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SEMI E54.13-0303 © SEMI 2003 7 no mapping i s necessary for att ributes and servi ces here in this standard. NOTICE: SEMI makes no warranties or representations as to the suitability o f the standards set forth herei n f…

SEMI E54.13-0303 © SEMI 2003 6

7.10 Sensor, Actuator, Controller (SAC) Object  The

SAC object is the device component responsible for

coordinating the interaction of the device with the

sensory/actuation/control environment. The SAC

object as well as its common required and optional

attributes, services and behavior are described in the

CDM standard. The presentation of object attributes

and services to the EtherNet/IP network shall be as

indicated in Table 5 and Table 6 respectively. Each

attribute and service is shown with its corresponding

identifier (ID) for the S-DS Object.

Table 5 Network Presentation of SAC Object

Attributes

SAC Object Services

CDM Tag Name S-DS

Attribute ID

(See Note 1.)

SacA1 Last Calibration Date 13

SacA2 Next Calibration Date 14

SacA3 Expiration Timer 15

SacA4 Expiration Warning Enable 16

SacA5 Run Hours 17

NOTE 1: Attribute Identifier Values are hexadecimal.

Table 6 Network Presentation of SAC Object

Services

SAC Object Services

CDM Tag Name (SEMI) Name (S-DS) S-DS

Service ID

(See Note 1.)

SacS1 Reset Reset 05

SacS2 Abort Abort 4B

SacS3 Recover Recover 4C

SacS4 Get Attribute Get_Attribute

_Single

SacS5 Set Attribute Set_Attribute

_Single

SacS6 Operate Start 06

SacS7 Restore Default N.A.

(See Note 2.)



SacS8 Publish

Attribute

N.A.

(See Note 3.)



NOTE 1: Service Identifier Values are hexadecimal.

NOTE 2: Restoring defaults in EtherNet/IP is managed at the device

level with services defined for the Identity Object.

NOTE 3: Reporting is controlled in EtherNet/IP by the configuration

of connection related object instances. See the EtherNet/IP

specification for detail.

8 Protocol Compliance

8.1 A method of testing protocol compliance is

required to verify implementation conformance to the

standard.

8.2 The compliance test suite for this protocol is

documented along with the EtherNet/IP specification.

ODVA has established an independent test center that

perform a complete EtherNet/IP protocol compliance

test suite. Visit <http://www.odva.org> for more

information.

9 Specific Device Model Mappings

9.1 The following sections specify mappings for

Sensor Actuator Network Specific Device Models.

9.2 Mass Flow Device — Reference SEMI E54.3 for a

complete specification of the SDM for Mass Flow

Devices. Accordingly, the following mapping rules

apply to the identification tags for the Objects,

Attributes and Services of this model.

9.2.1 Objects — Table 7 shows the mapping of the

SDM objects specified in SEMI E54.3 and the

EtherNet/IP objects.

Table 7 MFD Object Identifiers

SDM Object Name SDM

Object ID

EIP Object Name EIP ID

(See

Note 1.)

Sensor-AI-MF MFD3 S-Analog

Sensor

Sensor-AI-AT MFD4 S-Analog

Sensor

Assembly-MFM MFD5 Assembly 04

Sensor-AI-Aux MFD6 S-Analog

Sensor

Actuator-AO-MF MFD7 S-Analog

Actuator

Controller MFD8 S-Single Stage

Controller

Local Link MFD9 N.A. (See Note 2.)



SISO MFD10 N.A. (See Note 2.)



SISO Setpoint MFD11 N.A. (See Note 2.)



Assembly-MFC MFD12 Assembly 04

NOTE 1: Object Identifier Values are hexadecimal.

NOTE 2: The EtherNet/IP device model provides a different

mechanism for data flow based on the configuration of EPATH type

attributes. See the EtherNet/IP specification for detail.

9.2.1.1 Additional objects may be defined by the

manufacturer in the Device Profile for a given device.

9.2.1.2 All objects listed in Table 7 provide a one-to-

one correlation, with respect to Attributes and Services,

between the SEMI SAN and EtherNet/IP. Therefore,

SEMI E54.13-0303 © SEMI 2003 7

no mapping is necessary for attributes and services here

in this standard.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer' s instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any items

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E54.14-0305

SPECIFICATION FOR SENSOR/ACTUATOR NETWORK

COMMUNICATIONS FOR PROFINET

This specification was technically approved by the Global Information & Control Committee and is the direct

responsibility of the European Equipment Automation Committee. Current edition approved by the

European Regional Standards Committee on November 10, 2004. Initially available at www.semi.org

February 2005; to be published March 2005.

1 Purpose

1.1 This specification is part of the SEMI Sensor/Actuator Network (SAN) suite of standards and defines a specific

communications protocol based on the PROFINET standard. This Network Communication Standard (NCS) taken

together with the SEMI Sensor/Actuator Network standard suite and the PROFINET standard completely and

unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of

networked devices in semiconductor manufacturing equipment.

1.2 PROFINET is a vendor independent, open field bus standard for a wide range of applications in manufacturing,

process and building automation.

1.3 The application model of PROFINET is compatible with the model of PROFIBUS. The same mapping rules

apply.

1.4 PROFINET is optimized for high speed and inexpensive connectivity between automation control systems and

distributed I/O at the device level.

2 Scope

2.1 This document specifies a SAN communications standard based on the PROFINET specification that is in

compliance with SEMI E54.1. As such, it specifies the protocol, services, and behavior that compliant intelligent

devices must support in order to interchange information over this SAN in a method compatible with SEMI E39.

2.2 In conjunction with a SEMI standard SAN Common Device Model (CDM) specification and one or more SEMI

standard Specific Device Model (SDM) specifications (e.g., for a mass flow controller), this Network

Communication Standard (NCS) with the related PROFINET standard describe the data structures, interactions, and

behavior that are characteristic of the various devices on the network. This composite model forms a complete

interoperability standard for communications among intelligent sensors, actuators, and controllers in semiconductor

manufacturing equipment.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Limitations

3.1 This document specifies a semiconductor equipment SAN based solely on PROFINET and is a companion

document to the PROFINET specification, including, by reference, the PROFINET standard; thus, a complete

specification of this standard necessarily includes the PROFINET specifications. There are other semiconductor

equipment SAN communications options. The specifications for these options are not included here.

3.2 The specifications within are strictly enhancements that provide additional capabilities over and above those

currently required by PROFINET. Included throughout this document, primarily in §6, is information paraphrased

from the PROFINET specifications such as: protocol structure, capabilities, options, and limitations. This

information is provided here for reference only and is not intended to provide specification definitions. In all such

areas, refer to the PROFINET specification documents for information. This document is limited to describing

enhancements or limitations to the PROFINET specification that are imposed by this standard.

3.3 A complete specification of the conformance testing procedure shall include the PROFINET protocol

conformance testing specification. Conformance testing shall also include enhancements and limitations to the

PROFINET specification required by this standard.