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SEMI E30-1103 © SEMI 1992, 2003 73 5 Data Items The following sections specify which data items and variable data ite ms are required. Except for the specified form at restrictions, all data items and variable data items…
SEMI E30-1103 © SEMI 1992, 2003
72
4.12.5.2 Host-Initiated Scenarios
Host Sets OFF-LINE:
COMMENTS HOST EQUIPMENT COMMENTS
Host requests OFF-LINE. S1,F15-->
[IF] Equipment is OFF-LINE
[THEN]:
<--S1,F0 Equipment does not process
requests.
[ELSE] Equipment ON-LINE
<--S1,F16 Equipment acknowledges request
and transitions to OFF-LINE.
<--S6,F11 “Equipment OFF-LINE” event.
Acknowledge S6,F12-->
[END_IF]
Host Sets ON-LINE:
COMMENTS HOST EQUIPMENT COMMENTS
Host requests ON-LINE. S1,F17-->
[IF] Equipment is HOST OFF-LINE
state not active.
[THEN]
<--S1,F18 Equipment denies request
(ONLACK = 1).
[ELSE] Equipment HOST OFF-LINE
state is active.
<--S1,F18 Equipment acknowledges request
(ONLACK != 1).
<--S6,F11 “Control state LOCAL (or
REMOTE)” event.
(only if ONLACK = 0)
Acknowledge S6,F12-->
[END_IF]
SEMI E30-1103 © SEMI 1992, 2003
73
5 Data Items
The following sections specify which data items and
variable data items are required.
Except for the specified format restrictions, all data
items and variable data items follow the definitions
contained in SEMI E5.
5.1 Data Item Restrictions — The following is a subset
of the data items used by SECS-II messages specified
in this standard. Each data item listed in this section is
restricted in its SEMI E5-defined usage. Most are
limited to a single format from their standard list of
formats. Data items used by SECS-II messages
contained in this document, but which have no
restrictions are not duplicated here.
NOTE 21: One data item, ALCD, is restricted in other than its
format. Take note of this restriction as described below.
NOTE 22: The equipment supplier shall document any
restrictions on length or format of CPNAME. Suppliers shall
document the behavior of spaces in a CPNAME. The
maximum length of CPNAME shall be 40. This change
became effective in September 1995.
ACKC7A Format: 51
ALCD Only bit 8 (alarm set/cleared) of the
binary byte is used. Bits 1–7,
denoting alarm category, are not
used.
ALID Format: 5()
CCODE Format: 20, 32, 34, 52, 54
CEID Format: 5()
CPNAME Format: 20
DATAID Format: 5()
DATALENGTH Format: 5()
ECID Format: 5()
LENGTH Format: 5()
PPID Format: 20
RCMD Format: 20
REPGSZ Format: 5()
RPTID Format: 5()
SEQNUM Format: 52
SMPLN Format: 5()
SVID Format: 5()
TEXT Format: 20
TOTSMP Format: 5()
TRID Format: 5()
VID Format: 5()
5.2 Variable Item List — The following variable data
items from the Variable Item Dictionary in SEMI E5
are required. Format restrictions are noted.
DVVAL’s:
AlarmID Format: 5()
EventLimit
LimitVariable
PPChangeName Format: 20
PPChangeStatus
PPError
RcpChangeName
RcpChangeStatus
TransitionType
ECV’s:
EstablishCommunicationsTimeout
MaxSpoolTransmit
OverWriteSpool
TimeFormat
SV’s:
AlarmsEnabled
AlarmsSet
Clock
ControlState
EventsEnabled
PPError
PPExecName Format: 0,20
PPFormat
PreviousProcessState
ProcessState
RcpExecName
SpoolCountActual
SpoolCountTotal
SpoolFullTime
SpoolStartTime
6 Collection Events
Table 6.1 provides the list of collection events required
to support the capabilities addressed within this
standard. Also shown are typical variable data that
would most likely be included in the associated
collection event report and a reference to the event
trigger and to the appropriate section of the standard.
This list does not represent all events that might be
needed to properly monitor/control equipment. Many
events are unique to the specific equipment
characteristics. The needed additions are a matter for
other standards and for collaboration between
equipment supplier and user.
See Section 5.2 for further detail of variable data items.
SEMI E30-1103 © SEMI 1992, 2003
74
Table 6.1 GEM-Defined Collection Events
Event Designation Typical Variable Data Reference
Control-Related Events: Section 3.3
Equipment OFF-LINE ControlState, Clock ON-LINE->OFF-LINE
Control State LOCAL ControlState, Clock REMOTE->LOCAL or
OFF-LINE->LOCAL
Control State REMOTE ControlState, Clock LOCAL->REMOTE or
OFF-LINE->REMOTE
Operator Command Issued OperatorCommand Operator Activity while REMOTE state
is active.
Processing-Related Events: Note: Any transition in the implemented
processing state model must have a
corresponding collection event.
Section 3.4
Processing Started Clock, PreviousProcessState Entry into EXECUTING state.
Processing Completed Clock, PreviousProcessState Normal exit of EXECUTING state.
Processing Stopped Clock, PreviousProcessState Result of STOP command from host or
operator.
Processing State Change Clock, ProcessState,
PreviousProcessState
Any processing state transition.
Alarm Management Events: Section 4.3
Alarm
n
Detected Clock, AlarmID, AlarmsSet, Associated
variable data
ALARM
n
CLEAR->ALARM
n
SET
Alarm
n
Cleared Clock, AlarmID, AlarmsSet ALARM
n
SET->ALARM
n
CLEAR
Equipment Constant Events: Section 4.5
Operator Equipment Constant Change ECID Operator activity
Limits Monitoring: Section 4.2.4
Limit Zone Transition
n
(separate CEID
per variable)
Clock, LimitVariable, EventLimit,
Transition Type
Entry into BELOW LIMIT or ABOVE
LIMIT states.
Process Program Management Events: Section 4.6
Process Program Change PPChangeName, PPChangeStatus Operator activity
Process Program(s) Selected PPExecName Operator/Host activity
Material Movement Events: Section 4.7
Material Received Clock
Material Removed Clock
Spooling Events: Section 4.11
Spooling Activated SpoolStartTime SPOOL INACTIVE->SPOOL ACTIVE
Spooling Deactivated SpoolCountTotal SPOOL OUTPUT->SPOOL
INACTIVE
Spool Transmit Failure Clock, SpoolCountActual
SpoolCountTotal
TRANSMIT SPOOL->NO SPOOL
OUTPUT
Terminal Services Events: Section 4.8
Message Recognition Clock Operator
New Execution Recipe Event RcpChangeName, RcpChangeStatus Section 4.6.2.2
Execution Recipe Change Event RcpChangeName, RcpChangeStatus Section 4.6.2.2
Successful Upload DataSetName Sections 4.6.5.3, 4.6.6.3
Bad Upload DataSetName Sections 4.6.5.3, 4.6.6.3