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SEMI E81-0600 © 1999, 2 000 13 separately implement these facilities for their o wn use, they can share a common facility across components, or use a combination of separate an d s hared implemen tations. 7.2.8.2 Ser vic…
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• Advanced Process Control Component
• Material Transport and Storage Component
• Factory Labor Component
7.2 Functional Partitioning
7.2.1 This section overviews the functional
responsibilities of the CIM Framework domain
components. Details of the responsibilities are specified
in the individual CIM Framework domain component
specifications.
7.2.2 The domain component responsibilities cover
two types of functions:
• Build-time, or configuration aspect of
manufacturing systems engineering in Figure 4,
which defines and configures the specific entities
in the component, such as the specific machines
and their state models or the wafer carriers and
their initial locations.
• Run-time, or the execution aspect of manufacturing
operations in Figure 4, which executes the
component behaviors, maintains inter-component
relationships, maintains component state and
history and provides run-time access to component
state and behavior.
7.2.3 The initial CIM Framework domain standards do
not address the build-time functions of the components.
These will be added as the standards move from
provisional status to full standards. However, this
functional partitioning section does identify build-time
responsibilities, permitting these build-time functions to
be properly allocated to the correct component as the
CIM Framework evolves.
7.2.4 The components partition CIM Framework
functionality. The components are designed to be
exclusive: no functionality exists in more than one
component. The only exception is that there are some
cross-system functions that are used, specialized or
implemented by most or all of the other components.
These cross-component domain functions are in
separate groups, called Global and Abstract Definitions
Group and Factory Services Group.
7.2.5 The list of responsibilities for a complete MES
solution is far more than the responsibilities of the CIM
Framework components. The CIM Framework focuses
on those functions that serve to integrate applications.
Suppliers and users will provide functional
responsibilities in addition to the standard
responsibilities. The CIM Framework component
responsibilities are also limited by focusing the scope of
the CIM Framework on the run-time needs for wafer
fabrication MES but to not cover the full scope of CIM
solutions for the full semiconductor manufacturing
process.
7.2.6 Sections 7.2.7 through 7.2.20 present the
responsibilities for each of the CIM Framework
components and the groups. Example terminology
specific to semiconductor manufacturing is provided for
clarity. It does not preclude application specialization
for other industries.
7.2.7 Responsibilities of Global and Abstract
Definitions Group
7.2.7.1 The Global and Abstract Definitions group
(defined in SEMI E97) specifies the definitions of
abstract data types and abstract interfaces used
throughout the CIM Framework. These specifications
are separated into a distinct group to enable them to be
specified once and then logically included or inherited
wherever they are subsequently needed.
7.2.7.2 Global Definition Responsibilities
• Provide type definitions for common data
structures to ensure consistent representation.
These items include data types for common
concepts such as coordinates, priorities,
timestamps, and sequences of basic data types.
• Provide type definitions for representations of
historical occurrences.
• Provide definitions for common exceptions used
consistently throughout the CIM Framework.
7.2.7.3 Abstract Interface Responsibilities
• Material architecture: the functions common to
identifying, grouping, moving, locating and
tracking material in the factory. The architecture is
specialized for product material, durables and
consumables. See Section 7.3.2.
• Factory resource architecture: the functions
common to defining, organizing, tracking usage of
and maintaining factory resources including
equipment, sensors, durables, and people. See
Section 7.3.3.
• Job architecture: the functions common to creating,
executing and managing work in the factory. The
job architecture is specialized for material
processing jobs, material transport jobs, resource
maintenance jobs and factory jobs that drive
product material through their process flows. See
Section 7.3.4.
7.2.8 Responsibilities of Factory Services Group
7.2.8.1 The Factory Services group (which is not
actually a component) specifies domain facilities to
support all domain components. The components can
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separately implement these facilities for their own use,
they can share a common facility across components, or
use a combination of separate and shared
implementations.
7.2.8.2 Services in Factory Services Group
• Document management and version management:
functions common to creating, storing, retrieving,
and changing (under change control and version
management) documents such as process recipes,
process flow specifications, and maintenance
specifications.
• Event broker: support for components to publish,
subscribe to and filter events.
• Access security control: support for components to
limit access of system functions to authorized users
and applications.
• Component management: functions for CIM
Framework component registration, start-up,
shutdown, etc.
• History: supports the ability of factory objects to
configure and maintain histories (time-based
sequences of data and events) and to support access
to those histories.
• Data collection: the functions common to data
collectors, including equipment, sensors, and
manual data entry.
7.2.9 Responsibilities of Product Management
Component
7.2.9.1 The Product Management component captures
the state of all product material (work in progress). For
wafer fabrication, this includes wafer and die-level
tracking to support multiple products on a single wafer
and to track known-good-die through wafer probe. The
component also tracks engineering wafers and test
wafers, even though they may not become “product.”
The component implements the common material
architecture functions so product material can be
identified, grouped (product groups, lots, process
groups, transport groups), moved and located in the
factory.
