semi合集-English.pdf - 第448页

SEMI E64-0600 © SEMI 1997, 2005 3 Figure 2 Front Elevati on View

SEMI E64-0600 © SEMI 1997, 2005 2

5.1.6 load port — the interface location on a tool where carriers are placed to allow the tool to process wafers (per

SEMI E15).

5.1.7 manual docking — contact motion controlled by the operator of the cart.

5.1.8 transfer — to either load or unload (per SEMI E15).

6 Requirements

6.1 The following exclusion volume is reserved on SEMI E15.1-compliant tools for the installation of a docking

interface device. This volume is referred to as Zone L.

6.1.1 Interface Zone L — A volume, just above floor level, reserved in SEMI E15.1 for installation of a contact

docking device.

6.1.1.1 The vertical bounds of Zone L are defined by the floor from which Dimension H is measured in SEMI

E15.1 and the Height L

, per Table 1.

6.1.1.2 The depth of Zone L into the tool is L

, measured from the load face plane as defined in SEMI E15.1.

6.1.1.3 The width of Zone L, L

, is the full width of the tool measured at the load face plane.

6.1.1.4 A device mounted in Zone L is to be physically isolated from the tool and should be mounted such that the

tool and tool load port are protected from the impact incurred during docking.

6.1.1.5 Since docking devices must be mounted on the floor in Zone L, the equipment must not require the use of

support pedestals or other support structures under the floor below Zone L.

Table 1 Dimensional Requirements for Docking Zone L

Dimension Value, mm (in.)

Zone L depth, L

100 (3.9)

Zone L width, L

Width of tool

Zone L height, L

100 (3.9)

Figure 1

Side Elevation View

SEMI E64-0600 © SEMI 1997, 2005 3

Figure 2

Front Elevation View

SEMI E64-0600 © SEMI 1997, 2005 4

RELATED INFORMATION 1

APPLICATION NOTES

NOTICE: This related information is not an official part of SEMI E64 but was approved for publication by full letter

ballot procedures.

R1-1 The intent of this standard is (1) To provide manually guided 300 mm carrier transport carts a standard

location for docking to process and other tools; and (2) To facilitate development of a rapid repeatable cart to load

port carrier transfer method or mechanism. Standardization of the size and location will allow for a modularity of the

docking interface while minimizing limits on functionality of the interface.

R1-2 Zone L is defined as an exclusion zone in tools that comply with SEMI E15.1. It is intended that the tool side

of a “cart/tool” docking interface be mounted in this zone.

R1-3 The docking interface (cart or tool side) may include all or some of the following features/functionality:

 Stopping cart motion,

 Dampening impact of docking,

 Compliance, Lead-in guidance for cart,

 Alignment of cart to docking interface, and

 Securely locking position of cart during carrier transfer.

R1-4 It is likely that the alignment error and tolerance stack-up between a device in Zone L and the tool port will

not provide sufficient accuracy alone for accurate pick/placement of a carrier onto the kinematic couplings on the

load port.

R1-5 Possible sources of alignment errors are

 Cleanroom floor height and level,

 Cart wheels and framework,

 Installation accuracy of device in Zone L, and

 Stability of mounting (floor changes).

R1-6 It may be necessary to use additional alignment methods to improve accuracy of carrier placement onto the

kinematic couplings.

R1-7 It is expected that the interface device will be floor-mounted. SEMI E64 allows for automatic docking but

does not specify the means or interfaces required. Cart/interface designers may find it advantageous to add

registration features to the tool or load port which facilitate automatic docking and/or carrier transfer.

NOTE 1: Exclusion Zone L partially overlaps the installation space for the photo-coupled interface in SEMI E23. Compliance

with both standards is possible. Suppliers should be aware of both standards and design accordingly.

R1-8 Compatibility with SEMI E23 can be maintained by reserving the area just above Zone L for installation of

the photo-coupled I/O interface specified in SEMI E23 as shown in Figure R1-1.

R1-9 Zone L should remain clear of any physical obstructions to allow for installation of docking interface devices.

End users may require other features that occupy this space, but should be aware that this could limit cart to tool

docking solutions.