semi合集-English.pdf - 第5589页

SEMI P10-0705 © SEMI 1990, 2005 84 < x s : e n u m e r a t i o n v a l u e = " CH R O M E " / > < x s : e n u m e r a t i o n v a l u e = " R E S I S T " / > < x s : e n u m e r a t i o…

100%1 / 7923
SEMI P10-0705 © SEMI 1990, 2005 83
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt Mat eria lsUsed" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "En dM a t e r ia lsUsed" / >
< / xs: com plexType>
- < xs: com plexType nam e= "Subst ra t e Type">
- < xs: sequence>
< xs: elem ent nam e= "Bla nk Le ngt h" t ype
= " xs:double" / >
< xs: elem ent nam e= "Blank W idt h" type= "xs:double "
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Bla nk Thick ne ss" t y pe= "x s:double " / >
< xs: elem ent nam e= "Bla nk Type" type= "xs:st r ing" / >
< xs: elem ent nam e= "Bla nk Gr a de " t ype= "xs:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Bla nk Flat ne ss" type= "xs:dou ble"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Bla nk Flat ne ssUse d" t ype= "xs:double
"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Bla nk Ven dor " t ype= "x s:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Bla nk Birefr ingen ceReqd"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Bla nk Bire fr inge nce Use d"
type
= " xs:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Coa t ing" t ype= "Coa t ingType"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent nam e= "Bla nk I ndex OfRe fra ct ion"
type
= " x s:dou ble"
m inOccurs= "0 " / >
< xs: elem ent nam e= "Bla nk Lot " t ype= "x s:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Bla nk Dat eOfMfg" type= " xs:da t eTim e "
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "EuvBla nk Type"
type
= " EuvBla nkTypeType " m inOccurs= "0 " / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use
= "r e quir ed"
fixed
= "St a rt Subst ra t e " / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "En dSubst r a t e " / >
< / xs: com plexType>
- < xs: com plexType nam e= "Coa t in gType ">
- < xs: sequence>
- < xs: elem ent nam e= "Coa t ingType" >
- < xs: sim pleType>
- < xs: rest riction base= " x s:string">
SEMI P10-0705 © SEMI 1990, 2005 84
< xs: enum erat ion value= "CH ROM E" / >
< xs: enum erat ion value= "RESI ST" / >
< xs: enum erat ion value= "ATTEN UATOR" / >
< / xs: restrict ion>
< / xs: sim pleType>
< / xs: elem ent>
< xs: elem ent nam e= "Coa t ingCom posit ion" t ype= "x s:string"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Coa t ingThick ne ss" t ype= "xs:dou ble"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Coa t ingRe fle ct a nce " t ype= "xs:dou ble"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Coa t ingTransm ittan ce"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Coa t ingW a ve len gt h" t y pe= "x s:double "
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Coa t ingGrade" type= " x s:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Coa t ingPha se " t ype= " x s:double"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Coa t ingOptica lDen sit y"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= " Coat ingLot N um be r" t ype= "x s:string"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Coa t ingD at eTim e" t ype= "x s:da t e Tim e "
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Coa t ingM ask Ve ndorApplie d"
type
= " xs:boolean" m inOccurs= "0 " / >
< xs: elem ent nam e= "Coa t ingEquipUse d" t ype= "x s:string"
m inOccurs
= " 0 " / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= " p1 0 St a r t " t ype= "x s:st r ing" use= " re quire d"
fixed
= "St a rt Coa t ing" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "EndCoa t in g" / >
< / xs: com plexType>
- < xs: com plexType nam e= "EuvBla n kTypeType">
- < xs: sequence>
< xs: elem ent nam e= "EuvBla nk Type" t ype= " x s:strin g" / >
< xs: elem ent nam e= "EuvFla t n essFront " type= "x s:st r ing" / >
< xs: elem ent nam e= "EuvFla t n essBa ck"
t ype= "x s:st r ing" / >
< xs: elem ent nam e= "EuvMu lt ilayer Com posit ion"
type
= " x s:st r ing" / >
< xs: elem ent nam e= "EuvCa ppingCom posit ion"
type
= " x s:st r ing" / >
< xs: elem ent nam e= "EuvMm rW avelengt h" type= "xs:st r in g"
/ >
SEMI P10-0705 © SEMI 1990, 2005 85
< xs: elem ent nam e= "EuvMe a nPea k Re flect ivit y"
type
= " xs:st r ing" / >
< xs: elem ent nam e= "EuvPe akRe fle ct ivit yUniform ity"
type
= " xs:st r ing" / >
< xs: elem ent nam e= "EuvAbsor berCom posit ion"
type
= " x s:st r ing" / >
< xs: elem ent nam e= "EuvAbsor berOpt icalPrope rt ie s"
type
= " x s:st r ing" / >
< xs: elem ent nam e= "EuvBla nkRe sist ance" type= "xs:st ring"
/ >
< xs: elem ent nam e= "EuvEx pa nsionCoeff" t ype= "x s:st ring" / >
< / xs: sequence>
< xs: at t ribut e nam e
= "groupN am e " t ype= " x s:st r ing"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt Eu vBla nkType " / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "En dEuvBla n k Type " / >
< / xs: com plexType>
- < xs: com plexType nam e= "W a ferExposu reD a t a ">
- < xs: sequence>
< xs: elem ent nam e= "W a fe r Exposur e N um e r ica lAper a t u r e "
type
= " xs:dou ble" / >
< xs: elem ent nam e= "
W a fe rEx posur eSigm a " type= "xs:double"
m inOccurs
= " 0 " / >
- < xs: sequence m inOccurs= " 0 ">
< xs: elem ent nam e= "W a fe rExposu reSigm a I nne r"
type
= " xs:st r ing" / >
< xs: elem ent nam e= "W a fe rExposu reSigm a Out e r"
type
= " xs:st r ing" / >
< / xs: sequence>
< xs: elem ent nam e= "W a fe rExposu re I llum ina t ion"
type
= " xs:st r ing" / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e
nam e= " p1 0 St a r t " t ype= "xs:st r in g" use= "require d"
fixed
= "St ar t W a ferEx posu re D a t a" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "En dW a ferEx posu r eD a t e " / >
< / xs: com plexType>
- < xs: com plexType nam e= "Ae ria lI m age Da t a ">
- < xs: sequence>
< xs: elem ent nam e= "Aim W avele ngth" t ype= "xs:double " / >
< xs: elem ent nam e= "Aim I nt ensityVa r iat ionDelta "
type
= " xs:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "
Aim Flux I nt e nsit yD elt a "
type
= " xs:dou ble" / >
< xs: elem ent nam e= "Aim CdD elt a " type= " xs:double" / >
< / xs: sequence>