7.2.9.2 Build-time Responsibilities of Product
Management Component
• Configure inventory regions.
• Configure product tracking histories, including
what data to store and data archival mechanisms.
7.2.9.3 Run-time Responsibilities of P roduct
Management Component
• Record and support access to current and historical
product information, including:
• Where material is (and has been) in its process
flow.
NOTE 2: The decision to advance material along its
process flow is in the Factory Operations component.
• Product state (processing, on hold, scrapped,
etc.).
• Material type (product, engineering, filler, etc.).
• User-defined product information.
• Genealogy, batching, allocation to product
requests, the number of times reworked, etc.
• Historical information on what equipment
processed the material, when, with what
process flow specification, recipe and durables,
and by what operator.
• Relations and history to related information in
other components, including material location,
material container, process flow specification,
inventory region, process run data, recipe, etc.
• Notify other components of material information
changes.
• Support creation, maintenance and historical
recording of product groups and relationships
among product groups (such as lots, transport
groups and process batches) including splits and
joins (and resulting product genealogy),
experiments (planned future splits and processing
changes), hold, rework, etc.
NOTE 3: The decision to split, join, batch, move,
rework, etc. is a responsibility outside of the Product
Management component. Product Management records
the results of the decisions.
• Record and support access to material location at
multiple levels of detail: an area, a specific
machine, a specific load port on a machine, a
specific zone in a stocker, a specific wafer slot in a
carrier, or a specific wafer coordinate of a die.
• Including reference to material containers
(cassettes, pods, etc.) holding the product (the
containers are managed by the Durables
Management component).
NOTE 4: Material location is served by the Product
Management component and the Material Transport
and Storage component. The Material Transport and
Storage component is responsible for physically
moving material and recording its location, and the
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Product Management component is responsible for
keeping its material location consistent with Material
Transport and Storage material location information.
• Account for and track material loss.
• Support inventory regions: monitor, report and
capture history of material movement through
physical and logical regions of the factory.
7.2.10 Responsibilities of Durables Management
Component
7.2.10.1 The Durables Management component
manages the durable resources used in wafer
manufacturing, including material containers (cassettes,
SMIF pods, etc.), reticles, fixtures, test probes, etc. The
component implements the generic resource tracking
and maintenance architecture specialized for durables.
The component also implements the common material
architecture behavior so durables can be identified,
grouped and located in the factory.
7.2.10.2 Build-time Responsibilities of Durables
Management Component
• Define the specific durables in the factory (the
inventory of carriers, reticles, etc.).
• Define inventory regions that track the use and
movement of various durable types in a factory (for
example, the reticles assigned to and existing in a
lithography bay).
• Define relationships between durables and the
process steps that use them.
• Define maintenance tasks for durables and what
triggers them.
7.2.10.3 Run-time Responsibilities of Durables
Management Component
• Track durable attributes (location, usage,
contamination exposure, etc.) and state (available,
not available, in use, etc.).
• Maintain relations between durables and other CIM
Framework objects (such as product material
contained in a wafer carrier, the reticles in a reticle
carrier, the process step a reticle is used for, etc.).
NOTE 5: The Material Transport and Storage component
has some responsibility for managing material
containers, such as to move and allocate empty pods, gas
purge and clean pods, etc.
• Maintain, report and record history of durable
attributes, state and relations.
• Support assignment of durables to factory jobs (e.g.
supporting the scheduling of a reticle for use in a
production machine job) and monitor and record
job progress (from the perspective of the durable’s
role).
• Monitor durable maintenance triggers (such as
excessive exposure to contaminants) and
recommend durable maintenance jobs.
• Execute triggered durable maintenance jobs.
• Change durable capabilities.
• Execute durable maintenance jobs (pod
cleaning, reticle inspection and repair, etc.) and
report job progress.
• Record durable maintenance triggers and job
results in resource maintenance histories.
• Collect and report durable utilization and
effectiveness measures.
7.2.11 Responsibilities of Consumables Management
Component
7.2.11.1 The Consumables Management component
manages consumable materials, including gases,
chemicals, etc. The component implements the generic
resource tracking and maintenance architecture to track
consumable usage and quality (e.g., expired resist) and
to enable maintenance based on replenishment levels
and quality expiration. The component also implements
the common material architecture behavior so
consumables can be identified, grouped and located in
the factory.
7.2.11.2 Build-time Responsibilities of Consumables
Management Component
• Define the specific consumables in the factory (the
types of gases, chemicals, etc.).
• Define inventory regions that track the use and
movement of consumable types in a factory (for
example, the equipment fed by a common gas
bottle and feeders).
• Define relationships between consumable types
and the process steps that use them.
• Define maintenance tasks and triggers for testing
the quality of and replacing consumables.
7.2.11.3 Run-time Responsibilities of Consumables
Management Component
• Track consumable attributes and state (supplier’s
lot number, quantity available, usage rate,
expiration date, etc.).
• Maintain relations between consumables and other
CIM Framework objects (the product groups a
particular consumable was used on, the equipment
fed by a common gas bottle, etc.).