semi合集-English.pdf - 第1717页
SEMI E40.1-0705 © SEMI 1996, 2005 4 Attribute Name Attribute Da ta Form: SECS-II Structure “PRMtlNameList” When MF = 13 (0x0d) (carriers) L,n n=number of carriers 1 . L,2 1. <CARRIERID 1 > 2. L,j j=number of slots …
SEMI E40.1-0705 © SEMI 1996, 2005 3
8 Implementation Details
8.1 Use of Object Services — Several capabilities of the Processing Management Services are accessed through the
Object Services Standard. Whan a Process Job has been created, (PRJOBID is valid), then its attributes can be read
and written using the Object Services GetAttr and SetAttr messages.
8.1.1 E39 Object Services shall be used for access to ProcessJob attributes. The GetAttr service may be used for all
ProcessJob attributes and the SetAttr service may be used on only those attributes whose Access is set to RW.
8.2 Multi-Block Messages — Processing Management Services is protocol independent and therefore, makes no
mention of SECS-II multi-block access and grant messages. When these Service use the SECS-II protocol, then
S16F3,F5 shall be preceded by an S16F1/S16F2 access request/grant message exchange when the message will be
multi-block.
9 SECS-II Attribute Definitions
9.1 Process Job Object SECS-II Attributes Definitions — The following are the SECS-II structure definitions for
the E40 ProcessJob object.
Table 3 Process Job SECS-II Attribute Definitions
Attribute Name Attribute Data Form: SECS-II Structure
“ObjID” <PRJOBID> (Conforms to the restrictions of ObjID as specified in SEMI E39.1, §6.)
“ObjType” “ProcessJob”
“PauseEvent” L,n n=number of collection events
1. <CEID
1
>
…
n. <CEID
n
>
CEID restricted to format U()
“PRJobState” <PRSTATE> PRJobState
PRSTATE enumerated as follows:
51 (U1)
Enumerations:
0 – QUEUED/POOLED
1 – SETTING UP
2 – WAITING FOR START
3 – PROCESSING
4 – PROCESS COMPLETE
5 – (Reserved)
6 – PAUSING
7 – PAUSED
8 – STOPPING
9 – ABORTING
10 – STOPPED
11 – ABORTED
SEMI E40.1-0705 © SEMI 1996, 2005 4
Attribute Name Attribute Data Form: SECS-II Structure
“PRMtlNameList” When MF = 13 (0x0d) (carriers)
L,n n=number of carriers
1. L,2
1. <CARRIERID
1
>
2. L,j j=number of slots
1. <SLOTID
1
>
:
j. <SLOTID
j
>
:
n. L,2
1. <CARRIERID
n
>
2. L,k k=number of slots
1. <SLOTID
1
>
:
k. <SLOTID
k
>
When MF = 14 (0x0e) (substrate)
L,n n=number of material (substrate)
1. <MID
1
> substrate ID
…
n. <MID
n
>
MID restricted to format A
“PRMtlType” <MF>
MF restricted to format B
MF Value Description
13 (0x0d) carriers (e.g. FOUP, SMIF pod, cassette)
14 (0x0e) substrate (e.g. wafer, mask, flat panel)
other not valid for E40 material
“PRProcessStart” <PRPROCESSSTART>
“PRRecipeMethod” <PRRECIPEMETHOD>
“RecID” <RCPSPEC>
“RecVariableList” L,n n=number of recipe variables
1. L,2
1. <RCPPARNM
1
>
2. <RCPPARVAL
1
>
…
n. L,2
1. <RCPPARNM
n
>
2. <RCPPARVAL
n
>
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Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
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consent of SEMI.
SEMI E41-95 © SEMI 19951
SEMI E41-95
EXCEPTION MANAGEMENT (EM) STANDARD
1 Purpose
1.1 Interactive exception handling enhances the error
recovery ability while maintaining automated control in
the factory. This standard addresses the
communications needs within the semiconductor
manufacturing environment with respect to equipment
exception handling.
1.2 This standard specifies capabilities to be provided
by the exception agent for effective reporting and
interaction with respect to abnormal situations in the
equipment. It describes the concept of exception
management, the behavior of the equipment in relation
to interactive exception handling, and the messaging
services which are needed to provide the functionality.
1.3 The communications services defined here will
enable standards-based interoperability of independent
systems. They shall allow application software to be
developed which can assume the existence of these
services and allow software products to be developed
which offer them.
1.4 Implementation of automated exception
management will help reduce error recovery time and
avoid changing from automatic to manual equipment
control in many situations. The adoption of the
standards described will greatly reduce the effort
required to integrate compliant equipment components.
Compliance requires a specific set of standard services.
2 Scope
2.1 The current scope of this standard is interactive
exception handling within a cluster tool.
2.2 While the functionality provided may be applied to
other multi-resource equipment, it may not provide the
flexibility required for automated management and
command by the factory of all types of equipment. It is
anticipated that this standard will be extended to
accommodate management of exceptions in other types
of multi-resource equipment and by the factory of all
types of equipment.
2.3 This standard supports exception condition
reporting, including alarms, by an exception agent to a
decision authority. The exception agent also has the
ability to enable and disable reporting on each
exception condition.
2.4 Interactive exception handling is supported
through selection by the decision authority of recovery
actions in certain situations. The recovery actions are
performed by the exception agent with the goal of
resolving the abnormal situation and allowing normal
equipment operation to continue.
2.5 This standard presents a solution from the
concepts and behavior down to the messaging services.
It does not define the messaging protocol.
2.6 A messaging service includes the identification
that a message shall be exchanged and definition of the
data which is contained in that message. It does not
include information on the structure of the message,
how the data is represented within the message, or how
the message is exchanged. This additional information
is contained within the message protocol.
2.7 The defined services may be applied to multiple
protocols. Information on the mapping of exception
management services to special protocols (e.g., SECS-
II) are added as adjunct standards.
2.8 The services assume a communications
environment in which a reliable connection has been
established between the user of the services and the
provider of the services. Establishing, maintaining,
releasing a connection, and handling communication
failures is beyond the scope of this standard.
3 Referenced Standards
3.1 SEMI Standards
3.2 The following SEMI
1
standard is related to the
Exception Management standard:
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
4 Definitions
The following definitions are arranged in alphabetical
order. Some are defined using terms defined elsewhere
within this section. No references beyond this section
should be necessary for a basic understanding of these
terms.
agent — an intelligent system within a factory that
provides one or more service resources and uses the
services of other agents. A generalization of host,
equipment, cell, cluster, cluster module, station
controller, work station. Agents are associated with a
physical system or a collection of physical systems,
including computer platforms.
1 These documents can be obtained from Semiconductor Equipment
and Materials International, 3081 Zanker Road, San Jose, CA 95134,
408.943.6900.