semi合集-English.pdf - 第5545页

SEMI P10-0705 © SEMI 1990, 2005 40 </xs:sequence> <xs:sequence minOccurs="0" maxOccurs="unbounded"> <xs:element name="TopPellicleType" type="xs:string"/> <xs:s…

SEMI P10-0705 © SEMI 1990, 2005 39

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="TitleData" type="TitleDataType"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="BarcodeData"

type="BarcodeDataType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="JobOnlyApprovalReqd"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="JobWithPatternsApprovalReqd"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="PatternApprovalReqd"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="AllPatternsApprovalReqd"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="ApprovalReqd" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="ReviewReqd" type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SerialNumber" type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="MirrorMask" type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="MaskRotation" type="xs:string"/>

</xs:sequence>

<xs:element name="Substrate" type="SubstrateType"/>

<xs:sequence minOccurs="0">

<xs:element name="PhaseShift" type="PhaseShiftType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="Ut1xUncut" type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="Process" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="ProcessEtchingType"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CustomerSpec" type="xs:string"/>

<xs:element name="CustomerSpecRevision"

type="xs:string"/>

SEMI P10-0705 © SEMI 1990, 2005 40

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="TopPellicleType" type="xs:string"/>

<xs:sequence minOccurs="0">

<xs:element name="TopPellicleCentralityError"

type="XYRType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="Price" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="BottomPellicleType"

type="xs:string"/>

<xs:sequence minOccurs="0">

<xs:element

name="BottomPellicleCentralityError" type="XYRType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="Price" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="GuidesReqd" type="xs:string"/>

<xs:sequence minOccurs="0">

<xs:element name="Price" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="Centrality" type="XYRType"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="Registration"

type="RegistrationType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrClosure" type="xs:string"/>

<xs:sequence minOccurs="0">

<xs:element name="RegistrClosureReferenceOnly"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="RegistrClosureEquipReqd"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="EquipSiteReqd"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrClosureBegin"

type="xs:string"/>

<xs:element name="RegistrClosureEnd"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

SEMI P10-0705 © SEMI 1990, 2005 41

<xs:element name="ButtingError" type="xs:double"/>

<xs:sequence minOccurs="0">

<xs:element name="ButtingErrorMethod"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="CdGroup" type="CdGroupType"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="CdSet" type="CdSetType"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="CdXyDefinition"

type="CdXyDefinitionType"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="CdIsoDenseDefinition"

type="CdIsoDenseDefinitionType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="MinMaskFeatureSize"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="MinCornerToCornerGap"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PercentClear" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="OpcDefinition"

type="OpcDefinitionType"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="DefectDefinition"

type="DefectDefinitionType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="InspectionRefLocation"

type="XYType"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="SurfaceDefinition"

type="SurfaceDefinitionType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="InspectThroughPellicle"

type="xs:boolean"/>

<xs:element name="DefectDefinition"

type="DefectDefinitionType"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="SemPhoto" type="SemPhotoType"/>

</xs:sequence>

<xs:sequence minOccurs="0">