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SEMI IN TERNA TIONA L STANDA RDS EQUIPMENT AUTOM A TION SOFTWARE Sem iconduct or Equipm ent and Materials Inte rnational
SEMI E141-0705 © SEMI 2005 10
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SEMI INTERNATIONAL STANDARDS
EQUIPMENT AUTOMATION SOFTWARE
Semiconductor Equipment and Materials International
SEMI E4-0699 © SEMI 1980, 19991
SEMI E4-0699
SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE
TRANSFER (SECS-I)
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on February 28, 1999. Initially available at www.semi.org
May 1999; to be published June 1999. Originally published in 1980; previously published January 1999.
1 Introduction
1.1 Revision History — This is the first major revision
since the original release of SECS-I in 1980. Very little
of the original intent of SECS-I has been altered,
although there are a few significant additions. The
changes are summarized in Appendix 1. This
specification has been developed in cooperation with
the Japan Electronic Industry Development Association
Committee 12 on Equipment Communications.
1.2 Scope — The SECS-I standard defines a
communication interface suitable for the exchange of
messages between semiconductor processing equipment
and a host. Semiconductor processing equipment
includes equipment intended for wafer manufacturing,
wafer processing, process measuring, assembly and
packaging. A host is a computer or network of
computers which exchange information with the
equipment to accomplish manufacturing. This standard
includes the description of the physical connector,
signal levels, data rate and logical protocols required to
exchange messages between the host and equipment
over a serial point-to-point data path. This standard
does not define the data contained within a message.
The meaning of messages must be determined through
some message content standard such as SEMI
Equipment Communications Standard E5 (SECS-II).
1.3 Intent — This standard provides a means for
independent manufacturers to produce equipment
and/or hosts which can be connected without requiring
specific knowledge of each other.
1.3.1 Layered Protocol — The SECS-I protocol can
be thought of as a layered protocol used for point-to-
point communication. The levels within SECS-I are the
physical link, block transfer protocol, and message
protocol. (See Related Information R1-1.1.)
1.3.2 Speed — It is not the intent of this standard to
meet the communication needs of all possible
applications. For example, the speed of RS-232 may be
insufficient to meet the needs of transferring mass
amounts of data or programs in a short period of time,
such as might be required by high speed functional test
applications.
1.3.3 Network Support — The method by which
blocks of data are routed to a piece of equipment or find
their way back to the proper host application is not
specified by SECS-I. In a network, the roles of host and
equipment might be assumed by any party in the
network. In this situation, one end of the
communications link must assume the role of the
equipment and the other the role of the host.
1.4 Applicable Documents
1.4.1 Electronics Industries Association Standards
1
EIA RS-232-C — Interface between Data Terminal
Equipment and Data Communication Equipment
Employing Serial Binary Data Interchange
EIA RS-269-B — Synchronous Signaling Rates for
Data Transmission
EIA RS-334 — Signal Quality at Interface Between
Data Processing Terminal Equipment and Synchronous
Communication Equipment for Serial Data
Transmission
EIA RS-422 — Electrical Characteristics of Balanced
Voltage Digital Interface Circuits
EIA RS-423 — Electrical Characteristics of
Unbalanced Voltage Digital Interface Circuits
1.4.2 European Computer Manufacturing Association
2
ECMA/TC24/82/18 — "Network Layer Principles,"
Final Draft (April, 1982)
1.4.3 Japanese Industrial Standards Committees
3
JIS C 6361 — "The Interface between Data Circuit
Terminating Equipment (DCE) and Data Terminal
Equipment (DTE) (25-pin Interface)"
1.4.4 International Organization for Standardization
4
1
EIA Engineering Department, Standards Sales Office, 2001 Eye
Street, N.W., Washington, D.C. 20006
2
European Computer Manufacturing Association, 114 Rue du Rhone,
1204 Geneva, Switzerland
3
Japanese Standards Association, 1-24, Akasaka 4 Chome, Minato-
ku, Tokyo 107, Japan
4
ANSI, 1430 Broadway, New York, NY 10018