semi合集-English.pdf - 第1149页

SEMI E5-1104 © SEMI 1982, 2004 91 Stream,Function Name (Mnemonic) Direction S3,F19 Cancel All Carrier Out Request S,H->E, reply Description This message is used to can cel all pending carrier out r e quests. Structure…

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SEMI E5-1104 © SEMI 1982, 2004 90
Stream,Function Name (Mnemonic) Direction
S3,F17 Carrier Action Request M,H->E,reply
Description
This message requests an action to be performed for a specified carrier. If multi-block, this message must be preceded by the
S3,F11/F12 transaction.
Structure
L,5
1. <DATAID>
2. <CARRIERACTION>
3. <CARRIERID>
4. <PTN>
5. L,n n = number of carrier attributes
1. L,2
1. <CATTRID
1
>
2. <CATTRDATA
1
>
.
.
n. L,2
1. <CATTRID
n
>
2. <CATTRDATA
n
>
Exception
If n = 0, then no carrier attributes are included. If CARRIERID is not a zero-length item, then PTN may be omitted (a zero-
length item). ATTRID and ATTRDATA may be substituted for CATTRID and CATTRDATA respectively.
ReticlePodLocationID may be used as one of <CATTRID> when the CARRIERACTION is PodRelease and the carrier is not at
a Load Port.
Stream,Function Name (Mnemonic) Direction
S3,F18 Carrier Action Acknowledge S,H<-E
Description
This message acknowledges the carrier action request.
Structure
L,2
1. <CAACK>
2. L,n
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
If n = 0, no errors exist.
SEMI E5-1104 © SEMI 1982, 2004 91
Stream,Function Name (Mnemonic) Direction
S3,F19 Cancel All Carrier Out Request S,H->E, reply
Description
This message is used to cancel all pending carrier out requests.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F20 Cancel All Carrier Out Acknowledge S,H<-E
Description
This message acknowledges the Cancel Carrier Out request.
Structure
L,2
1. <CAACK>
2. L,n
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
If n = 0, no errors exist.
Stream,Function Name (Mnemonic) Direction
S3,F21 Port Group Definition S,H->E, reply
Description
This message defines the port in a port group and provides the initial port access.
Structure
L,3
1. <PORTGRPNAME>
2. <PORTACCESS>
3. L,n
1. <PTN
1
>
.
.
n. <PTN
n
>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 92
Stream,Function Name (Mnemonic) Direction
S3,F22 Port Group Definition Acknowledge S,H<-E
Description
This message acknowledges the port group definition
Structure
L,2
1. <CAACK>
2. L,n
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
If n = 0, no errors exist.
Stream,Function Name (Mnemonic) Direction
S3,F23 Port Group Action Request S,H->E, reply
Description
This message requests an action be performed for a port group. The access mode may be changed or the port group may be
deleted.
Structure
L,3
1. <PGRPACTION>
2. <PORTGRPNAME>
3. L,m
1. L,2
1. <PARAMNAME
1
>
2. <PARAMVAL
1
>
.
.
m. L,2
1. <PARAMNAME
m
>
2. <PARAMVAL
m
>
Exception
If m = 0, then no parameters are provided.