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SEMI S21-1103 © SEMI 2003 15 Note 4: Specific protection recommendations for laser ra diation above the maxim u m permissible exposure (MPE). Note 5: Skin protection should be used fo r all exposed areas including head a…

SEMI S21-1103 © SEMI 2003 14

APPENDIX 2

SELECTION OF PERSONAL PROTECTIVE EQUIPMENT

NOTICE: The material in this appendix is an official part of SEMI S21.

A2-1 Introduction

A2-1.1 This appendix provides specific technical information relating to Section 12. In general, it provides Personal

Protective Equipment (PPE) recommendations for specific hazards.

A2-1.2 This appendix is intended to be used as a guide to select PPE along with Section 12.

Table A2-1 PPE Selection Matrix

Personal Protective Equipment (PPE)

Potential

Hazard

Safety

Glasses,

Goggles

Face

Shield

Aprons,

Sleeves, or

Full Body

Suits

Gloves Skin

Protection

Safety

Shoes

Respirator Hardhat Hearing

Protection

(earplugs

or muffs)

Chemical R R

(if splash

hazard)

(if splash

hazard)

R R

(based on

hazard

assess-

ment)

Energized

Electrical

R R

(When

proper for

the

available

fault

current)

(When

proper for

the

available

fault

current)

(for high

voltage –

proper for

the

voltage)

(Insulation

-rated

proper for

the

voltage)

Ionizing

Radiation

UV R

Visible R

IR R

*3, 4

Non-ionizing

Radiation

Noise R

(at levels

>80 dBA)

Extreme

Temperatures

R R

Falling

Objects,

Bumping

Hazards

R R R

Mechanical R R R

Manual

Handling

R R

Oxygen

Deficiency

“R” indicates “Recommended”.

Note 1: Goggles and respirator should be worn if the sources are not isolated or exhausted, and are of a nature that they could enter the eye or be

inhaled.

Note 2: Gloves should be used if radioactive sources that are not sealed are being handled.

Note 3: Protective filters should be considered for long-term viewing (> 10 seconds). Where visible light doesn’t elicit the aversion response.

SEMI S21-1103 © SEMI 2003 15

Note 4: Specific protection recommendations for laser radiation above the maximum permissible exposure (MPE).

Note 5: Skin protection should be used for all exposed areas including head and neck.

NOTICE: SEMI makes no warranties or representations as to the suitability of the safety guidelines set forth herein

for any particular application. The determination of the suitability of the safety guidelines is solely the responsibility

of the user. Users are cautioned to refer to manufacturer' s instructions, product labels, product data sheets, and other

relevant literature, respecting any materials or equipment mentioned herein. These safety guidelines are subject to

change without notice.

By publication of this safety guideline, Semiconductor Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in

this safety guideline. Users of this guideline are expressly advised that determination of any such patent rights or

copyrights, and the risk of infringement of such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI S22-1103a

SAFETY GUIDELINE FOR THE ELECTRICAL DESIGN OF

SEMICONDUCTOR MANUFACTURING EQUIPMENT

This safety guideline was technically approved by the global Environmental Health and Safety Committee.

This edition was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005.

It was available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published

November 2003.

NOTICE: This document contains material that has been balloted and approved by the SEMI

Environmental Health and Safety Committee, but is not immediately effective. This material and the date on

which it becomes effective are included in Delayed Revisions Sections 1 and 2. The provisions of this

information are not an authoritative part of the document until their effective dates. The main body of SEMI

S22-1103a remains the authoritative version. Some or all of the provisions of revisions not yet in effect may

optionally be applied prior to the effective date, providing they do not conflict with portions of the

authoritative version other than those that are to be revised or replaced as part of the deferred change, and

are labeled accordingly. Material that is to be replaced by revisions that are not yet in effect is preceded by a

NOTICE indicating its status.

NOTICE: Paragraphs entitled “NOTE” are not an official part of this document and are not intended to modify or

supercede it.

NOTICE: Conformance to the “should” provisions of this guideline is necessary to declare conformance to this

document. Conformance to “may”, “suggested”, “preferred”, “recommended”, “NOTE”, or “Related Information”

provisions is not necessary to declare conformance.

1 Purpose

1.1 This guideline provides a set of design based electrical safety considerations for production equipment used in

the semiconductor industry.

1.2 Basic product safety concerns can be addressed by satisfying the design, construction, and testing principles set

forth in this document or by satisfying the requirements of applicable electrical safety standards.

2 Scope

2.1 This safety guideline applies to semiconductor manufacturing equipment.

2.2 This document contains the following:

1. Purpose

2. Scope

3. Limitations

4. Reference Standards

5. Terminology

6. Alternate Methods of Conformity

7. Design Philosophy

8. General Considerations

9. Facilities Electrical Connection

10. Protection Against Electric Shock

11. Protection Against Risk of Electrical Fire

12. Bonding to the Protective Conductor

13. Safety Circuits