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SEMI D32-0303 © SEMI 2003 2 5.2.2 character separation, vertical — the vertical distance betwee n the adjace nt boundari es of any two adjacent characters. 5.2.3 character spacing — the horizontal distance between the ch…

SEMI D32-0303 © SEMI 2003 1

SEMI D32-0303

SPECIFICATION FOR IMPROVED INFORMATION MANAGEMENT FOR

GLASS FPD SUBSTRATES THROUGH ORIENTATION CORNER

UNIFICATION

This specification was technically approved by the Global FPD Materials and Components Committee and is

the direct responsibility of the Japanese FPD Materials and Components Committee. Current edition

approved by the Japanese Regional Standards Committee on January 10, 2003. Initially available at

www.semi.org January 2003; to be published March 2003.

1 Purpose

1.1 This specification provides the location,

dimensions, and message size of the marking symbol

that consists of a two-dimensional code symbol and

related alpha numeric characters (capable of being read

visually through the reader camera and display) and is

located outside of the quality area of glass flat panel

display (FPD) substrate.

1.2 The marking symbol in this specification allows the

inclusion of identification information for each

individual substrate together with the additional

information previously provided by various orientation

corner (OC) cut shapes.

1.3 Thus, this specification allows suppliers of glass

substrates for FPDs to simplify substrate information

management by marking such information in one

location around the OC on the substrate, before

shipping. In addition, use of this marking symbol will

facilitate the future elimination of the numerous types

of OC cut shapes presently in use.

1.4 The marking symbol covered by this specification

is intended for use by suppliers and purchasers of glass

substrates for FPDs.

2 Scope

2.1 This specification provides for a standardized OC

location in support of future unification of the OC cut

shape as well as location. When this is done, the

provisional nature of the specification can be removed.

2.2 This specification covers the content, dimensions,

and surface positioning of the marking symbol located

outside of the quality area of glass substrates for FPD

use.

2.2.1 This marking symbol is marked in a manner and

location to avoid affecting the user patterning process.

2.2.2 Although this specification does not specify the

marking technique to be employed when complying

with its requirements, it is assumed that the marking

symbol will be obtained by laser marking individual

dots.

2.3 Marking symbols are applicable across all stages of

FPD processing, from virgin substrates to fully

patterned substrates. The format and algorithm for the

Data Matrix code is based on two-dimensional

symbology specified in ISO/IEC 16022.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 Since the symbol is marked in a region of the

substrate outside of the quality area, it is not available

for use after this area is cut off.

3.2 Since only a single symbol is marked on each

substrate, the marking symbol is not directly applicable

for management of individual panels in multi-panel

displays.

4 Referenced Standards

4.1 ISO/IEC Standard

ISO/IEC 16022 — International Symbology Specifica-

tion – Data Matrix

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Terms relating to the Data Matrix code symbol

characteristics are defined in ISO/IEC 16022.

5.2 Definitions of terms relating to alphanumeric

characters are as follows:

5.2.1 character separation — the horizontal distance

between the adjacent boundaries of any two adjacent

characters.

1 International Organization for Standardization, ISO Central

Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,

Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30

Website: http://www.iso.ch

SEMI D32-0303 © SEMI 2003 2

5.2.2 character separation, vertical — the vertical

distance between the adjacent boundaries of any two

adjacent characters.

5.2.3 character spacing — the horizontal distance

between the character centerlines of two adjacent

characters.

5.3 Definitions of terms relating to the marking area

are as follows:

5.3.1 mark area — a rectangular area containing the

mark field(s) and the surrounding quiet zone.

5.3.2 mark field — an area within which all mark dots

occur.

5.3.3 quiet zone — an unpatterned, unmarked area that

surrounds a mark field.

5.3.4 TIR — total indicator reading, the difference

between the maximum and minimum distances of a line

from a reference line.

6 Ordering Information

6.1 Content information of mark, as agreed to between

purchaser and supplier

6.2 Number of message characters (up to a maximum

of 20, see Section 7.7.1), as agreed to between

purchaser and supplier.

7 Requirements

7.1 Orientation Corner — The OC location shall be

the lower left corner of the substrate with the pattern

surface up and the long edge at the bottom. Since the

necessary information is encoded in the identification

marks, it is not necessary to distinguish the shapes of

the other corners of the substrate. OC cut shape is not

specified at this time, but it is expected that in the future

a single shape will be established for the next

generation of substrates.

7.2 Shape, Size, and Location of Marking Symbols

7.2.1 The location of the mark field relative to the

orientation corner and the adjacent edges of the sub-

strate shall be as shown in Figure 1. The reference

point of the two-dimensional code symbol, together

with a parallelism requirement, locates the entire mark

field.

