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SEMI E30.5-0302 © SEMI 2001, 2002 18 12 Remote Commands 12.1 T he purpose of this section is to identify the MSEM required rem ote co m mands, command par ameter s, and valid c omma nds ve rsu s MSEM state s. 12.2 Requir…

SEMI E30.5-0302 © SEMI 2001, 200217

11.2.7.1 There are five types of DEF-LIST tables:

• SITE-DEF-LIST: A list of Sites and their attributes, typically the list of sites to be measured.

• ALIGN-DEF-LIST: A list of alignment sites and their attributes.

• M21-ELEMENT-DEF-LIST: A list of element ID and their low left hand location in M20P or SEMI M20

coordinates.

• M21-ELEMENT-SITE-DEF-LIST: A list of ElementID's and what sites are to be measured within that element.

• M21-ELEMENT-ALIGN-DEF-LIST: a list of ElementID's and the alignment sites to be used at each.

NOTE 2: The attributes are equipment-defined.

11.2.7.2 To support the SiteList, and AlignList, for SEMI M20, M20P and SEMI M21, the following types of tables

must be implemented: SITE-DEF-LIST, ALIGN-DEF-LIST, or M21-ELEMENT-SITE- DEF-LIST, M21-

ELEMENT-ALIGN-DEF-LIST and M21-ELEMENT-DEF-LIST. A host would send a DEF-LIST to equipment

using standard transfer methods for tables as defined by ARAMS (SEMI E58). MSEM requires that the following

columns be included in the DEF-LIST tables. The DEF-LIST-TABLE components table defines the DEF-LIST

column names and their allowable format is given below.

Table 7 SITE-DEF-LIST

Sitename Coordx Coordy Coordsys Site- Attribute(n)

11.2.7.3 For SEMI M21 Coordinate system an additional table is required.

Table 8 M21-ELEMENT-SITE-DEF-LIST

Element id Sitename

Table 9 M21-ELEMENT-DEF-LIST

Element id Coordx Coordy Coordsys m21xsize m21ysize

Table 10 ALIGN-DEF-LIST

Align-Name Coordx Coordy Coordsys Align- Attribute(n)

Table 11 M21-ELEMENT-ALIGN-DEF-LIST

Element id Align-Name

SEMI E30.5-0302 © SEMI 2001, 2002 18

12 Remote Commands

12.1 The purpose of this section is to identify the

MSEM required remote commands, command

parameters, and valid commands versus MSEM states.

12.2 Requirements



The following capabilities are

required:

• StartProcessing

• Stop Processing

• Temporaly Suspend Processing

• Resume Processing

• Abort Processing

• Select Process Programs, Material and/or Sites to

Measure

• Report Location of Material Found within a

cassette

12.3 All the remote commands defined by MSEM are

required unless they have been qualified by the

statement “if the equipment supports this functionality

it shall use this command”. Then, they are only required

if the equipment supports the functionality necessary to

support the command. A good example of this is the

MAP-CASSETTE command if the equipment does not

have the hardware necessary to scan a cassette for the

presence of substrates in slots then the command is not

required by the MSEM. The alphanumeric strings

defined by MSEM for RCMD and CPNAME are

required.

12.4 Definitions

12.4.1 Host Command Parameter (CPNAME/CPVAL)

— a parameter name/value associated with a particular

host command (S2,F49). This document will specify

unique names (CPNAMEs) and values (CPVALs) for

many command parameters. Note that if there are no

associated parameters a zero-length list is sent.

12.5 Remote Commands Description — this section

describes required functionality, suppliers may

implement additional commands. The following remote

commands (RCMDs) must be supported as described

below.

NOTE 2: The terms “current cycle” and “safe point” used

below are to be defined by the supplier.

12.5.1 ABORT  terminate the current cycle prior to

its completion. Abort has the intent of immediately

stopping the process and is used because of abnormal

conditions. Abort makes no guarantee about the

subsequent condition of material except as noted in the

CPNAME ABORT-LEVEL description.

12.5.2 CLEANUP



Process Program deselection,

removal of all material to output locations and any

equipment specific activities needed to transition into

the IDLE state. Completion of this command should

generate a collection event report.

12.5.3 NEXT-MATERIAL



processing of the current

substrate is halted at the first safe point and unloaded to

the target cassette location. Next-material has the intent

of allowing the host to skip measurement of the current

substrate. This is a trigger for processing state

transition from WORKING to UNLOAD.

12.5.4 PAUSE



suspend processing temporarily at

the next safe point. Pause has the intent of resuming

the process at the same point where it was paused.

RESUME or PP-UPDATE may be used to resume the

process.

12.5.5 PP-ASSIGN



instructs the equipment to assign

a process to a carrier ID(s)/location(s) and place the

exchange station in the process queue with the given

priority. Only one assignment is allowed for a exchange

station. Without specifying a priority, the material is

queued with the default priority. Material with equal

priority are queued in the order the PP-ASSIGN

commands are received. If the equipment supports the

functionality of queuing material, it will use this

command.

12.5.6 PP-SELECT



instructs the equipment to make

the requested Process Program(s) available in the

execution area. Additionally, to reduce the number of

Process Programs on the equipment, PP-SELECT may

define the material to be measured, measurement site

locations, and/or the information needed for site

alignment; default values shall be used if this

information is not specified. This is a trigger for the

processing state transition from IDLE to SETTING UP.

All Process Programs specified in the command are to

be validated

12.5.7 PP-UPDATE



provides the ability to alter

Process Program variables during the PAUSED

processing state. Any CPNAMEs specified in PP-

UPDATE will replace the previous definitions. This

command will RESUME the process. If the PP-

UPDATE fails, the Process Program variables present

prior to the PP-UPDATE are retained. If no parameters

values are specified, the defaults are used.

12.5.8 RESUME



resume processing from the point

where the process was paused. This is the trigger for

processing state transition 10, from PROCESS PAUSE.

12.5.9 START



instructs the equipment to initiate

processing. This is the trigger for the processing state

transition from READY to LOAD.

12.5.10 STOP



complete the current cycle, stop in a safe condition and return to the IDLE processing state. Stop

has the intent of stopping the process entirely. The equipment is not required to support the continuation of

processing.

12.6 Host Command Parameters Names (CPNAME)

Table 12 Host Command Parameter Table

CPNAME

CPVAL

Description Range Format

CARRIERBLD L,2

1. L,2

1. CP-CARRIERID **

2. CARRIERID

1. L,2

1. CP- LOCATIONID **

2. (STORAGE)ID

2. L,N

1. L,2

1. PROCESS-BLD-GROUP

2. L,M

N. L,2

1. PROCESS-BLD-GROUP

** Both CP-CARRIERID and CP-LOCATION may be

included if no carrier ID reader is available.

CP-ABORT-LEVEL MSEM defined abort levels

HALT - halt,

goto ABORTED

CLEANUP - halt, preform cleanup procedure,

goto ABORTED

“HALT”

“CLEANUP”

A[7]

CP-ALIGNLIST L,n

1. CP-ALIGNNAME

For the SEMI M20 or M20P Coordinate system

CP-ALIGN-DEF-LIST As defined in Section 9

CP-ALIGNNAME Alignment name A[1..80]

CP-AUTOSTART Defines if a START command is required from an

external source (operator or host) to exit the READY

state. 0 = START command required,

1 = AUTOSTART no external START command

required to begin execution.

0–1 U1

CP-CARRIERID ID of carrier that the measurement data is associated

with.

A[1..16]

CP-ELEMENTID The M21 address for a specific rectangular pattern on

the wafer.

I4[2]