semi合集-English.pdf - 第1298页

SEMI E5-1104 © SEMI 1982, 2004 240 Stream,Function Name (Mnemonic) Direction S17,F1 Data Report Create Request (DRC) M,H->E, reply Description Create a Data Report definition. This func tion allows the referencing of …

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SEMI E5-1104 © SEMI 1982, 2004 239
Stream,Function Name (Mnemonic) Direction
S16,F28 Control Job Command Acknowledge S,H<-E
Description
Indicates success or failure of command request to a control job. If applicable ERRTEXT shall contain information on specific
command parameter names or values that caused the error.
Structure
L,2
1. <ACKA>
2. L,2
1. <ERRCODE>
2. <ERRTEXT>
Exception
2. L,2 IS L,0 if no errors.
Stream,Function Name (Mnemonic) Direction
S16,F29 PRSetMtrlOrder (PRJSMO) S,H->E,reply
Description
This message requests the equipment’s Processing Management Service to use a specific strategy for the order in which
materials are processed.
Structure
<PRMTRLORDER>
Exception
None
Stream,Function Name (Mnemonic) Direction
S16,F30 PRSetMtrlOrder Acknowledge (PRJSMOA) S,H<-E
Description
This message acknowledges the request for change to the material process strategy by reporting back the value requested, if
correct.
Structure
<ACKA>
Exception
None
10.21 Stream 17 Equipment Control and Diagnostics — This stream is a continuation of Stream 2.
Stream,Function Name (Mnemonic) Direction
S17,F0 Abort Transaction (S17F0) S,H<->E
Description
Same form as S1F0
Structure
Exception
SEMI E5-1104 © SEMI 1982, 2004 240
Stream,Function Name (Mnemonic) Direction
S17,F1 Data Report Create Request (DRC) M,H->E,reply
Description
Create a Data Report definition. This function allows the referencing of a Data Source for the items (variables or attributes)
specified in the data report.
Structure
L,4
1. <DATAID>
2. <RPTID>
3. <DATASRC>
4. L,n
1. <VID
1
>
2. <VID
2
>
.
.
.
n. <VID
n
>
Exception
DATAID is a zero length item when the request can be sent in a single block. If RPTID is a zero length item, then the equipment
shall return a value in RPTID by which the host can then reference the report efinition. If RPTID has a value, then the
equipment shall retain this value by which the host can then reference the report definition.
Stream,Function Name (Mnemonic) Direction
S17,F2 Data Report Create Acknowledge (DRCA) S,H<-E
Description
Equipment confirms creation of a Data Report and returns RPTID.
Structure
L,2
1. <RPTID>
2. <ERRCODE>
Exception
If ERRCODE is a zero length item, then no error occurred.
Stream,Function Name (Mnemonic) Direction
S17,F3 Data Report Delete Request (DRD) S,H->E,reply
Description
Delete one or more data reports. This shall cause those reports to be unlinked from any Event Reports to which they were
linked. This shall cause the report to be excluded from any Trace Reports for in which it had originally been included.
Structure
L,n
1. <RPTID
1
>
2. <RPTID
2
>
.
.
n. <RPTID
n
>
Exception
If this message is sent with a zero length list, then all reports shall be deleted.
SEMI E5-1104 © SEMI 1982, 2004 241
Stream,Function Name (Mnemonic) Direction
S17,F4 Data Report Delete Acknowledge (DRDA) S,H<-E
Description
Equipment confirms or indicates any errors on the request to delete Data Reports. All Data Reports which could be deleted shall
be listed in the response and the associated error code shall be included in the list.
Structure
L,2
1. <ACKA>
2. L,m
1. L,3
1. <RPTID
1
>
2. <ERRCODE
1
>
3. <ERRTEXT
1
>
.
.
m. L,3
1. <RPTID
m
>
2. <ERRCODE
m
>
3. <ERRTEXT
m
>
Exception
If ACKA is TRUE, then no errors were encountered, meaning all report requests were completed successfully and a zero-length
list (m = 0) shall be sent.
If some reports could not be deleted, then their RPTIDs shall be given in a space separated list in ERRTEXT.
Stream,Function Name (Mnemonic) Direction
S17,F5 Trace Create Request (TRC) M,H->E,reply
Description
Establish a Trace Report definition.
Structure
L,6
1. <DATAID>
2. <TRID>
3. <CEED>
4. L,n
1. <RPTID
1
>
2. <RPTID
2
>
.
.
n. <RPTID
n
>
5. <TRSPER>
6. L,m (m = {0,8})
1. <TOTSMP>
2. <REPGSZ>
3. <EVNTSRC> (Defines source for start Event)
4. <CEID> (Defines ID of the start Event)
5. <EVNTSRC> (Defines source for stop Event)
6. <CEID> (Defines ID of the stop Event)
7. <TRAUTOD>
8. <RPTOC>
Exception
The list m can be zero-length, or it can contain all eight data items. Since specifying values for each item is optional, each of the
eight items can be zero-length. If the item is zero-length, the format of the item shall be the same format used in other instances
of the S17,F5 message where the value is not zero-length.