7.2.2 The mark field dimensions and the symbols

within the mark field shall be as shown in Figure 2.

7.2.3 Overall mark area dimensions shall be as shown

in Figure 3.

7.2.4 The values of the dimensions shall be as defined

in Tables 1 and 2.

7.3 Data Matrix Code Symbol Dimensions

7.3.1 Each rectangular Data Matrix code symbol shall

be composed of an array of 18 rows and 18 columns, as

shown schematically in Figure 4.

7.3.2 Cell spacing shall be 80 µ m, center to center.

7.3.3 The Data Matrix code symbol shall be

constructed such that it can be read in accordance with

ISO/IEC 16022.

7.4 Alphanumeric Symbol Dimensions

7.4.1 Use of the modified SEMI OCR Character Set as

defined in Table 3 is recommended.

7.4.2 Characters shall be marked in a dot matrix

format, contained within a character window 0.72 mm

high × 0.40 mm high.

7.4.3 Character window separation shall be 0.24 mm

horizontally and 0.16 mm vertically.

7.5 Reference Point for all symbols shall be the center

point of the cell common to the primary border row and

primary border column of the Data Matrix code

symbol.

7.6 Mark Field Dimensions shall be in accordance with

the dimensions D and F given in Table 2. Parallelism

(T) of the top of the mark field within dimension L,

relative to the nearest edge, shall be ≤ 1.0 mm TIR.

7.7 Message Characters

7.7.1 Up to 20 alphanumeric characters in the character

set listed in Table 3 shall be encoded in the two-

dimensional code symbol, and alphanumeric characters

with the same content shall be placed symmetrically

around the two-dimensional code symbol as shown in

Figure 2. The message content is not defined, but it

does not include any check sum characters. It may

include information provided by the glass substrate

supplier, and the remainder of the message characters,

if any, can be used to insert information agreed on

between supplier and purchaser. If the message

contains less than 20 characters, a dash (–) may be

inserted for the unused characters, at the supplier’s

discretion.

7.7.2 The Data Matrix code symbol shall be encoded

with error checking and correcting characters in

accordance with ECC 200 in accordance with ISO/IEC

16022.

7.7.3 Alphanumeric characters shall:

7.7.3.1 Be positioned such that their lower part faces

toward the nearest edge of the glass substrate.

7.7.3.2 Contain message characters identical to those

encoded in the Data Matrix code field.

7.7.3.3 Consist of two sets of two-line strings as shown

in Figure 2.

7.7.4 The order of the alphanumeric characters shall be

as agreed upon between supplier and user.

NOTE 1: A typical sequence could be: The message begins

at the upper leftmost window, progresses horizontally to the

upper rightmost window, continues at the lower leftmost

window and ends at the lower rightmost window.

7.8 Quiet Zones

7.8.1 The space between the Data Matrix code symbol

and adjacent alphanumeric symbols shall be 0.48 mm.

7.8.2 A 0.50 mm wide quiet zone surrounds the entire

mark field.

Table 1 Mark Location Dimensions (see Figure 1)

Letter Symbol Name of Dimension Nominal Value, mm Tolerance, mm

A Edge to Mark Reference Point 15.0 ± 0.5

B Nearest Edge to Mark Reference Point 2.5 ± 0.5

E Edge to Quality Area 5.0

Reference

(See Note 1.)

– S – Reference Line parallel with substrate edge Reference (See Note 2.)

Top of Mark Field to Reference Line Parallelism across Mark Area

Width (L) (see Table 2 and Figure 3)

≤1.0 TIR

NOTE 1: This is a reference dimension.

NOTE 2: This line is a virtual reference line.

Table 2 Mark Field Dimensions (see Figures 2 and 3)

Letter Symbol Name of Dimension Nominal Value, mm

Tolerance, mm

(See Note 1.)

Data Matrix Field Width 1.44

D Mark Field Width 8.32

F Mark Field Height 1.60

G Bottom of Mark to Mark Reference Point 0.20

H Alphanumeric Character Window Height 0.72

I Alphanumeric Character Window Width 0.40

J Alphanumeric Character Window Horizontal Separation 0.24

K Alphanumeric Character Window Vertical Separation 0.16

L Mark Area Width 9.32

M Mark Area Height 2.60

Data Matrix Quiet Zone, Horizontal 0.48

Mark Area Quiet Zone, Width and Height 0.50

Data Matrix Field Height 1.44

NOTE 1: The laser marker can control these field dimensions to much tighter tolerances than it can control the field location. For that reason it

is not necessary to apply tolerances to these values and it is appropriate to define these dimensions with two decimal places.

Table 3 Modified SEMI OCR Character Set

A B C D E F G H I J K L M

N O P Q R S T U V W X Y Z

1 2 3 4 5 6 7 8 9 0 –