a format that depends on the
BinType attribute.
7.6.4.3 The Row items must match the actual rows on
the substrate being mapped. The first row is the
topmost row as viewed with the substrate oriented
according to the value of Orientation.
7.6.4.4 The number of Row items must match the
Rows attribute if specified.
7.6.4.5 The number of columns in each Row item must
match the Columns attribute if specified.
Table 1 Items and Attributes Used
Name Item or
Attribute
Defined In Mandatory or
Optional
Default Value
xmlns Attribute Map Data Format Mandatory Must be “http://www.semi.org”
NullBin Attribute Map Data Items Mandatory No default
Map Item Map Data Format Mandatory No default
Device Item Map Data Format Mandatory No default
Data Item Map Data Format Mandatory No default
Row Item Map Data Format Mandatory No default
FormatRevision Attribute Map Data Items Optional Latest version of this standard
ProductId Attribute Map Data Items Optional “”
LotId Attribute Map Data Items Optional “”
Orientation Attribute Map Data Items Mandatory 0
WaferSize Attribute Map Data Items Optional 0
DeviceSizeX Attribute Map Data Items Optional 0
DeviceSizeY Attribute Map Data Items Optional 0
StepSizeX Attribute Map Data Items Optional 0
StepSizeY Attribute Map Data Items Optional 0
CassetteId
MagazineId
Attribute Map Data Items Optional “”
Rows Attribute Map Data Items Optional Can be derived from number of Row items
Columns Attribute Map Data Items Optional Can be derived from Row items
BinType (See Note 3.) Attribute Map Data Items Mandatory “ASCII”
ReferenceDevice Item Map Data Format Mandatory
(See Note 1.)
No default
ReferenceDeviceX Attribute Map Data Items Mandatory
(See Note 1.)
No default
ReferenceDeviceY Attribute Map Data Items Mandatory
(see Note 1)
No default
RefDevicePosX Attribute Map Data Items Optional 0.0
RefDevicePosY Attribute Map Data Items Optional 0.0
MapName Attribute Map Data Items Optional “”
MapVersion Attribute Map Data Items Optional “”
BinCode Attribute Map Data Items Optional 0
BinCount Attribute Map Data Items Optional 0