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SEMI E81-0600 © 1999, 2 000 17 etc.), and inv entory regi ons (see Section 7.3.3 for a description of the factory m odel of resources). • Define the (initial or nominal) capabilities of the factory and area resources, in…
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7.2.12.5 Run-time Responsibilities of Specification
Component
• Create a fully-bound process operation from a
process operation specification.
• Create a Process Flow Context (PFC) from a
product specification (create the initial process
flow for a product).
NOTE 9: The PFC is the “pointer” marking the
current step in a process flow.
• Transition the PFC from the current process
operation to the next process operation in the flow
(move along the process flow).
NOTE 10: The decision to move is the responsibility of
other components. The Specification component records
the decision.
• Create a PFC from an existing PFC (for example,
to support splitting of a product group).
• Create a Process Flow Iterator (PFI) from a product
specification (create an initial process flow iterator
for a product).
NOTE 11: The PFI is a process flow navigation aid to
look ahead or look behind at steps in a process flow
without actually incrementing the PFC. This allows
scheduling and other functions to determine what steps
are possible and to use processing history in determining
what steps to take next.
• Create a PFI from an existing PFI (for example, to
support evaluating among alternatives).
• Use the PFI to traverse forward and backward
through a process flow.
• Using the results of executing process flow
traversal logic (the factory job control or
process job control does the actual execution of
traversal logic to decide among alternate paths).
• Provide query support for the contents and
relationships of process operation specifications
and process operations.
• Maintain relationships of active process flows to
the factory jobs, production machine jobs, and
transport jobs that are implementing the process
flow.
• Maintain relationships of active process flows
(process flow contexts) to product groups (e.g.
process groups, transport groups, etc.) and product
group histories for recording the results of
executing process flow steps.
• Maintain relationships of process flow
specifications to process capabilities and process
resources.
• Support effectivity changes to process flows and
process operation specifications (if the process
flow version changes for the current product group
on the flow, be responsive to those changes).
7.2.13 Responsibilities of Factory Operations
Component
7.2.13.1 The Factory Operations component provides
support for maximizing factory effectiveness through
efficient use of factory resources to satisfy product
demand and planned objectives. Examples of overall
factory effectiveness measures are on-time delivery,
profit margin, profit rate, cost per wafer, yield, overall
equipment effectiveness, cycle time, etc. The Factory
Operations component also provides the interface to the
enterprise planning systems to commit the factory to
fulfill product requests and to communicate factory
capacity and production capability to enterprise
planning. The product requests also provide a
placeholder for order information (such as quantity, due
date, priority, etc.) and are part of the link to material
tracking at the enterprise level. Given the factory-wide
scope of Factory Operations, this component owns the
overall factory resource model of machines, areas,
inventory regions, etc.
7.2.13.2 Factory Operations may not have exclusive
responsibility for maximizing all factory objectives.
The Production Machine component maximizes the use
of process resources (chambers, internal storage,
production batching, etc.), the Material Transport and
Storage component maximizes the use of transport and
storage resources (transport vehicles, transport paths,
storage locations, etc.), the Equipment Tracking and
Maintenance component maximizes equipment
availability and capability, etc. The business logic and
decision-making methods may be distributed to
improve overall enterprise effectiveness (Enterprise
functions), overall factory effectiveness (Factory
Operations functions) and overall equipment
effectiveness (Production Machine, Material Transport
and Storage and other functions). The CIM Framework
provides flexibility, enabling the spectrum from
centralized, enterprise-wide or factory-wide operations
to distributed, resource-focused operations with
coordination to achieve factory-wide effectiveness. The
CIM Framework Job Architecture is critical to enabling
this flexibility (see Section 7.3.4).
7.2.13.3 Build-time Responsibilities of Factory
Operations Component
• Define the factory model of resources (machines,
people, durables, etc.), areas (bays, lines, cells,
SEMI E81-0600 © 1999, 200017
etc.), and inventory regions (see Section 7.3.3 for a
description of the factory model of resources).
• Define the (initial or nominal) capabilities of the
factory and area resources, including factory
capacity, area capacity and process capability
(detailed capabilities of the machines, people, etc.
are the responsibility of other components).
7.2.13.4 Run-time Responsibilities of Factory
Operations Component
• Dynamically receive product requests (from the
enterprise or internally) and map them to product
work-in-progress and planned material release (lot
starts).
• Associate material to a process flow (in the
Specification component) for the product.
• Consolidate product demand in the factory.
• Request Factory Jobs or modify existing
Factory Jobs to drive material through its
process flows, in response to product requests.
• New Factory Jobs for new material release,
• Modify existing Factory Jobs (and
associated material model and assigned
process flow) for assigning new or modified
product requests to material in process.
• Set or modify product material quantity and due
date(s) and other scheduling support
information (such as priority and planned profit
margin).
• Execute Factory Jobs to drive material through its
process flow, using scheduling and dispatching
services of the Scheduling component and
requesting work from Production Machine,
Material Transport and Storage, Equipment
Tracking and Maintenance, and Factory Labor
components.
