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SEMI E109-0305 © SEMI 2001, 2005 32 # Current State Trigger New (Sub-)State Action Comment 16 READING ID ID read fail – A reticle ID read fails on a previously instantiated Reticle. RETICLE WAITING FOR HOST 17 REJECTED H…

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SEMI E109-0305 © SEMI 2001, 2005 31
# Current State Trigger New (Sub-)State Action Comment
6 (no state) A reticle is instantiated via a
ReticleID read and no particle
inspection is required.
QUALIFIED Data required to be
available for this event
report:
ReticleLocationID
7 (no state) A reticle is instantiated via a reticle
ID read and Host based ID
verification is required.
RETICLE
WAITING FOR
HOST
Data required to be
available for this event
report:
ReticleLocationID
8 RETICLE NOT
PRESENT
A Reticle Pod load port receives a
previously instantiated reticle pod
for which the equipment holds the
content map attribute.
WAITING
QUALIFICATION
9 WAITING
QUALIFICATION
The equipment has begun to qualify
a previously instantiated reticle.
READING ID
10 RETICLE
QUALIFICATION
Equipment based: Equipment
decides based on preset criteria that
a reticle is suited for use.
Host based – The equipment
receives the ProceedWithReticle
Service.
QUALIFIED Reticle qualification
includes both ID
verification and quality
verification. Reticle is
able to be used.
11 QUALIFIED Host based: The equipment receives
a Re-qualify service.
PARTICLE
INSPECTION
Start reticle
inspection.
12 RETICLE
QUALIFICATION
Equipment based – Equipment
determines that an incorrect reticle
has been delivered or that a reticle
inspection failed.
Host based – The equipment
receives a RejectReticle service from
the host.
Operator based – An operator issues
a RejectReticle command from the
equipment operator interface.
REJECTED Data required to be
available for this event
report:
ReticleLocationID
Reject Reason
13 REJECTED Host based – The equipment
receives a Re-qualify service.
Equipment based – A re-inspection
is automatically triggered by the
Equipment.
PARTICLE
INSPECTION
Start reticle
inspection.
14 QUALIFIED
RETICLE
Host based - The equipment receives
a RejectReticle service from the
host.
Equipment based -Inspection results
of the reticle are expired.
Operator based – An operator issues
a RejectReticle command from the
equipment operator interface.
REJECTED
15 RETICLE ID
VERIFICATION
Equipment based – The reticle ID is
verified to be the correct one and a
particle inspection is required.
Host based – The equipment
receives a ProceedWithReticle
Service and a particle inspection is
required.
PARTICLE
INSPECTION
Comment – this
transition occurs when
particle inspection is
needed.
SEMI E109-0305 © SEMI 2001, 2005 32
# Current State Trigger New (Sub-)State Action Comment
16 READING ID ID read fail – A reticle ID read fails
on a previously instantiated Reticle.
RETICLE
WAITING FOR
HOST
17 REJECTED Host Based – The equipment
receives an OktoUseReticle service.
Operator based – An Operator
issues an OktoUseReticle service
from the equipment operator
interface.
QUALIFIED
18 QUALIFIED For Exposure Equipment: An
exposure process has started.
For Reticle Inspection Equipment: A
Reticle Inspection has started.
For Bare Reticle Stockers: A reticle
kitting has started.
IN USE This transition should
take place as soon as
the needed physical
movement of a reticle
for processing or
inspection has begun.
19 IN USE For Exposure Equipment: A reticle
exposure process has finished.
For Reticle Inspection Equipment:
An inspection process has finished.
For Bare Reticle Stockers — The
reticle has been deselected for kitting
or kitting has been completed.
QUALIFIED
20 RETICLE AT
EQUIPMENT
Reticle pod containing the reticle is
removed from the machine.
- Delete
reticle
object.
21 RETICLE AT
EQUIPMENT
Reticle has been manually removed
from the equipment.
- Delete
reticle
object.
Abnormal situation
22 RETICLE AT
EQUIPMENT
Via service: Reticle object has been
destroyed via a CancelBind,
CancelReticleTransferJob,
CancelPodNotification, or
CancelMoveReticle service from the
host prior to the Reticle being
physically read.
Via equipment based verification
failure: A reticle instantiated via
Bind, ReticleTransferJob,
PodNotification, Pod Tag read (for a
pod tag that holds the contentmap
attribute of the pod) or MoveReticle
service failed equipment based
verification and the equipment
destroys the reticle object.
- Delete
reticle
object.
Abnormal situation
SEMI E109-0305 © SEMI 2001, 2005 33
14.5 Reticle Allocation State Model
14.5.1 The purpose of the Reticle Allocation State Model is to define the host’s view of a reticle’s allocation state.
14.5.2 Reticle Allocation State Model Diagram
Reticle Allocation State
Not Allocated
Allocated
1
2 3
4
Figure 8
ReticleAllocation State Model Diagram
14.5.3 Reticle Allocation State Definition
14.5.3.1 RETICLE ALLOCATION STATE — The super state of NOT ALLOCATED and ALLOCATED.
14.5.3.1.1 NOT ALLOCATED — A substate of RETICLE ALLOCATION STATE, this state is active when the
reticle is not allocated to a lot in the queue or not selected for inspection. For Bare Reticle Stockers – not kitted
and not currently selected for kitting.
14.5.3.1.2 ALLOCATED — A substate of RETICLE ALLOCATION STATE, this state is active when the reticle is
allocated to one or more lots in the queue or selected for inspection. For Bare Reticle Stockers – allocated includes
being selected for kitting or already kitted.
14.5.4 Reticle Allocation State Transition Table — Table 14 indicates the triggers and the expected behavior of the
instantiated reticle in regards to the allocation state.
Table 14 Reticle Allocation State Transition Definition
# Current State Trigger New (Sub-) State Action Comment
1 - A reticle is instantiated. NOT ALLOCATED
2 NOT
ALLOCATED
Production Equipment: The reticle becomes
allocated to a pre-processing or processing
lot.
Inspection Equipment: The reticle becomes
allocated to an inspection.
Bare Reticle Stocker: The reticle is selected
for kitting.
ALLOCATED