semi合集-English.pdf - 第2213页
SEMI E54.##-0705 © SEMI 2005 12 Service ID CDM A-LINK Service Name Alternative Instruction nS6 6 SetAttribute Data Exchange nS7 7 Restore Default Directive #1 Prefix n in CDM service ID represents one of Sai, Sei, Sbi, S…
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Information Value := Attribute Value
Status := Response Information
NOTE 9: The item of Information Name ID for the response message is optional (conditional) information. Representation of
the Status information is implementation specific. The Response Information is dependent on attribute and/or device. However if
the first item of the response information, i.e. Response Code, is zero, it always means successful. Additional data may follow.
7.6.2.2 Service Identifiers — The A-LINK services are mapped for CDM as following tables.
7.6.2.2.1 Device Manager (DM) Object –– Services of the DM object are mapped as shown in Table 10.
Table 10 DM Object Service Identifiers for A-LINK
Service ID
CDM A-LINK
Service Name Alternative Instruction
DmS1 1 Reset Directive
DmS2 2 Abort Directive
DmS3 3 Recover Directive
DmS4 4 GetAttribute Unite Inventory / Unite States
DmS5 5 SetAttribute Unite Inventory
DmS6 6 Execute Directive
DmS7 7 PerformDiagnostics Directive
DmS8 8 PublishAttribute Directive
DmS9 9 Lock Directive
DmS10 10 Unlock Directive
DmS11 11 Get Exception Queue Directive
DmA12 12 Clear Exception Queue Directive
7.6.2.2.2 Sensor Actuator Controller (SAC) Object –– Services of the SAC object are mapped as shown in Table 11.
Table 11 SAC Object Service Identifiers for A-LINK
Service ID
CDM A-LINK
Service Name Alternative Instruction
SacS1 1 Reset Directive
SacS2 2 Abort Directive
SacS3 3 Recover Directive
SacS4 4 GetAttribute Unite Inventory / Unite States
SacS5 5 SetAttribute Unite Inventory
SacS6 6 Operate Directive
SacS7 7 Restore Default Directive
SacS8 8 Publish Attribute Directive
7.6.2.2.3 Active Element (AE) Object –– Services of the AE object are mapped as shown in Table 12.
7.6.2.2.3.1 Because AE class is inherited to any sensor, actuator or controller objects such as Sensor-AI and
Actuator-BO, these services are equipped by such objects.
Table 12 AE Object Service Identifiers for A-LINK
Service ID
CDM A-LINK
Service Name Alternative Instruction
nS1 1 Reset Directive
nS2 2 Abort Directive
nS3 3 Recover Directive
nS4 4 Operate Directive
nS5 5 GetAttribute Data Exchange
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Service ID
CDM A-LINK
Service Name Alternative Instruction
nS6 6 SetAttribute Data Exchange
nS7 7 Restore Default Directive
#1
Prefix n in CDM service ID represents one of Sai, Sei, Sbi, Sbith, Aao, Aeo, Abo and C.
8 Protocol Compliance
8.1 A method to testing protocol compliance is required to verify implementation conformance to this standard. A-
LINK User Forum (AUF) has established a qualified certification mechanism of conformance testing and
interoperability testing. The first laboratory is constituted in Japan. A-LINK conformance test information can be
found at http://www.a-linkuf.com.
9 Specific Device Model Mappings
9.1 Every type of device must have an identifier number. Vendors must apply for an identifier number from the A-
LINK User Organization for every Device Type.
9.1.1 The Device Profile must specify the identifiers for Objects, Attributes and Services for CDM and SDM
components, including data formats and bit mappings for specified parameters, as represented in this document.
9.1.2 The following sections specify mappings for Sensor Actuator Network Specific Device Models.
9.2 Mass Flow Device
9.2.1 MFD Device
Reference SEMI E54.3 for a complete specification of the SDM for Mass Flow Devices.
Accordingly, the following mapping rules apply to the identification tags for the Objects, Attributes and Services of
this model.
9.2.2 Objects
Consistent with SEMI E54.3 and ¶7.4 above, the DM and SAC objects are identified as Object
9.2.2.1 Mapping
Table 13 shows the mapping of the SDM Object specified in SEMI E54.3.
Table 13 MFD Object Identifiers
SDM Object Name SDM Object ID ID Instance
Device Manager (DM) MFD1 1 1
Sensor Actuator Contriller (SAC) MFD2 2 1
Sensor-AI-MF MFD3 34 1 or supplier specific
Sensor-AI-AT MFD4 35 0 / 0 or supplier specific
Assembly-MFM MFD5 32 0 or 1
Sensor-AI-Aux MFD6 36 0 / 0 or supplier specific
Actuator-AO-MF MFD7 37 0 / 1 or supplier specific
Controller MFD8 24 0 / 1
Local Link MFD9 4 0 / 2 or supplier specific
SISO MFD10 38 0 / 0 or supplier specific
SISO-Setpoint MFD11 39 0 / 0 or supplier specific
Assembly-MFC MFD12 33 0 / 0 or supplier specific
#1
/ = numbers for MFM / MFC
9.2.3 Attributes and Services
9.2.3.1 Attributes
The mapping of Attribute tags and Identifiers is defined in ¶7.5.3.2 for the CDM. Basically the
same definitions are applied for attributes in the Mass Flow Device SDM.
9.2.3.2 Services
The mapping of Service tags and Identifiers is defined in ¶7.6.2.2 for the CDM. Basically the
same definitions are applied for attributes in the Mass Flow Device SDM.
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9.2.3.3 MFD Specific Attributes and Services
Some objects appear in MFD SDM use additional attributes
and/or additional services.
9.2.3.3.1 Sensor AI-MF Object
Additional attributes and services are mapped as following tables.
Table 14 Sensor AI-MF Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
A1 192 Flow Totalizer
A2 193 Flow Hours
A5 196 Zero Offset Mode
A6 197 Zeroing Status
A7 198 Autorange Status
Table 15 Sensor AI-MF Object Service Identifiers
Service ID
SDM A-LINK
Service Name
S1 16 Perform Zero Offset
S2 17 Query Supported Gas type
S3 18 Select Programmed Gas Type
S4 19 Insert Gas Type
S5 20 Delete Gas Type
S6 21 Get Gas Calibration Data Value
S7 22 Set Gas Calibration Data Value
S8 23 Autorange
9.2.3.3.2 Actuator AO-MF Object
Additional attributes are mapped as following table.
Table 16 Actuator AO-MF Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
A1 192 Valve Type
A2 193 Override
9.2.3.3.3 Controller Object
This object has no additional attribute and/or service but form of following a couple
of attributes is restricted as Real.
9.2.3.3.4 SISO Object
This object is specific for MFD SDM. Attributes of the object are mapped as following
table.
Table 17 SISO Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
A1 192 Input
A2 193 Output
A3 194 Data Type