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SEMI E87.1-0702 © SEMI 2000, 2002 1 SEMI E87.1-0702 PROVISIONAL SPECIFICATION FOR SECS-II PROTOCOL FOR CARRIER MANAGEMENT (CMS) This provisional specification w as technically approved by the Global Informat ion and Cont…

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SEMI E87-0705 © SEMI 1999, 2005 65
R1-3.7.1 If the object has been already associated with the loadport other than the carrier is delivered;
R1-3.7.1.1 This is the case for misloading to a wrong loadport.
R1-3.7.1.2 Cancel the association.
R1-3.7.2 And If the loadport on which the carrier has been delivered is associated to another object, then delete the
object associated with the port on which the carrier is delivered.
R1-3.7.2.1 This is the case for equipment base ID VERIFICATION FAIL.
R1-3.7.2.2 Associate the object with the loadport on which the carrier has been delivered.
R1-3.7.2.3 Then enter WAITING FOR HOST.
R1-3.7.2.4 If ProceedWithCarrier is given, then the carrier is verified.
R1-3.7.2.5 If CancelCarrier is given, then the carrier verification is failed.
R1-3.7.3 If the object has been associated with the loadport on which the carrier is delivered, the carrier is verified.
Change the Carrier ID status to Carrier ID Verified.
R1-3.7.4 If no object has been associated with the loadport on which the carrier is delivered, associate the object
with the loadport. This is the case for associating object created by Notify.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E87.1-0702 © SEMI 2000, 2002 1
SEMI E87.1-0702
PROVISIONAL SPECIFICATION FOR SECS-II PROTOCOL FOR
CARRIER MANAGEMENT (CMS)
This provisional specification was technically approved by the Global Information and Control Committee
and is the direct responsibility of the North American Information and Control Committee. Current edition
approved by the North American Regional Standards Committee on April 30 2002. Initially available at
www.semi.org June 2002; to be published July 2002. Originally published February 2000; previously
published March 2002.
1 Purpose
1.1 This document maps the services and data of SEMI
E87 to SECS-II streams and functions, and data
definitions.
2 Scope
2.1 This is a provisional specification covering
equipment supporting automated access to load ports
from the host point-of-view. The provisional status is
required because of the immaturity of implementations
of integrated equipment with AMHS, and additional
specifications may yet be defined. Also, further
exception handling and error recovery scenarios need to
be defined.
2.2 This document applies to all implementations of
SEMI E87 that use the SECS-II message protocol
(SEMI E5). Compliance to this standard requires
compliance to both SEMI E87 and SEMI E5.
2.3 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Limitations
3.1 This specification applies to semiconductor
equipment with SEMI E15.1 compliant load ports. It
may also be applied to other manufacturing equipment
that supports automated carrier transfer and or contains
an internal buffer.
3.2 This is a provisional specification. The following
areas must be completed before the provisional status is
removed:
1) Any additional services, or changes to existing
services, in Carrier Management must be mapped
to SECS-II messages.
4 Referenced Standards
4.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI 15.1 — Provisional Specification for 300 mm
Tool Load Port
SEMI E39.1 — SECS-II Protocol for Object Services
Standard (OSS)
SEMI E87 — Specification for Carrier Management
(CMS)
NOTE 1: Unless otherwise indicated, all documents cited
shall be the latest published versions.
5 Services Mapping
5.1 This section shows the specific SECS-II streams
and functions that shall be used for SECS-II imple-
mentation of the services defined in SEMI E87, as well
as the parameter mapping for data attached to services.
5.2 Services Message Mapping
5.2.1 Table 1 defines the relationships between SEMI
E87 services and SECS-II messages.
SEMI E87.1-0702 © SEMI 2000, 2002 2
Table 1 Services Message Mapping Table
Service Name Stream, Function SECS-II Message Name
Bind S3,F17/18 Carrier Action Request/Acknowledge
CancelBind S3,F17/18 Carrier Action Request/Acknowledge
CancelAllCarrierOut S3,F19/20 Cancel All Carrier Out Request/Acknowledge
CancelCarrier S3,F17/18 Carrier Action Request/Acknowledge
CancelCarrierAtPort S3,F17/18 Carrier Action Request/Acknowledge
CancelCarrierNotification S3,F17/18 Carrier Action Request/Acknowledge
CancelCarrierOut S3,F17/18 Carrier Action Request/Acknowledge
CancelReservationAtPort S3,F25/26 Port Action Request/Acknowledge
CarrierIn S3,F17/18 Carrier Action Request/Acknowledge
CarrierNotification S3,F17/18 Carrier Action Request/Acknowledge
CarrierOut S3,F17/18 Carrier Action Request/Acknowledge
CarrierReCreate S3,F17/18 CarrierReCreate Rquest/Acknowledge
CarrierRelease S3,F17/18 Carrier Action Request/Acknowledge
CarrierTagReadData S3,F29/30 Carrier Tag Read Data Request/Acknowledge
CarrierTagWriteData S3,F31/32 Carrier Tag Write Data Request/Acknowledge
ChangeAccess S3,F27/28 ChangeAccess
ChangeServiceStatus S3,F25/26 Port Action Request/Acknowledge
ProceedWithCarrier S3,F17/18 Carrier Action Request/Acknowledge
ReserveAtPort S3,F25/26 Port Action Request/Acknowledge
5.3 Services Parameter Mapping
5.3.1 Table 2 maps the SEMI E87 service parameters to SECS-II Data Items.
NOTE 2: Use of parameters not specified for a given message in SEMI E87 is prohibited. SECS-II data items not used for a
given message shall be sent as zero-length items.
Table 2 Service Parameters to SECS-II Data Items Mapping
Parameter Name Range SECS-II Data Item
AccessMode Enumerated:
MANUAL, AUTO
PORTACCESS
AttributeData Any CATTRDATA
AttributeID Text format restrictions per SEMI E39.1, Section 6. CATTRID
CarrierID 1 to 80 characters CARRIERID
CMAcknowledge Enumerated CAACK
CMStatus Structure L,2
1. <CAACK>
2. Status
Data ASCII (20) DATA
DataLength Integer (Un or Sn) DATALENGTH
DataSeg ASCII (20) DATASEG
ErrorCode Enumerated ERRCODE
ErrorText 1 to 80 characters ERRTEXT
LocationID ASCII (20) LOCID
PropertiesList Non-identifier properties L,n
1. L,2
1. <CATTRID
1
>
2. <CATTRDATA
1
>