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SEMI 30.1-0200 © SEMI 1998, 2000 37 14.4 Event Report a nd ISEM Tabl e T ransfer Command Scenario COMMENT HOST EQUIPMENT COMMENT The equipment is in the IDLE processing state and in the ONLINE REMOTE control state. Host …

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SEMI 30.1-0200 © SEMI 1998, 2000 36
14.3 PP-SELECT Remote Command Scenario
COMMENT HOST EQUIPMENT COMMENT
The equipment is in the IDLE
processing state and in the
ONLINE REMOTE control state.
Host sends a TABLE-DEF S13,F13-->
to the equipment.(See Section 11.)
<--S13,F14 Table Data Acknowledge
Host sends more tables S13,F13-->
if needed.
<--S13,F14 Table Data Acknowledge
Host prepares the remote
command to initiate an
inspection run, including
the “TABLE-AREA-DEF”,
”TABLE-ALIGN-DEF”, and
”ELEMENTLIST”, if required.
Host sends a PP-SELECT S2,F49-->
command specifying a
”CARRIERBLD”.
<--S2,F50 Command Acknowledge
The equipment transitions
from IDLE to SETTING UP to
READY.
START S2,F41-->
<--S2,F42 Host Command Acknowledge
READY -> LOAD.
[WHILE] Not End of Run
LOAD -> WORKING
WORKING -> UNLOAD
UNLOAD -> LOAD
[END WHILE]
LOAD -> STOPPING
<--S13,F13 Equipment sends anomaly table
with additional data,
including the table name
using Table Data Send
command.
Table Data Acknowledge S13,F14-->
The equipment transitions
from STOPPING to IDLE.
SEMI 30.1-0200 © SEMI 1998, 200037
14.4 Event Report and ISEM Table Transfer Command Scenario
COMMENT HOST EQUIPMENT COMMENT
The equipment is in the IDLE
processing state and in the
ONLINE REMOTE control state.
Host defines report S2,F33-->
with AnomalyTableName
and AnomalyTableType
<--S2,F34 Define Report Acknowledge
Link report to S2,F35-->
RunDataComplete event
<--S2,F36 Link Event Report Acknowledge
Enable event S2,F37-->
<--S2,F38 Enable Event Acknowledge
Host sends an ISEM S13,F13-->
table to the equipment.
<--S13,F14 Table Data Acknowledge
Host sends more tables S13,F13-->
if needed.
<--S13,F14 Table Data Acknowledge
Host sends a PP-SELECT S2,F49-->
command specifying a
”CARRIERBLD” <--S2,F50 Remote Command Acknowledge
The equipment transitions
from IDLE -> SETTING UP ->
READY.
START S2,F41-->
<--S2,F42 Host Command Acknowledge
READY -> LOAD.
[WHILE] Not End of Run
LOAD -> WORKING
WORKING -> UNLOAD
UNLOAD -> LOAD
[END WHILE]
LOAD -> STOPPING
STOPPING -> IDLE
<--S6,F11 RunDataComplete event with
AnomalyTableName and
AnomalyTableType.
Event Report Acknowledge S6,F12-->
Host sends Table S13,F15-->
DataRequest
<--S13,F16 Equipment sends requested
table TBLACK=0ifno
errors.
SEMI 30.1-0200 © SEMI 1998, 2000 38
15 GEM Capabilities
The purpose of this section is to specify any SEMI E30
additional capabilities that are required to be supported
by this class of equipment.
15.1 Requirements
15.1.1 This standard requires that the SEMI E30
fundamental requirements and additional capabilities
have been implemented on the ISEM equipment with
the exception of limits monitoring and trace reporting.
If these capabilities are implemented, they shall be
implemented as required by the SEMI E30 document.
The following SEMI E30 additional capabilities
required by ISEM are:
• Dynamic Event Report Configuration
• Variable Data Collection
• Status Data Collection
• Alarm Management
• Remote Control
• Equipment Constants
• Process Program Management
• Spooling
• Trace Data Collection (optional)
• Control (Host-Initiated)
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
standards are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.