• Based on factory state (material process state,
material due date and priority, material
location, equipment state, equipment process
capability, operator availability and
qualification, etc.) and where the material is in
its process flow, request and track Production
machine jobs, transport jobs, maintenance jobs
and other jobs that implement and enable the
process steps in the process flow.
• Based on success, failure or partial failure of
production machine jobs and transport jobs, and
based on metrology results and other
information, determine the next activities for
material and factory resources. This may
include splitting or joining product groups,
scrapping material, downgrading or changing
the product type of material, and other actions
responsive to job performance and resource
availability. Once split, scrap and other
decisions are made, Factory Operations may
use scheduling utilities to select the next
activities for the material and resources.
• Record and report factory job status and decisions
in factory job histories.
• Report status and progress on enterprise product
requests.
• Manage assignment of human resources to other
factory resources.
7.2.14 Responsibilities of Scheduling Component
7.2.14.1 The Scheduling component supports Factory
Operations, Material Movement, Production Machine
and other components by ordering, in time, jobs that
process material on equipment, move material, maintain
equipment, etc. The scheduler uses knowledge of
product demand, equipment and material state, process
flows, throughput bottlenecks, operational policy and
constraints, and other information to recommend jobs
that maximize effective utilization of factory resources
to satisfy product demand and planned objectives.
7.2.14.2 The CIM Framework specifies a dispatching
function to support Factory Operations. Dispatching
provides an answer to questions of the form, “What is
next for this material or resource?” The answer may be
based on any number of current or future constraints
and objectives, but the dispatcher does not typically
define a sequence of jobs projected into the future.
Scheduling functions in the Scheduling component
provide this future job sequencing function. Separate
scheduler and dispatcher utilities can also provide
resource-focused utilities, such as scheduling of process
resources within a production machine or scheduling of
material transport and storage resources and internal
material movements within the factory-wide material
transport and storage system.
7.2.14.3 Build-time Responsibilities of Scheduling
Component
• Configure scheduling and dispatching decision
mechanisms (for example, define scheduling goals
and constraints, rules for resolving conflicting
constraints, etc.).
7.2.14.4 Run-time Responsibilities of Scheduling
Component
• Monitor resource and material state and apply
scheduling and dispatching decision mechanisms to
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recommend the next task (dispatching) or a
sequence of tasks (scheduling) for factory
resources.
7.2.15 Responsibilities of Equipment Tracking and
Maintenance Component
7.2.15.1 The Equipment Tracking and Maintenance
component implements the Factory Resource
architecture (see Section 7.3.3) specialized for
production equipment (process and metrology tools and
material handling and storage equipment).
7.2.15.2 Note that the machine is the software
representation of physical equipment and should reflect
the state of that equipment. The functionality can be
implemented within the equipment, within the MES, or
in a separate system such as a cell controller, station
controller or equipment integration solution.
7.2.15.3 Build-time Responsibilities of Equipment
Tracking and Maintenance Component
• Configure production machines as a combination
of, or relationship to, process resources (such as
process chambers) and support resources
(loadports, add-on sensors, internal material buffers
and transport, etc.).
• Configure material handling resources as a
combination of transport machines and storage
machines and relations to support resources
(loadports, add-on sensors such as automatic
material identification, etc.).
• Configure equipment state models compatible with
SEMI E10 (at the machine level and/or at the
machine resource level).
• Configure (initial or nominal) production machine
capabilities.
• Configure the (initial) recipe namespaces that
production machines use and manage.
• Configure the (initial) material locations that
material transport equipment is able to reach and
the locations it is authorized to reach.
• Define equipment maintenance tasks and what
triggers them.
• Tasks: repair, calibration, qualification, etc.
• Triggers: failures, usage, elapsed time, need by
another related maintenance task, etc.
• Use document management and version control for
maintenance specification change control.
7.2.15.4 Run-time Responsibilities of Equipment
Tracking and Maintenance Component
• Track the equipment state and update the machine
state, accordingly.
• Keep the machine state model current.
• Report and record equipment and machine state
changes, alarms and events in machine history.
• Support query of machine state and history.
• Update machine and machine resource process
capabilities to reflect machine state and
capability and machine assigned capabilities.
• Drive the equipment to a requested state.
• Collect and report machine performance according
to SEMI E58 and other utilization and
effectiveness measures.
• Monitor equipment maintenance triggers.
• Execute and monitor triggered maintenance jobs.
• Update equipment state and resource capability
(before and after maintenance).
• Recommend maintenance jobs for scheduling.
• Execute maintenance jobs and report job
progress.
• Record maintenance triggered and maintenance
job results in equipment maintenance history.
• Manage the relationships between production
machines that have specific process capabilities
and process flows that need specific process
capabilities.
• Manage the material locations that material
transport equipment is capable of reaching and is
authorized to reach.
7.2.16 Responsibilities of Production Machine
Component
7.2.16.1 The Production Machine component supports
execution of production machine jobs on process
equipment and interaction with material handling
equipment for material input/output at the machine. The
functionality can be implemented within the equipment
and/or in a separate system such as a cell controller,
station controller or equipment integration solution.
7.2.16.2 Build-time Responsibilities of Production
Machine Component
7.2.16.2.1 Note that the configuration of the machine
is the responsibility of the Equipment Tracking and
Maintenance component.