semi合集-English.pdf - 第4209页

SEMI F73-1102 © SEMI 2002 11 1 5 6 7 10 11 12 13 9 8 2 B D C E F H G J I K L M N O P Q S R T U 3 4 14 A 15 16 Figure A2-3 Heavily Etched Grain and Twin Boun daries; Worst Cases Should be Counted – E5 Through H15; I and J…

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Figure A2-2
Large Particle in Grids K, L, M, 7 and 8 is Assumed to be an Example of Debris from Sample Preparation
and Should Not be Counted. Lightly Etched Grain and Twin Boundaries in Grids G Through J, 6 Through
13 are Not Significant Defects and are Not Counted.
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Figure A2-3
Heavily Etched Grain and Twin Boundaries; Worst Cases Should be Counted – E5 Through H15; I and J 9,
10 and 11; K9 Through P10. Also Pits at P3, L5, I6, M8, P10, S11, J10 and K10, C10, C11, D10, D11, E12,
J13, L12, C14.
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Figure A2-4
Large Inclusion is Counted in Grids J7, K7, I8, J8 and K8. Pits in A8, C7 and C8 (Same Pit on Grid
Boundary), E9, F8, J9, I12, I15.